Updated on 2024/03/20

写真a

 
SUZUKI Norikazu
 
Organization
Faculty of Science and Engineering Professor
Other responsible organization
Precision Engineering Course of Graduate School of Science and Engineering, Master's Program
Precision Engineering Course of Graduate School of Science and Engineering, Doctoral Program
Contact information
The inquiry by e-mail is 《here
External link

Degree

  • 博士(工学) ( 名古屋大学 )

  • 修士(工学) ( 神戸大学 )

Education

  • 2000.3
     

    Kobe University   master course   completed

  • 1998.3
     

    Kobe University   graduated

Research History

  • 2022.4 - Now

    Chuo University, Graduate School of Science and Engineering   Department of Precision Mechanics   Professor

  • 2021.4 - Now

    Chuo University   Faculty of Science and Engineering Department of Precision Mechanics   Professor

  • 2002.11 - 2021.3

    Nagoya University   Graduate School of Engineering

  • 2000.4 - 2002.10

    Hitachi, Ltd.

Professional Memberships

  • 2021.3 - Now

    CIRP

  • 2005 - Now

    The Japan Society of Mechanical Engineers

  • 2000 - Now

    The Japan Society for Precision Engineering

  • 2000 - Now

    The Japan Society for Abrasive Technology

  • 公益社団法人自動車技術会

  • 3rd CIRP conference PMI2012

  • International Program Committee of ICPT

  • 日本設計工学会

  • 型技術協会

▼display all

Research Interests

  • Cutting

  • Polishing

  • Machine tool

  • Digital manufacturing

Research Areas

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Manufacturing and production engineering  / Production engineering/Processing studies

Papers

  • Estimation of Hardness and Residual Stress on End-Milled Surfaces Using Linear Regression Model Reviewed

    Hideyuki Fujii, Yukio Takahashi, Jiei Hodohara, Norikazu Suzuki, Yuki Yamada, Yasuhiro Imabeppu, Naruhiro Irino

    International Journal of Automation Technology   17 ( 6 )   564 - 574   2023.11

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    Authorship:Corresponding author   Publishing type:Research paper (scientific journal)   Publisher:Fuji Technology Press Ltd.  

    This study presents a novel method for estimating the surface integrity of end-milled workpieces. It is well known that the mechanical properties of machined surfaces in cutting affect the quality of the final product. In particular, hardness and residual stress often require strict control; however, nondestructive inspection remains a challenge. This study proposes a method to estimate the hardness and residual stress of end-milled surfaces by analyzing cutting forces and images of the tool during machining to obtain approximate temperature and stress distributions. These state quantities are highly correlated with the dislocation density and its distribution on the machined surface, which in turn is strongly correlated with residual stress and surface hardness. Despite this strong correlation, few research studies have been conducted on the topic. In the proposed method, cutting forces, measured by a dynamometer, are analyzed to estimate the specific cutting forces and edge force coefficients. Simultaneously, the flank wear width is recorded using an image-based on-machine measuring device installed in the machine tool. From this information, the average stresses at the primary and tertiary cutting zones are estimated, while the cutting temperature in the primary cutting zone is roughly estimated by considering the traditional shear-angle prediction theory. Using these estimations, hardness and residual stress are calculated based on a simple linear regression model. Parameter identification for the model is performed based on measured hardness and residual stress in end-milling experiments. The model was validated against experimental measurements, which showed that the proposed method can accurately estimate hardness and residual stress, although it was observed that the selection of explanatory variables has a significant effect on accuracy.

    DOI: 10.20965/ijat.2023.p0564

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  • Machine tool calibration: Measurement, modeling, and compensation of machine tool errors Reviewed International coauthorship

    Wei Gao, Soichi Ibaraki, M. Alkan Donmez, Daisuke Kono, J.R.R. Mayer, Yuan-Liu Chen, Károly Szipka, Andreas Archenti, Jean-Marc Linares, Norikazu Suzuki

    International Journal of Machine Tools and Manufacture   187   104017 - 104017   2023.4

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier BV  

    DOI: 10.1016/j.ijmachtools.2023.104017

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  • Novel method to visualize Preston’s coefficient distribution for chemical mechanical polishing process Reviewed

    Yohei Hashimoto, Tatsuaki Furumoto, Takumi Sato, Norikazu Suzuki, Hozumi Yasuda, Satoru Yamaki, Yoshihiro Mochizuki

    Japanese Journal of Applied Physics   61   116502   2022.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ac916b

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  • Parameter Identification for Linear Model of the Milling Process Using Spindle Speed Variation Reviewed

    K. Takahei, S. Miwa, E. Shamoto, N. Suzuki

    Precision Engineering   78 ( 1 )   in press   2022.9

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2022.08.011

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  • Identification of the Model Parameter for Milling Process Simulation with Sensor-integrated Disturbance Observer Reviewed

    K. Takahei, N. Suzuki, E. Shamoto

    Precision Engineering   78 ( 1 )   146 - 162   2022.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2022.07.013

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  • Process state estimation in Chemical Mechanical Polishing (CMP) by inverse analysis of in-process data Reviewed

    N. Suzuki, R. Yamaguchi, Y. Hashimoto, H. Yasuda, S. Yamaki, Y. Mochizuki

    CIRP Annals - Manufacturing Technology   71 ( 1 )   273 - 276   2022.7

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    DOI: 10.1016/j.cirp.2022.04.060

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  • Vibration analysis and cutting simulation of structural nonlinearity for machine tool Reviewed

    Naruhiro Irino, Yasuhiro Imabeppu, Yosuke Higuchi, Yuta Shinba, Kengo Kawai, Norikazu Suzuki, Junichi Kaneko, Yasuhiro Kakinuma, Masahiko Mori

    CIRP Annals   70 ( 1 )   317 - 320   2021.6

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier BV  

    DOI: 10.1016/j.cirp.2021.04.073

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  • Dynamic contour error compensation in micro/nano machining of hardened steel by applying elliptical vibration sculpturing method Reviewed International coauthorship

    Jianguo Zhang, Norikazu Suzuki, Eiji Shamoto, Jianfeng Xu

    Precision Engineering   71 ( 1 )   250 - 262   2021.4

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    DOI: 10.1016/j.precisioneng.2021.03.017

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  • Development of Automatic Chatter Suppression System in Parallel Milling by Real-Time Spindle Speed Control with Observer-Based Chatter Monitoring Reviewed

    Shuntaro Yamato, Kenichi Nakanishi, Norikazu Suzuki, Yasuhiro Kakinuma

    International Journal of Precision Engineering and Manufacturing   22 ( 1 )   227 - 240   2021.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    To maximize the potential for high material removal rates in simultaneous processes such as parallel milling, developing strategies for successful chatter suppression/avoidance is an important concern for manufacturers. In this study, the effectiveness of the spindle speed difference method (SDM) for chatter suppression is discussed in a parallel end-milling process where a flexible workpiece is machined by two tools rotating in opposite direction. The process model is developed, considering that the dynamic variation due to the regenerative effect occurs on a plane perpendicular to the tool axis direction. Through the process simulations and the experiments, this study provides informative discussion for comprehending the process behavior. Additionally, a real-time active chatter suppression system with adaptive SDM, where the spindle speed difference is sequentially optimized during the process according to the tracked chatter frequency, is developed by integrating a chatter monitoring system based on sensorless cutting force estimation with sliding discrete Fourier transform. The results show that the developed real-time adaptive system of spindle speed suppresses chatter vibrations more effectively than non-adaptive SDM system; hence, the integrated system can contribute self-optimizing machining systems oriented to Industry 4.0.

    DOI: 10.1007/s12541-021-00469-2

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  • Influence of flank texture patterns on suppression of chatter vibration and flank adhesion in turning operation Reviewed

    Wataru Takahashi, Tomoki Nakanomiya, Norikazu Suzuki, Eiji Shamoto

    Precision Engineering   68 ( 1 )   262 - 272   2020.12

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2020.12.007

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  • Development of a novel boring tool with anisotropic dynamic stiffness to avoid chatter vibration in cutting Part 2: Analytical and experimental verification of the proposed method Reviewed

    Wataru Takahashi, Norikazu Suzuki, Eiji Shamoto

    Precision Engineering   68 ( 1 )   20 - 34   2020.11

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2020.11.008

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  • Development of a novel boring tool with anisotropic dynamic stiffness to avoid chatter vibration in cutting Part 1: Design of anisotropic structure to attain infinite dynamic stiffness Reviewed

    Wataru Takahashi, Norikazu Suzuki, Eiji Shamoto

    Precision Engineering   68 ( 1 )   57 - 71   2020.11

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2020.11.007

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  • Experimental verification of design methodology for chatter suppression in tool swing–assisted parallel turning Reviewed

    Shuntaro Yamato, Kenichi Nakanishi, Norikazu Suzuki, Yasuhiro Kakinuma

    The International Journal of Advanced Manufacturing Technology   110 ( 1 )   1759 - 1771   2020.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1007/s00170-020-05951-1

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  • Flank face texture design to suppress chatter vibration in cutting Reviewed

    Norikazu Suzuki, Wataru Takahashi, H. Igeta, Tomoki Nakanomiya

    CIRP Annals - Manufacturing Technology   69 ( 1 )   93 - 96   2020.5

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.cirp.2020.04.037

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  • Material removal efficiency improvement by orientation control of CMP pad surface asperities Reviewed

    Norikazu Suzuki, Hirotaka Misono, Eiji Shamoto, Yohei Hashimoto, Hozumi Yasuda, Yoshinobu Mochizuki

    Precision Engineering   62 ( 1 )   83 - 88   2019.11

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2019.11.008

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  • Enhancement of cutting force observer by identification of position and force-amplitude dependent model parameters Reviewed

    Akihiro Sugiyama, Shuntaro Yamato, Norikazu Suzuki, Naruhiro Irino, Yasuhiro Imabeppu, Yasuhiro Kakinuma

    The International Journal of Advanced Manufacturing Technology   104 ( 1 )   3589 - 3605   2019.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    External sensor-less cutting force estimation has good potential in terms of its sustainability. However, its accuracy will deteriorate due to variation of machine dynamics depending on the stage position and cutting force amplitude. In the conventional methods, the physical model parameters such as the axial stiffness and viscous damping coefficient are regarded as constant values identified at a certain condition. As a result, the estimation accuracy decreases because the above parameter variation is not considered. To tackle this issue, a simple parameter identification method in time domain by employing the least-squares method (LSM) and a cutting force estimation by a load-side disturbance observer (LDOB) are proposed for a full-closed controlled ball-screw-driven stage. A series of excitation tests were conducted at different stage positions and various excitation amplitudes in order to capture the position and force-amplitude dependent model parameters. The difference of model behavior in the moving and stopped condition of the stage was also investigated. The position and force-amplitude dependent model parameters captured by the proposed method are installed into the observer. The validity of the proposed method was evaluated through end-milling tests. The experimental results clearly showed that the estimation accuracy of cutting force can be greatly improved in both feed and cross-feed directions by taking into account the position and force-amplitude dependency of physical model parameters.

    DOI: 10.1007/s00170-019-04080-8

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  • Frictional properties of surface textures fabricated on hardened steel by elliptical vibration diamond cutting Reviewed International coauthorship

    Jianguo Zhang, Junjie Zhang, Andreas Rosenkranz, Norikazu Suzuki, Eiji Shamoto

    Precision Engineering   59 ( 1 )   66 - 72   2019.6

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    DOI: 10.1016/j.precisioneng.2019.06.001

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  • Chatter suppression in parallel turning assisted with tool swing motion provided by feed system Reviewed

    Shuntaro Yamato, Toshiki Okuma, Kenichi Nakanishi, Junji Tachibana, Norikazu Suzuki, Yasuhiro Kakinuma

    International Journal of Automation Technology   13 ( 1 )   80 - 91   2019.1

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Fuji Technology Press Ltd.  

    <p>Parallel turning technology has been attracting attention as an important technology to enhance the productivity of multitasking machine tools. To maximize the productivity advantage of parallel turning, chatter avoidance or suppression is one of the most noteworthy concerns. In this study, a novel chatter suppression technique using tool swing motion is provided by a feed drive system. The optimal design methodology of the tool swing motion for effective chatter suppression is also introduced based on its analogy with the spindle speed variation technique under the shared-surface parallel turning and rigid-tool and flexible-workpiece assumptions. The proposed method was evaluated with regard to the chatter stabilizing performance and workpiece runout as compared to conventional equal pitch turning and unequal pitch turning for chatter suppression. As a result, the proposed tool swing parallel turning exhibited a high chatter stabilizing performance without eccentricity of the workpiece and enhanced surface quality, although particular swing marks were left on the machined surface.</p>

    DOI: 10.20965/ijat.2019.p0080

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  • Enhancement of Sensor-less Cutting Force Estimation by Tuning of Observer Parameters from Cutting Test

    Shuntaro Yamato, Yasuhiro Imabeppu, Naruhiro Irino, Norikazu Suzuki, Yasuhiro Kakinuma

    Procedia Manufacturing   41   272 - 279   2019

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    Publishing type:Research paper (scientific journal)   Publisher:Elsevier BV  

    DOI: 10.1016/j.promfg.2019.07.056

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  • Enhancement of sensor-less cutting force estimation by tuning of observer parameters from cutting test

    Shuntaro Yamato, Yasuhiro Imabeppu, Naruhiro Irino, Norikazu Suzuki, Yasuhiro Kakinuma

    Procedia Manufacturing   41   272 - 279   2019

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    Publishing type:Research paper (international conference proceedings)  

    The cutting force measurement is a basic technology for process monitoring and optimization. For practical operations, the sensorless techniques for cutting force estimation based on internal information on machine tools is more desirable. In this study, the load-side disturbance observer (LDOB) is introduced in full-closed controlled ball-screw-driven stage to estimate the cutting force with high accuracy. Since the LDOB is a model-based technique, appropriate model parameters such as stiffness and damping, which precisely represent the dynamic characteristics of the feed drive system, are necessary for accurate force estimation. Generally, the model parameters are identified by dynamic identification tests such as tap testing or motor sweep test. However, it has been known that the dynamic characteristics of ball-screw-driven-stage is changed, for instance, depending on stage position and amplitude of exciting force. Therefore, the model parameters should be determined under actual cutting state. In this paper, from the above viewpoints, the concept and methodology, that the machine tools determine the model parameters of the cutting force observer by themselves based on their own responses to cutting test, is also proposed.

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  • Integrated in-process chatter monitoring and automatic suppression with adaptive pitch control in parallel turning Reviewed

    Yamato Shuntaro, Yamada Yuki, Nakanishi Kenichi, Suzuki Norikazu, Yoshioka Hayato, Kakinuma Yasuhiro

    ADVANCES IN MANUFACTURING   6 ( 3 )   291 - 300   2018.9

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    Simultaneous processes such as parallel turning or milling offer great opportunities for more efficient manufacturing because of their higher material removal rates. To maximize their advantages, chatter suppression technologies for simultaneous processes must be developed. In this study, we constructed an automatic chatter suppression system with optimal pitch control for shared-surface parallel turning with rigid tools and a flexible workpiece, integrating in-process chatter monitoring based on the cutting force estimation. The pitch angle between two tools is tuned adaptively in a position control system in accordance with the chatter frequency at a certain spindle speed, in a similar manner as the design methodology for variable-pitch cutters. The cutting force is estimated without using an additional external sensor by employing a multi-encoder-based disturbance observer. In addition, the chatter frequency is measured during the process by performing a low-computational-load spectrum analysis at a certain frequency range, which makes it possible to calculate the power spectrum density in the control system of the machine tool. Thus, the constructed system for automatic chatter suppression does not require any additional equipment.

    DOI: 10.1007/s40436-018-0222-0

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  • Chatter Avoidance in Parallel Turning with Unequal Pitch Angle Using Observer-Based Cutting Force Estimation Reviewed

    Shinya Sakata, Takashi Kadota, Yuki Yamada, Kenichi Nakanishi, Hayato Yoshioka, Norikazu Suzuki, Yasuhiro Kakinuma

    Journal of Manufacturing Science and Engineering, Transactions of the ASME   140 ( 4 )   2018.4

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:American Society of Mechanical Engineers (ASME)  

    Parallel turning is garnering attention as one of the most important technologies for multitasking machine tools. This is because a potential exists to enhance the stability limits compared to the turning operation using a single tool when cutting conditions are properly selected. Although stability prediction models for parallel turning have been developed in recent years, in-process monitoring and in-process chatter techniques are almost not discussed. In this study, to suppress chatter vibration, an unequal pitch turning method was proposed. In this method, the upper tool was controlled based on the optimum pitch angle calculated from spindle speed and chatter frequency. Chatter frequency was identified from estimated cutting force by a disturbance observer (DOB). From the result of the parallel turning test, it is clear that chatter vibration can be avoided by controlling the upper tool based on optimum pitch angle. Meanwhile, the pitch angle difference that can suppress chatter had a certain range. Subsequently, the robustness of the optimum pitch angle difference is experimentally evaluated by both the continuous moving test and the stepwise moving test of the pitch angle.

    DOI: 10.1115/1.4039111

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  • Development of a milling technology with SPRT for Ni-base super alloy

    Kato Yuya, Suzuki Norikazu, Shamoto Eiji, Naiki Yukio, Takagi Yuji

    Proceedings of JSPE Semestrial Meeting   2018   321 - 322   2018

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    &lt;p&gt;Ni基耐熱合金に対して従動式ロータリ機構を備えたミーリング工具による正面フライスを実施し,その実用性について検討を行った.実験の結果,回転運動を伴わない通常切削に対して約12倍の工具寿命延長効果が確認された.また,切削シミュレーションを援用したプロセスの見える化技術を開発し,その分析を行った.諸検討により,ランピング加工においてランピング角の制約が厳しいことが明らかとなり,その解決手法を提案した.&lt;/p&gt;

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  • Primary study on post-processing technology utilizing machining process for additive manufacturing

    Ohba Takayuki, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2018   491 - 492   2018

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    &lt;p&gt;3Dプリンタの普及に伴い,3次元積層造形構造の利用が急速に進められている.造形技術が急速に発展した一方で,その表面に形成される積層段差の後処理技術に関しては,自動化技術が確立されていない.本研究では,3次元積層造形構造の表面除去加工における自動化技術について検討を行った.汎用工作機械に,柔軟な治具をかいして工作物を固定し,研削と研磨による定圧加工を行うことで,自動化の可能性があることを明らかにした.&lt;/p&gt;

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  • Intelligent identification of milling process by utilizing disturbance force estimation based on multi-inertial model of ball-screw drive system and cutting simulation

    Ohno Shoya, Suzuki Norikazu, Shamoto Eiji, Ikeda Ryosuke, Takahei Kazuki, Fujita Tomoya

    Proceedings of JSPE Semestrial Meeting   2017   59 - 60   2017

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    モデルベースシミュレーションを利用して,構造物の動特性や切削プロセスのパラメータを同定する手法が提案されている.本稿では,ボールねじ駆動系の多慣性モデルを考慮したCNC工作機械の外乱オブザーバを検討した.これをすでに提案されているプロセス同定システムに適用し,汎用的な工作機械を対象とした知的同定の実行可能性について検討を行った.検証実験の結果,ミリングプロセスの同定を概ね実現し得ることを確認した.

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  • DESIGN OF ANISOTROPIC BORING TOOLS WITH L/D=10 FOR CHATTER FREE CUTTING Reviewed

    Wataru Takahashi, Norikazu Suzuki, Eiji Shamoto

    PROCEEDINGS OF THE ASME 12TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE - 2017, VOL 3   2017

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:AMER SOC MECHANICAL ENGINEERS  

    This paper presents design of a novel boring bar with a ratio of cylinder length to diameter (L/D) of 10 to suppress chatter vibration regardless of low stiffness. It is essentially difficult to decrease the compliance of the long slender structures. However, nominal compliance of the displacement along the depth of cut direction against the resultant cutting force may be. regulated by giving the designated anisotropy upon the boring bar dynamics. The past research has clarified the feasibility through turning experiments by using the developed boring bar with L/D of 4. In the present study, much slenderer ones with L/D of 10 are designed, which are significantly flexible but attractive to manufacturers. Finite element analysis (FEA) is utilized to estimate dynamics of the anisotropic boring bar. Through analytical investigations, two kinds of boring bars were designed, where the compliance ratio of 1.53 or 1.88 was accomplished. Influence of several conditions on the chatter stability was investigated. Analytical investigations revealed that the chatter stability is significantly improved at a designated depth of cut by utilizing the proposed designs regardless of feed rate. In particular, the compliance ratio of 1.55 showed wider stable zone to attain chatter free boring, while chatter avoidance is impossible by use of the conventional isotropic boring bar under the same conditions.

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  • Intelligent process identification by utilizing disturbance force estimation and cutting simulation in milling process

    Ikeda Ryosuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2017   919 - 920   2017

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    DOI: 10.11522/pscjspe.2017S.0_919

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  • CHATTER SUPPRESSION IN PARALLEL TURNING WITH UNEQUAL PITCH USING OBSERVER BASED CUTTING FORCE ESTIMATION Reviewed

    Shinya Sakata, Takashi Kadota, Yuki Yamada, Kenichi Nakanishi, Hayato Yoshioka, Norikazu Suzuki, Yasuhiro Kakinuma

    PROCEEDINGS OF THE ASME 12TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE - 2017, VOL 3   2017

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:AMER SOC MECHANICAL ENGINEERS  

    Parallel turning attracts attention as one of the important technologies for the multi-tasking machine tools. This is because there is a potential to enhance the stability limits compared to turning operation using single tool when cutting conditions are properly selected. Although stability prediction models for parallel turning have been developed in recent years, in-process monitoring technique of chatter is almost out of focus.
    In this study, to suppress chatter vibration, unequal pitch turning method was proposed. In this method, the upper tool was controlled based on optimum pitch angle calculated from spindle speed and chatter frequency. Chatter frequency was identified from estimated cutting force by disturbance observer. From the result of parallel turning test, it is clear that chatter vibration can be suppressed by controlling the upper tool based on optimum pitch angle.

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  • Prediction of polishing pressure distribution in CMP process with airbag type wafer carrier Reviewed

    N. Suzuki, Y. Hashimoto, H. Yasuda, S. Yamaki, Y. Mochizuki

    CIRP Annals - Manufacturing Technology   66 ( 1 )   329 - 332   2017

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier USA  

    This paper presents a CMP process analysis considering an airbag type wafer carrier, which is used in semiconductor devices manufacturing. In the CMP process, a wafer is compressed against the polishing pad inside the wafer carrier, which consists of the retainer ring and the membrane film. Structural analysis model is developed to estimate contact pressure distribution over the wafer surface considering the airbag compression behaviour. The polishing experiment without wafer rotation indicated a unique pressure variation around the trailing edge of the wafer. The developed analysis estimated the same phenomena accurately and clarified the mechanism deteriorating the polishing pressure uniformity.

    DOI: 10.1016/j.cirp.2017.04.088

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  • Influence of clearance angle on micro/nano structure fabrication in elliptical vibration cutting of hardened steel Reviewed

    Jianguo Zhang, Norikazu Suzuki, Yilong Wang, Eiji Shamoto

    International Journal of Nanomanufacturing   13 ( 4 )   351 - 361   2017

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Inderscience Enterprises Ltd.  

    Surfaces textured by sophisticated micro/nano structures can provide advanced and useful functions and features as compared with simply smooth surfaces. To promote widespread use of the structured surfaces, manufacturing technology of structured surfaces for ultra-precision dies and moulds made of hardened steel is absolutely essential. Conventional diamond cutting is not applicable to machining of steel due to rapid tool wear and surface deterioration. On the other hand, elliptical vibration cutting (EVC) equipped with the ultra-precision amplitude control sculpturing method is considered as a potential candidate for the functional surface fabrication on steel materials. In this method, tool geometry, especially the clearance angle, imposes a limit on the machinable part geometry due to the flank face contact to the target shape in the downhill machining. In order to clarify the influence of flank face contact on the machining accuracy and the tool wear, a series of theoretical and experimental investigations are conducted in this paper. A surface with micro sine-sweep profile is fabricated on hardened steel by applying the proposed amplitude control sculpturing method. It verified that the interference between flank face and fabricated structure causes not only the serious machining accuracy deterioration but also the serious tool damage due to the enhancing of ploughing process.

    DOI: 10.1504/IJNM.2017.087536

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  • Suppression of chatter vibration using parallel turning assisted with swing motion

    OKUMA Toshiki, SAKATA Shinya, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, SUZUKI Norikazu, KAKINUMA Yasuhiro

    The Proceedings of Mechanical Engineering Congress, Japan   2017 ( 0 )   S1330101   2017

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    <p>Multi-tasking machine tools attract attention, because they can perform highly efficient machining by using multiple tools. Parallel turning with two tools can realize high material removal rate and the productivity is remarkably improved when appropriate cutting condition is selected. On the other hand, compared to turning with a single tool, the stability of the process reduces, and chatter vibration tends to occur. Chatter vibration does not only limit productivity but also cause poor surface and dimensional accuracy. In this research, to suppress chatter vibration in parallel turning, we propose swing motion assisted parallel turning with an optimum amplitude ratio, calculated from chatter frequency and spindle speed. The proposed method aims to suppress chatter vibration by giving variations in phase delay due to high speed swing of tool. Chatter frequency is measured from estimated cutting force applying disturbance observer. The result of swing motion assisted turning test indicates that chatter vibration can be suppressed by dynamically changing cutting point based on the optimum amplitude ratio.</p>

    DOI: 10.1299/jsmemecj.2017.S1330101

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  • 切削加工におけるびびり振動の安定性を向上するロバストな再生振動相殺技術(キーノートスピーチ)

    鈴木 教和

    精密工学会学術講演会講演論文集   2017   37 - 38   2017

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    切削加工における高能率化を実現する上でびびり振動対策は極めて重要である.不等ピッチ・不等リード工具は,不安定化を引き起こす再生振動の抑制に効果的に利用することができる.本稿では,びびり振動の周波数および軸方向切込み条件に対して高いロバスト性を満たす,実用的な工具設計理論を紹介する.さらに,再生効果抑制理論を応用したインデクサブルカッタの設計法およびパラレールターニングの研究事例を紹介する.

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  • Textures on flank face to attainchatter suppression in cutting

    Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2017   989 - 990   2017

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    DOI: 10.11522/pscjspe.2017S.0_989

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  • Development of a high-performance chip-guiding turning process-tool design and chip flow control Reviewed

    Tomoya Aoki, Burak Sencer, Eiji Shamoto, Norikazu Suzuki, Tomio Koide

    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY   85 ( 1-4 )   791 - 805   2016.7

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    In general practice, chip breakers are used to break chips in turning operations for chip disposal. However, chips of highly ductile materials such as low carbon steel or thin chips generated in finishing operations may not be broken easily with conventional chip breakers. They cause chip-jam and significant downtime in actual production. This paper proposes a novel approach where the generated chip is not broken but guided to overcome first the chip-jam and next to improve the efficiency of conventional turning operations by realizing the chip-pulling turning process. A novel cutting tool geometry is developed to suppress the chip's side curl to generate straight continuous chip flowing away from the cutting point and hence suppress the chip-jam. The proposed tool tip geometry contains "guide grooves" engraved onto the rake face. The groove topography is optimized to control the chip flow robustly at various cutting conditions so that the cut chip can be guided for effective chip guidance. Continuously flowing guided chip is then pulled to reduce the friction force on the rake face to enhance the machinability. Experimental results show that the designed cutting tool geometry robustly controls the chip flow, and the chip-pulling turning process shows significant potential towards achieving higher machinability in hard turning.

    DOI: 10.1007/s00170-015-7990-5

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  • Primitive study on cutting force model considering chatter vibration with finite vibration amplitude

    Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2016   377 - 378   2016

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    低切削速度条件ではプロセスダンピングという現象が発現してびびり振動の安定性が向上する.多くのモデルが提案されてきたが,その現象の詳細なメカニズムは不明であり,切削力モデルも検証されていない.そこで,本研究では,低速領域でびびり振動が発生する場合の切削現象について検討を行う.有限の振動変位を持つびびり振動が発生する場合の新しい切削力モデルを提案し,有限要素解析による検討を通じてその検証を行う.

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  • Mechanics of Chip-Guiding Cutting with Grooved Tools Reviewed

    AOKI Tomoya, SENCER Burak, SUZUKI Norikazu, KOIDE Tomio, SHAMOTO Eiji

    Journal of the Japan Society for Precision Engineering   82 ( 1 )   75 - 81   2016

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    The mechanics of &amp;ldquo;chip-guiding cutting&amp;rdquo; with grooved tools are investigated in the present study. The chip-guiding cutting has been proposed by the authors to realize continuous chip disposal. It has been clarified in the previous study that chips can be guided successfully into desired directions with the grooved round-nose tools, but the mechanics of the new cutting process with the guide grooves has not been clarified. Fundamental chip-guiding cutting experiments are carried out with grooved straight-edge tools in this study. An analytical model for the chip-guiding cutting process is developed. Effects of the chip-guiding on the process parameters such as cutting forces are investigated accurately by the proposed model and validated by cutting experiment. Both experimental and analytical results unveil that chip flow direction can be controlled by chip-guiding forces generated by the side-walls of the groove structure engraved on the rake face. It is shown that as the chip flow direction can be altered to the various guide directions from the original one, and the proposed model predicts that as the guiding force increases, shear angle decreases and thus resultant cutting force is increased only slightly. Therefore, when the guide direction is not dramatically different from the original chip flow direction, the resultant cutting force is not increased significantly, which make the process favorable. These results support the fact that proposed model captures the critical cutting mechanics accurately.

    DOI: 10.2493/jjspe.82.75

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  • Model-based process identification by utilizing disturbance force estimation against servo system and cutting simulation

    Ikeda Ryousuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2016   763 - 764   2016

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    本研究では,外乱力の推定結果に基づいてモデルベースで動的切削プロセスのパラメータ同定を行う新しい手法を提案する.まず,加工に用いる機械構造の動剛性モデルと再生効果を含めた切削プロセスモデル,および各モデルに基づく時間領域シミュレータを開発する.加工中にCNC制御系に作用する外乱力の推定値から,逆解析を行うことでプロセスモデルのパラメータ同定を行う.断続切削実験により,提案手法の実現可能性を確認する.

    DOI: 10.11522/pscjspe.2016S.0_763

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  • Semidiscrete time domain solution of cutting process using variable helix end mills

    Ishiguro Rikiya, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2016   651 - 652   2016

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    不等リードエンドミルを用いて浅切込み加工を行う場合に,びびり振動を効果的に抑制することができる.しかし,このプロセスでは切削の断続性に起因して,高精度な安定性解析が難しいことが知られている.このような時間遅れを伴う常微分方程式の解法としてSemidiscrete method(SD法)が提案されている.本研究では,不等リードエンドミルを用いるプロセスに対応したSD法を提案し,先行研究の解析モデルとの比較による検証を行った.

    DOI: 10.11522/pscjspe.2016S.0_651

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  • PRIMITIVE STUDY ON MODEL-BASED PROCESS IDENTIFICATION BY UTILIZING FORCE ESTIMATION TECHNIQUES Reviewed

    Norikazu Suzuki, Ryosuke Ikeda, Eiji Shamoto

    PROCEEDINGS OF THE ASME 11TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE, 2016, VOL 2   2016

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:AMER SOC MECHANICAL ENGINEERS  

    This study presents a new method to identify parameters representing cutting process and transfer function of flexible mechanical structures mounted on a traveling stage by utilizing only internal information of computerized numerical control (CNC) system. Disturbance force input to CNC is estimated by disturbance observer and cutting force is estimated based on cutting force model. Analyzing influence of the estimated cutting force on the disturbance force, parameters used in the assumed models of cutting process and structural dynamics are identified in quasi-real-time. Least square method (LSM) is utilized for the parameter identification. Face turning experiment using an ultra-precision machine tool was conducted to verify feasibility of the proposed method. Experimental results clarified that the cutting force coefficient and the modal parameters representing the dynamic characteristics of the force transfer function can be identified accurately by the proposed method.

    DOI: 10.1115/MSEC2016-8872

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  • Design of irregular pitch end mills to attain robust suppression of regenerative chatter Reviewed

    N. Suzuki, R. Ishiguro, T. Kojima

    CIRP Annals - Manufacturing Technology   65 ( 1 )   129 - 132   2016

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier USA  

    This paper presents a design method of irregular pitch end mills, which ensures robust suppression of total regeneration in milling. Firstly, general formulation of irregular pitch angles is explained for simultaneous suppression of multi-mode regenerations. An index named “Regeneration Factor (RF)” is introduced to quantify regenerative effect. Minimizing the mean value of the |RF| within a certain frequency range, suppression frequencies are distributed in the proposed method, resulting in robust suppression of regeneration regardless of chatter frequency and/or spindle speed variations. Experimental investigations verified significant robustness of the end mill with the proposed design against the spindle speed variation.

    DOI: 10.1016/j.cirp.2016.04.041

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  • Suppression of chatter vibration by unequal pitch turning applying estimated cutting force

    KADOTA Takashi, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, YOSHIOKA Hayato, SUZUKI Norikazu, KAKINUMA Yasuhiro

    The Proceedings of The Manufacturing & Machine Tool Conference   2016 ( 0 )   A07   2016

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    <p>Multi-tasking machine tool with multi-turret is attracting a great deal of attention, which can offer higher efficiency and higher accuracy. However, chatter vibration generated during parallel turning with two tools might be one of the bottlenecks for higher material removal rate. To suppress chatter vibration, we proposed unequal pitch turning method in this research. In this method, the upper tool was properly controlled based on optimum pitch angle calculated from spindle speed and chatter frequency. Chatter frequency was identified from estimated cutting force by disturbance observer. From the result of parallel turning test, it is clear that chatter vibration can be suppressed by controlling the upper tool based on optimum pitch angle.</p>

    DOI: 10.1299/jsmemmt.2016.11.A07

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  • Development of a milling cutter with SPRT for difficult-to-cut materials machining

    KATO Yuya, SUZUKI Norikazu, SHAMOTO Eiji, NAIKI Yukio, TAKAGI Yuji

    The Proceedings of The Manufacturing & Machine Tool Conference   2016   2016

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    &lt;p&gt;In order to improve milling performance of difficult-to-cut materials, a unique milling cutter with SPRT (Self-Propelled-Rotary-Tool) was developed. Use of slide bearings enables a compact SPRT mechanism, while influence of bearing friction becomes not negligible. To attain self-revolution of a circular insert regardless of the bearing friction, the cutter geometry was optimized. Through face milling experiments of Inconel 718, superior tool wear resistance was verified as compared to the conventional milling without insert rotation. Analytical result of the measured cutting forces also indicated interesting phenomena in SPRT milling.&lt;/p&gt;

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  • A novel in-situ observation of local polishing efficiency by utilizing heat measurement

    Misono Hirotaka, Suzuki Norikazu, Oshika Shingo, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2016   219 - 220   2016

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    研磨プロセスのミクロな材料除去メカニズムを説明可能な理論は確立されていない.これが研磨効率の推定を困難にし,効率的なプロセス開発の妨げとなっている.本研究では,研磨効率のその場観察手法を提案する.材料除去に起因する赤外線をウェハ越しに観察することで,研磨中の局所的な材料除去の発生個所を特定する.表面凹凸が制御された織布パッドによる検証実験を実施し,ミクロな材料除去メカニズムについて考察を行った.

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  • Analysis of dynamic material properties based on asperity model of polishing pad surfaces

    Oshika Shingo, Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2016   215 - 216   2016

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    研磨パッド表面に存在する凹凸構造は研磨効率に直接的に影響するため,その分析は研磨メカニズムを理解する上で重要である.本研究では,研磨パッドの表面アスペリティを楕円球と楕円錐の集合体としてモデル化し,状測定結果から研磨に作用すると考えられる箇所の形状パラメータを同定する手法を考案した.さらに,弾性変形を仮定した力学モデルを定式化し,動的圧縮試験の結果から,材料物性パラメータについて分析を行った.

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  • Ultra-precision nano-structure fabrication by amplitude control sculpturing method in elliptical vibration cutting Reviewed

    Jianguo Zhang, Norikazu Suzuki, Yilong Wang, Eiji Shamoto

    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY   39   86 - 99   2015.1

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:ELSEVIER SCIENCE INC  

    This paper studies the nano-structure fabrication on hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this proposed method, machinable part geometry is essentially restricted by vibration conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, a series of analytical and experimental investigations are conducted. Furthermore, by applying the proposed command compensation method, nano-structures with a large ratio of structure height to wave length are machined accurately. The proposed sculpturing method is subsequently applied to the machining of nano-textured grooves and a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method. (C) 2014 Elsevier Inc. All rights reserved.

    DOI: 10.1016/j.precisioneng.2014.07.009

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  • S1330102 Experimental Verification of Design Theory for End mills to Attain Robust Chatter Suppression

    ISHIGURO Rikiya, SUZUKI Norikazu, SHAMOTO Eiji

    The Proceedings of Mechanical Engineering Congress, Japan   2015   _S1330102 - -_S1330102-   2015

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    Chatter vibration in milling often results in poor surface finish and rapid tool wear, consequently limiting productivity. It is known that regenerative effect, which causes chatter vibration, can be suppressed by utilizing irregular pitch cutters. In order to attain robust regeneration suppression for arbitrary chatter frequency, the authors have proposed a novel design theory of irregular pitch cutters. The fundamental mechanism of it is the simultaneous suppression of multi-mode regenerations. In the present study, the effect on chatter suppression has been verified through a series of end milling experiment. Analytical and experimental results indicated that the chatter stability is effectively increased by utilizing the irregular pitch cutter designed by the proposed theory.

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  • A NEW CONTACT MODEL OF PAD SURFACE ASPERITIES UTILIZING MEASURED GEOMETRICAL FEATURES Reviewed

    Yohei Hashimoto, Shingo Oshika, Norikazu Suzuki, Eiji Shamoto

    2015 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT)   2015

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  • A new estimation method of transfer function of mechanical structures by utilizing internal information of CNC

    Ikeda Ryousuke, Suzuki Norikazu, Sano Kenji, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2015   261 - 262   2015

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    機械構造の振動モデルを仮定し,切削力モデルと外乱オブザーバ技術を利用して切削力と外乱力を推定することで,工作機械の制御ループ外に存在する機械構造の伝達関数をCNCの内部情報のみから推定する新しい手法を提案する.剛性が低くなるように設計したツールホルダを超精密工作機械のテーブルに固定して断続的な旋削実験を行い,提案手法により周波数伝達関数の計測とモーダルパラメータの推定が可能であることを確認した.

    DOI: 10.11522/pscjspe.2015A.0_261

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  • Analysis on surface-asperity structure of polishing pad and investigation on its mechanical model

    Hashimoto Yohei, Oshika Shingo, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2015   541 - 542   2015

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    研磨加工において,研磨パッド表面に存在する突起の構造とその微視的な変形挙動は,加工メカニズムを考察する上で重要となる.本研究では,レーザ顕微鏡を用いて研磨に使用した研磨パッド表面形状の評価観察を行い,突起構造の分析とモデル化について検討した.そして,突起構造の変形挙動を表現する新しい力学モデルの検討を行った.

    DOI: 10.11522/pscjspe.2015S.0_541

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  • Fundamental investigation of ultra-precision ductile machining of tungsten carbide by applying elliptical vibration cutting with single crystal diamond Reviewed

    Jianguo Zhang, Norikazu Suzuki, Yilong Wang, Eiji Shamoto

    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY   214 ( 11 )   2644 - 2659   2014.11

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:ELSEVIER SCIENCE SA  

    This paper presents essential investigations on the feasibility of ductile mode machining of sintered tungsten carbide assisted by ultrasonic elliptical vibration cutting technology. It lays out the foundations toward efficient application of elliptical vibration cutting technology on tungsten carbide. Tungsten carbide is a crucial material for glass molding in the optics manufacturing industry. Its grain size and binder material have significant influence not only on the mechanical and chemical properties but also on the machining performance of tungsten carbide. In order to investigate the influence of material composition on tungsten carbide machining, a series of grooving and planing experiments were conducted utilizing single crystal diamond tools. The experimental results indicated that as compared to ordinary cutting where finished surface deteriorates seriously, ductile mode machining can be attained successfully by applying the elliptical vibration cutting technique. It was also clarified that the binder material, the grain size, cutting/vibration conditions as well as crystal orientation of the diamond tool have significant influence on the tool life and the machined surface quality. Based on these fundamental results, feasibility of micro/nano-scale fabrication on tungsten carbide is investigated. By applying amplitude control sculpturing method, where depth of cut is arbitrary changed by controlling the vibration amplitude while machining, ultra-precision textured grooves and a dimple pattern were successfully sculptured on tungsten carbide in ductile mode. (C) 2014 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.jmatprotec.2014.05.024

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  • Primary study on nonlinear viscoelasticity measurement of chemical mechanical polishing pads by applying on-machine compression test Reviewed

    Norikazu Suzuki, Akimitsu Kato, Masakazu Asaba, Eiji Shamoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 5 )   2014.5

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:IOP PUBLISHING LTD  

    Polishing pads used for chemical mechanical polishing (CMP) process have strong nonlinear viscoelasticity, which is considered to affect resultant polishing performance. In order to evaluate the material properties of polishing pads, a series of fundamental compression tests were conducted by using a developed on-machine compression tester. From measured stress-strain curves, parameters representing nonlinear elasticity and viscosity of the CMP pads are identified. Analytical results indicated unique nonlinear elasticity due to pad surface asperities and not negligible viscous damping. (C) 2014 The Japan Society of Applied Physics

    DOI: 10.7567/JJAP.53.05GB01

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  • High Efficiency Elliptical Vibration Cutting of Steel using Large Nose Radius Single Crystal Diamond Tool

    Wang Yilong, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2014   1021 - 1022   2014

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    Thus far, Elliptical Vibration Cutting has shown its superior machining performance in steel machining by using which the diamond tool life can be significantly improved. However, this machining technology is currently limited to the relatively small-size workpiece machining due to the small feed rates. If it is used to machine large-size steel workpiece, the machining time and cumulative cutting distance (or tool wear) will be remarkably increased which in turn dramatically increase the machining cost and cycle time. In order to apply this emerging machining technology effectively in industrial application, Elliptical Vibration Cutting with large nose radius single crystal diamond tool was proposed in this paper. However, the minimum uncut chip thickness (under which the material is not sheared but ploughed), that due to the presence of the tool edge radius becomes a major challenge when the large nose radius diamond tool is employed. Therefore, the influence of the minimum uncut chip thickness on material removal behavior during diamond machining needs to be understood and implemented in models. In this paper a simple but practical analytical model was developed for the optimizat

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  • Tool Failure Mechanism in High-Speed Milling of Inconel 718 by Use of Ceramic Tools. Reviewed

    Norikazu Suzuki, Risa Enmei, Yohei Hashimoto, Eiji Shamoto, Yuki Hatano

    IJAT   8 ( 6 )   837 - 846   2014

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    Authorship:Lead author, Corresponding author   Language:English   Publisher:Fuji Technology Press  

    DOI: 10.20965/ijat.2014.p0837

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  • Analytical Investigation on Polishing Pressure Distribution by Utilizing Three-Dimensional Process Simulation Reviewed

    Yohei Hashimoto, Norikazu Suzuki, Akimitsu Kato, Masakazu Asaba, Eiji Shamoto, Hozumi Yasuda, Satoru Yamaki

    2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT)   32 - 34   2014

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    This paper presents analytical investigation on polishing pressure distribution in Chemical Mechanical Polishing (CMP) process. In general, the polishing pressure is distributed unevenly around a wafer edge. This uneven distribution is essentially due to discontinuous contact of a wafer against a polishing pad. An edge profile of the wafer and nonlinear viscoelastic properties of the polishing pad affect the polishing pressure distribution significantly. The compression by a retainer ring against the polishing pad also has an indirect effect on the polishing pressure distribution. These phenomena are empirically known in industry. In order to quantify the influence of these factors, a series of analytical investigations on the polishing pressure distribution are conducted in the present study. The simulator developed by authors is utilized. Arbitrary Lagrangian-Eulerian (ALE) Finite Element Method (FEM) is employed in dynamic nonlinear analysis. In a series of process simulations, material properties, i.e., Young's modulus, Poisson's ratio and proportional damping factor, of the polishing pad and geometries of the wafer and the retainer ring are changed, respectively. The calculated results indicated that the polishing pressure distribution around the wafer edge varies considerably depending on the parameters.

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  • Force prediction in cutting operations with self-propelled rotary tools considering bearing friction Reviewed

    Norikazu Suzuki, Toru Suzuki, Ran An, Kota Ukai, Eiji Shamoto, Yu Hasegawa, Nobukazu Horiike

    6TH CIRP INTERNATIONAL CONFERENCE ON HIGH PERFORMANCE CUTTING (HPC2014)   14   125 - 129   2014

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:ELSEVIER SCIENCE BV  

    This paper presents a model to predict cutting force and motion of the rotating insert in cutting processes with self-propelled rotary tools (SPRT). Metal cutting utilizing rotary tools is effective to suppress tool wear and thus it is considered to be suitable to attain high performance machining of difficult-to-cut materials. It is well known that a circular insert attached to a rotational axis is self-propelled due to inclined chip flow on rake face plane by setting certain oblique angle. A resultant insert rotation speed can be easily predicted considering a frictionless rotary axis. However, friction at the rotary axis of SPRTs may not be negligible in practice especially when slide bearings are employed. In order to investigate the influence of the friction at the rotation axis on the rotary cutting process, a new cutting model is proposed. As the friction at the rotation axis causes a decrease in a speed of round insert rotation, an equivalent oblique cutting process is taken into account in the proposed model utilizing conventional theoretical model. In the equivalent process, the tangential component of the resultant cutting force corresponds to the friction force at the rotary axis. The friction force is determined by cutting force component normal to force-bearing mechanism and the bearing's friction coefficient. Considering the equilibrium condition in cutting and friction forces, the resultant cutting force and the insert rotation speed are iteratively computed in the proposed model. Edge force model is also associated with the oblique cutting model, which is not negligible especially in machining difficult-to-cut materials. The developed model is extended to simulate milling processes with SPRTs. The proposed model is experimentally verified, and influence of the bearing friction of SPRT on the process is clarified. (C) 2014 Published by Elsevier B.V.

    DOI: 10.1016/j.procir.2014.03.033

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  • Tool failure mechanism in high-speed ceramic milling of super alloys

    Suzuki Norikazu, Enmei Risa, Hashimoto Yohei, Shamoto Eiji, Hatano Yuki

    Proceedings of JSPE Semestrial Meeting   2014   555 - 556   2014

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    航空機部品等に用いる耐熱合金の加工では,セラミック工具を用いた高速ミーリングによる高能率加工が利用されている.しかし,工具損耗が激しく寿命が短いという問題があり,その改善が要求されている.本研究では,インコネル718の加工で摩耗した工具形状を評価し,これを考慮した切削力モデルを考案した.さらに,切削力測定結果との比較により工具表面に生じる応力場を推定し,特徴的な工具損耗メカニズムについて考察を行った.

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  • Influence of various modelling on prediction accuracy in polishing pressure simulation

    Hashimoto Yohei, Suzuki Norikazu, Shen Yue, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2014   35 - 36   2014

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    著者らはこれまでに,CMPプロセスに対する研磨パッドの粘性特性と研磨パッド表面の凹凸形状による非線形弾性特性を考慮した解析手法を開発している.本報では,ジンバル方式の研磨ヘッド構造を利用するCMPプロセスを対象とした検討により,各種物性や形状のモデル化が研磨圧力シミュレーションの結果に与える影響について明らかにする.さらに,実験結果と比較することにより解析精度を検証する.

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  • Influence of process damping on chatter stability in turning operations

    Uchiyama Daisuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2014   753 - 754   2014

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    低切削速度領域においてプロセスダンピングと呼ばれる現象が発現し,びびり振動の安定性が向上することが知られている.多くの解析モデルがすでに提案されているのに対し,実験的なプロセスの評価は十分になされていない.本研究では,端面旋削実験により切削プロセスに対するプロセスダンピングの影響について評価を行う.さらに,材料物性と工具形状に基づきプロセスダンピングの影響を定量化する新しい解析モデルを提案する.

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  • Suppression of regenerative chatter vibration in multiple milling utilizing speed difference method - Analysis of double-sided milling and its generalization to multiple milling operations Reviewed

    Eiji Shamoto, Tatsuya Mori, Burak Sencer, Norikazu Suzuki, Rei Hino

    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY   37 ( 3 )   580 - 589   2013.7

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    This paper presents a new method and its analysis to suppress regenerative chatter vibration in simultaneous multiple milling with a flexible mechanical structure. Precision steel plates are conventionally finished by one-sided face milling with a rigid electro-magnetic chuck. However, it is difficult to obtain the desired flatness with this method since the thin workpiece deforms to fit the chuck surfaces when chucked. The authors have solved this problem to realize both high accuracy and productivity by applying the simultaneous double-sided milling technique utilizing the developed speed difference method, in which the regenerative chatter is cancelled by rotating two milling cutters at different speeds on both sides of the workpiece. The present study represents an analytical model of the simultaneous double-sided milling including the regenerative chatter vibration effect on the process. Machining experiments are conducted to validate the developed analytical model. Experimental results match with the analytically predicted ones proving that the proposed model accurately predicts the regenerative stability limits in double-sided milling. The results also show that the developed speed difference method can provide great advantage to increase the chatter stability and carry great potential to enhance the productivity in machining of flexible thin workpieces. Furthermore, simultaneous multiple-spindle machining methods have become much desired in mass manufacturing systems as they prove higher manufacturing efficiency. The proposed speed difference method is extended and generalized to those multi-spindle simultaneous milling operations with flexible mechanical structures. Analytical derivations and the foundation are presented here on how to calculate the necessary speed differences between milling spindles to suppress regenerative chatter vibrations. (C) 2013 Elsevier Inc. All rights reserved.

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  • Modeling and controller design of gantry type stage for suppressing torsional vibration of machine tools with low base stiffness

    Ishizaki Kosuke, Sencer Burak, Suzuki Norikazu, Shamoto Eji

    Proceedings of JSPE Semestrial Meeting   2013   817 - 818   2013

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    ベースの剛性不足に起因して機械構造全体で生じる低周波振動により,工作機械の制御系の性能が低下する問題がある.本研究では,問題となりやすいベースのねじり振動モードの影響を考慮したガントリーテーブルの制御システムをモデル化する.そして,ベースのねじれ振動を抑制する新しい補償器とその設計手法を提案する.実機を用いて検証を行い,提案手法によってねじり振動が効果的に抑制されることを確認した.

    DOI: 10.11522/pscjspe.2013S.0.817.0

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  • Elasto Hydrodynamic Lubrication Analysis of CMP Process with Consideration of Micro Asperity Contact of Polishing Pad Reviewed

    HASHIMOTO Yohei, SUZUKI Norikazu, ASABA Masakazu, HINO Rei, SHAMOTO Eiji

    Journal of the Japan Society for Precision Engineering   79 ( 1 )   73 - 80   2013

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    A soft EHL analysis model of Chemical Mechanical Polishing (CMP) is developed in the present study. Since a surface of a polishing pad is filled with micro asperities due to conditioning, the polishing pad deforms in a nonlinear manner by contacting to a wafer. A viscosity of the polishing pad also affects stress concentration beneath the edge of the wafer. In order to take into account both effects, damping behavior of the polishing pad and macroscopic characteristics of the polishing pad asperity deformation are considered at the same time in the proposed analysis. Based on the traditional contact model, i.e., Greenwood-Williamson model, nonlinear elasticity of the surface asperity layer of the polishing pad is formulated, and Arbitrary Lagrangian-Eulerian (ALE) method is applied to deal with dynamic structure analysis. A series of three-dimensional EHL analysis was conducted using the proposed model. Effects of viscosity of the polishing pad and the nonlinear elasticity caused by the polishing pad asperities on distributions of contact stress and fluid pressure were examined. Analytical results indicated that both distributions greatly depend on the viscosity and the nonlinear elasticity of the polishing pad, and thus the consideration of nonlinear viscoelastic behavior in the pad-wafer contact is important to predict the polishing pressure distribution, especially beneath wafer leading edge.

    DOI: 10.2493/jjspe.79.73

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  • A novel design method of variable helix cutters to attain robust regeneration suppression Reviewed

    Kojima Takuya, Norikazu Suzuki, Rei Hino, Eiji Shamoto

    14TH CIRP CONFERENCE ON MODELING OF MACHINING OPERATIONS (CIRP CMMO)   8   363 - 367   2013

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    Regeneration is major mechanism to generate self-excited chatter vibration in cutting. Variable helix cutters are useful to suppress regeneration. Although optimization of pitch/helix angles is significantly important at the same time, there is no practical design method to optimize the variable helix cutter geometry so far. In order to attain robust regeneration suppression, a new design method of variable helix cutters is proposed in the present study. The pitch angles vary along axial position due to disagreement of the helix angles. Because of this nature, regeneration can be suppressed in a robust manner with respect to changes of chatter frequency and/or spindle speed. Optimal pitch/helix angles are formulated on the basis of distinctive relationship between the cutter geometry and "Regeneration Factor (RF)", which is an index to quantify influence of regeneration in the process. Through analytical investigations, it is confirmed that regeneration can be suppressed effectively in low immersion milling with variable helix cutters by the proposed method, resulting in significant chatter stability increase. (C) 2013 The Authors. Published by Elsevier B.V.

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  • EHL analysis of CMP process with airbag type polishing head

    Asaba Masakazu, Suzuki Norikazu, Shamoto Eiji, Yasuda Hozumi, Yamaki Satoru

    Proceedings of JSPE Semestrial Meeting   2013   645 - 646   2013

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    半導体CMPの量産工程で一般に用いられるエアーバッグ研磨ヘッド構造を考慮したCMPプロセスのEHL解析モデルを開発した.本研究では,研磨ヘッドの構造として,リテーナリングやメンブレンゴムを考慮するとともに,ウェハ等との接触問題を考慮する.また,ALE有限要素法を適用することで動的な問題を取り扱うとともに,研磨パッドの非線形粘弾性を同時に考慮することで,従来不可能であった実用的な研磨プロセスの解析の実現に挑戦する.

    DOI: 10.11522/pscjspe.2013S.0.645.0

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  • Design of variable helix cutters to suppress regeneration in end milling operations

    Suzuki Norikazu, Kojima Takuya, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2013   463 - 464   2013

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    切削加工において再生効果は自励びびり振動の安定性に大きく影響する.不等リードエンドミルはびびり振動の周波数や主軸回転数などの変化に対してロバストに再生効果を抑制することができる特徴を持つ.しかし,最適な工具形状を設計しなければ優れた抑制効果を実現することはできない.本研究では,再生効果の影響をロバストに抑制することのできる不等リードエンドミルの工具形状の新しい設計手法を提案する.

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  • Analysis of three-dimensional cutting process with thin shear plane model Reviewed

    Eiji Shamoto, Masahiro Kato, Norikazu Suzuki, Rei Hino

    Journal of Manufacturing Science and Engineering, Transactions of the ASME   135 ( 4 )   2013

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    A new and basic analytical model of three-dimensional cutting is proposed by assuming multiple thin shear planes with either the maximum shear stress or minimum energy principle. The three-dimensional cutting process with an arbitrarily shaped cutting edge in a flat rake face is formulated with simple vector equations in order to understand and quickly simulate the process. The cutting edge and workpiece profile are discretized and expressed by their position vectors. Two equations among three unknown vectors, which show the directions of shear, chip flow, and resultant cutting force, are derived from the geometric relations of velocities and forces. The last vector equation required to solve the three unknown vectors is obtained by applying either the maximum shear stress or minimum energy principle. It is confirmed that the directions and the cutting forces simulated by solving the proposed vector equations agree with experimentally measured data. Furthermore, the developed model is applied to consider the three-dimensional cutting mechanics, i.e., how the chip is formed in the three-dimensional cutting with compressive stress acting between the discrete chips, as an example. Copyright © 2013 by ASME.

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  • Investigation on machining performance of amplitude control sculpturing method in elliptical vibration cutting Reviewed

    J. Zhang, N. Suzuki, E. Shamoto

    Procedia CIRP   8   328 - 333   2013

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    The authors have proposed a unique micro/nano sculpturing technology for difficult-to-cut materials by controlling vibration amplitude in elliptical vibration cutting. In the present research, machining performance of the amplitude control sculpturing method is investigated, and limitation in nano-scale machining is explored. In the proposed machining method, the machinable part geometry is essentially restricted by cutting tool geometry and vibration conditions. In order to clarify the machining performance of the proposed technology, a series of analytical and experimental investigations were conducted. From the experimental results, it was confirmed that nano structures with a step height of more than 2 nm and a pitch of more than 250 nm can be machined with surprisingly high accuracy of about 1 nm. On the other hand, a considerable error between the amplitude command and the envelope of tool trajectory is generated when the slope of the machining part geometry becomes large. In order to overcome this error, a compensation method of the amplitude command is proposed. By applying the proposed compensation, nano structures with large ratio of the step height to the pitch were machined accurately. The proposed machining method was subsequently applied to a three-dimensional grid surface machining, and successful experimental results verified feasibility of practical machining application by applying proposed technology. Copyright © 2013 Elsevier B.V.

    DOI: 10.1016/j.procir.2013.06.111

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  • Non-Contact On-Machine Measurement of Turning Accuracy by Utilizing Image Sensor - Development of measurement method for workpiece diameter -

    Asari Naohiro, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2013   905 - 906   2013

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    従来,旋削加工の高精度化のため,各種機上計測手法が実用に供されている.しかし,これらの従来手法では,工作物への接触や計測装置の大きさによって計測範囲や形状に制約が多い.そこで本研究では,工具をイメージセンサに取り換えて工作物を回転し,加工面の移動距離と回転角度から直径を計測することで,制約の少ない機上計測手法を提案・開発する.本報では,提案手法とその画像処理方法,計測の繰返し性等について報告する.

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  • Identification of transfer function by inverse analysis of self-excited chatter vibration in milling operations Reviewed

    Norikazu Suzuki, Yusuke Kurata, Takashi Kato, Rei Hino, Eiji Shamoto

    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY   36 ( 4 )   568 - 575   2012.10

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    Analysis of the stability limits in self-excited chatter vibration requires the transfer function of the mechanical structure, and thus the accuracy of the analytical prediction strongly depends upon the accuracy of the transfer function, which is generally measured by the impulse response method. However, it is often difficult to measure the transfer function accurately, especially in a case where a small-diameter tool or a workpiece is flexible, or when the transfer function changes as a result of spindle rotation. This paper presents a novel method of identifying the transfer function by utilizing inverse analysis of the self-excited chatter vibration measured during an end milling experiment. In the proposed method, the transfer function can be identified to minimize errors between chatter analysis and experimental results. A basic end milling test verified that the transfer function identified by the developed method is similar to that measured by the impulse response method, and that it yields a more accurate prediction of the stability limits. Further applications using a small-diameter end mill were conducted, and the feasibility of identifying the transfer function by using the proposed method was investigated. (C) 2012 Elsevier Inc. All rights reserved.

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  • Confocal Microscopic Evaluation of Mixing Performance for Three-Dimensional Microfluidic Mixer Reviewed

    Takao Yasui, Yusuke Omoto, Keiko Osato, Noritada Kaji, Norikazu Suzuki, Toyohiro Naito, Yukihiro Okamoto, Manabu Tokeshi, Eiji Shamoto, Yoshinobu Baba

    ANALYTICAL SCIENCES   28 ( 1 )   57 - 59   2012.1

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    We developed a confocal microscopic method for a quantitative evaluation of the mixing performance of a three-dimensional microfluidic mixer. We fabricated a microfluidic baker's transformation (MBT) mixer as a three-dimensional passive-type mixer for the efficient mixing of solutions. Although the MBT mixer is one type of ideal mixers, it is hard to evaluate its mixing performance, since the MBT mixer is based on several cycles of complicated three-dimensional microchannel structures. We applied the method developed here to evaluate the mixing of water and a fluorescein isothiocyanate (FITC; diffusion coefficient, 4.9 x 10(-10) m(2) s(-1)) solution by the MBT mixer. This method enables us to capture vertical section images for the fluid distributions of FITC and water at different three-dimensional microchannel structures of the MBT device. These images are in good agreement with those of mixing images based on numerical simulations. The mixing ratio could be calculated by the fluorescence intensity at each pixel of the vertical section image; complete mixing is recognized by a mixing ratio of more than 90%. The mixing ratios are measured at different cycles of the MBT mixer by changing the flow rate; the mixing performance is evaluated by comparisons with the mixing ratio of the straight microchannel without the MBT mixer.

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  • Development of Mass-Producible Rapid Mixer Based on Baker's Transformation Reviewed

    SHAMOTO Eiji, KATO Takashi, SUZUKI Norikazu

    TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B   78 ( 788 )   762 - 768   2012

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    We developed a new passive-type lamination mixer for high viscosity fluid with a low Reynolds number, based on the baker's transformation (BT). BT is the best transformation for mixing fluids of laminar flow. However, there was difficulty in mass-producing the BT structure especially for micro devices like MicroTAS, Lab-on-a-Chip and Micro-Reactors, because conventional BT mixers require three-dimensional (3D) piping structures. We have successfully developed the easy-to-massproduce BT mixer by changing that concept of 3D piping structures to 3D channel structures. The 3D channel structures are not easy to produce by photolithography unlike the conventional mixers, while they can be easily mass-produced by molding once their 3D molds are produced. In this report, we newly developed a miniature scale BT mixer to meet the needs for mixing high viscosity fluids in food processing, resin blending, etc. An experiment for mixing different colored hardening silicone elastomers was performed by using the prototype mixer made of aluminum alloy, and the good BT mixing result was obtained, with observing several cross sectional patterns. The numerical fluid analysis also gave similar results of the patterns to those observed in the experiment.

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  • Study on Avoidance of Regenerative Chatter Vibration by Tool Path/Posture Optimization:- Proposal of Concept and Application to Turning Process -

    Shamoto Eiji, Fujimaki Shunsuke, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting   2012   345 - 346   2012

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    本研究では,工具軌跡/姿勢を最適化することで再生型びびり振動を回避する新たな手法を提案する.びびり振動安定性が主軸回転数や切込み量等の切削条件に依存することはよく知られているが,工具軌跡にも依存することはあまり知られていない.本稿では,旋削加工を例に,工具形状や切込み量,送り量を考慮した上で工具軌跡/姿勢を最適化するための簡易指標を示し,その指標の有用性を解析及び実験的に検証する.

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  • Development of novel anisotropic boring tool for chatter suppression Reviewed

    Norikazu Suzuki, Kohei Nishimura, Ryo Watanabe, Takashi Kato, Eiji Shamoto

    FIFTH CIRP CONFERENCE ON HIGH PERFORMANCE CUTTING 2012   1   56 - 59   2012

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    A novel chatter suppression method in boring operation is proposed in the present study. The anisotropic boring tool with a step portion and notches on the cylinder periphery is designed, which has anisotropic dynamic characteristics. Since the direct and the cross transfer function components of the proposed tool are designed to cancel out each vibration, the nominal compliance of the boring tool in cutting process can be reduced significantly. Hammering tests of the developed tool clarified that appropriate anisotropic frequency response function is roughly attained by the proposed design. The developed tool was subsequently applied to turning experiments, and it was clarified that the stability limit in the radial depth of cut significantly increases by using the proposed boring tool as compared to the ordinary boring tool. (C) 2012 The Authors. Published by Elsevier B.V. Selection and/or peer-review under responsibility of Professor Konrad Wegener

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  • Influence of material composition on ductile machining of tungsten carbide in elliptical vibration cutting Reviewed

    Jianguo Zhang, Norikazu Suzuki, Takashi Kato, Rei Hino, Eiji Shamoto

    EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV   523-524   113 - 118   2012

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    Tungsten carbide is a crucial material for glass molding in optical industry. The present study investigated a feasibility of ductile machining of sintered tungsten carbide for glass molding by applying ultrasonic elliptical vibration cutting techriology with single crystal diamond tool. Grain size and binder material of sintered tungsten carbide have an influence on hardness and/or toughness of the material. Binder material also has a chemical affinity to diamond. In order to examine the influence of material composition on ductile machining of tungsten carbide, a series of grooving and planing experiments were conducted to several different tungsten carbide workpieces with the different binder phase and the different grain size. The experimental results indicated that micro grooving in a ductile mode can be attained successfully by applying ultrasonic elliptical vibration cutting, while finished surface deteriorates with brittle fractures in ordinary cutting. It was also clarified that grain size and binder material have significant influence on the deteriorations in the surface quality, the tool shape and the cutting forces.

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  • A novel tool path/posture optimization concept to avoid chatter vibration in machining - Proposed concept and its verification in turning Reviewed

    Eiji Shamoto, Shunsuke Fujimaki, Burak Sencer, Norikazu Suzuki, Takashi Kato, Rei Hino

    CIRP ANNALS-MANUFACTURING TECHNOLOGY   61 ( 1 )   331 - 334   2012

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    This research presents novel strategies to optimize tool path/posture to avoid chatter vibration in various machining operations. It is well known that the chatter stability depends on tool geometry and cutting conditions; whereas it is less known that it also depends on tool path/posture relative to the dynamically most compliant direction. In order to realize an intelligent tool path/posture planning with consideration of the chatter stability, a simple index is proposed to represent the machining stability due to the tool path/posture. As an example, the stability in turning is considered, and the use of proposed stability index is verified experimentally. (c) 2012 CIRP.

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  • EHL Analysis of CMP process with consideration of dynamic contact problem of polishing pad with surface asperities

    鈴木 教和, 橋本 洋平, 浅羽 正和

    砥粒加工学会学術講演会講演論文集 ABTEC   12 - 15   2012

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  • A Novel Design Method of Irregular Pitch Cutters to Attain Simultaneous Suppression of Multi-Mode Regenerations Reviewed

    Norikazu Suzuki, Takuya Kojima, Rei Hino, Eiji Shamoto

    3RD CIRP CONFERENCE ON PROCESS MACHINE INTERACTIONS   4   98 - 102   2012

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    It is known that regenerative effect, which causes self-excited chatter vibration, can be suppressed in many cases by utilizing irregular pitch tools. In order to suppress the regenerative effect sufficiently, a suitable combination of irregular pitch angles needs to be designed. Although the past researches proposed a basic idea to design irregular pitch angles for the regeneration suppression, they are only applicable to the suppression of single-mode regeneration. The present study proposes a novel design method of irregular pitch cutters, which ensures the simultaneous suppression of multi-mode regenerations. In order to quantify the regenerative effect, a new parameter called as the "Regeneration Factor" is proposed. The effect of pitch angles designed by the proposed method on chatter suppression is investigated analytically, and its validity is verified. (C) 2012 The Authors. Published by Elsevier B. V. Selection and/or peer-review under responsibility of Prof. Eiji Shamoto

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  • Study on Milling of Difficult-to-Cut Materials with Self-Propelled Rotary Tools

    An Ran, Suzuki Norikazu, Shamoto Eiji, Ukai Kota, Hasegawa Yu, Yoshida Hiroyuki, Ishikawa Yoichi, Yamada Sachio

    Proceedings of JSPE Semestrial Meeting   2012   239 - 240   2012

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    インコネル等に代表される難削材の切削加工では,工具摩耗の抑制にロータリ切削が効果的であることが知られている.本研究では,傾斜切削理論に基づいたロータリ切削機構のモデル化を行う.さらに,その切削機構の特徴を示すとともに基礎的なロータリ切削実験による検証を行う.さらに,従動式ロータリ機構を適用したロータリミリング工具を試作し,インコネル718のロータリミリングにおける工具摩耗抑制効果について評価を行う.

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  • Novel Design Method of Irregular Pitch Tools for Simultaneous Suppression of Multi-Mode Regenerations

    Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2012   181 - 182   2012

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    切削加工における自励びびり振動は再生効果に強く依存する.不等ピッチ工具を用いて再生効果を抑制することで安定限界を効果的に向上することもできるが,その効果はピッチ角の設計に依存する.本研究では,エンドミル加工における再生効果の新しい定量化手法を提案するとともに,共振周波数の異なる複数の振動モードが存在する際に,それらの振動モードに対して同時に再生効果を打ち消す新しいピッチ角の設計手法を提案する.

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  • Study on Fluid Bearing Utilizing Traveling Waves:-Development of Modular Piezoelectric Traveling-Wave Actuator and Precision Slider-

    Komatsu Hiroki, Kato Takashi, Sencer Burak, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2012   1129 - 1130   2012

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    本研究では,進行波を利用した新たな非接触流体軸受を提案している.本軸受は,軸受面上に発生させた進行波によって軸受中心に向かう力を流体に与えることで,軸受隙間内の圧力を上昇させ非接触支持を実現する.本報では,装置の製作性と性能を向上させるためにモジュール化した進行波圧電アクチュエータを開発し,そのアクチュエータを用いた軸受の開発・評価を行う.また本軸受を用いた精密スライダの開発を目指す.

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  • Investigation of tool wear suppression in ultraprecision diamond machining of die steel Reviewed

    Yilong Wang, Norikazu Suzuki, Eiji Shamoto, Qingliang Zhao

    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY   35 ( 4 )   677 - 685   2011.10

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    Rapid tool wear in diamond machining of steel can cause catastrophic failures. Despite several approaches to reducing tool wear, diamond machining of steel for industrial applications remains limited. We investigated two solutions, namely plasma nitriding treatment for workpiece surface modification and elliptical vibration cutting for cutting process modification, to determine their effect on reducing tool wear in diamond machining of AISI 4140 die steel. Furthermore, a new approach by combining the two solutions was also explored. Experimental results showed that diamond tool wear could be reduced by several orders of magnitude and mirror-quality surface can be obtained by using either the plasma nitriding treatment or the elliptical vibration cutting. However, in contrast to our expectations, combining the two solutions did not yield further improvement of either the surface finish or the reduction of tool wear compared with that of elliptical vibration cutting alone due to microchipping. Care has been taken to investigate the mechanism responsible for microchipping, and it was found that microchipping is highly dependent on the crystal orientation of the diamond. A diamond tool with the (1 1 0) plane as the rake face and the (1 0 0) plane as the flank face was more resistant to damage, and the microchipping induced in the combined cutting process was almost completely suppressed. (C) 2011 Elsevier Inc. All rights reserved.

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  • Micro/nano sculpturing of hardened steel by controlling vibration amplitude in elliptical vibration cutting Reviewed

    Norikazu Suzuki, Hideo Yokoi, Eiji Shamoto

    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY   35 ( 1 )   44 - 50   2011.1

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    A new ultra-precision sculpturing method in micro/nano scale for difficult-to-cut materials is proposed in the present research Elliptical vibration cutting technology is well-known for its excellent performance in achieving ultra-precision machining of steel materials with single crystal diamond tools Elliptical vibration locus is generally controlled and held to a constant in practice On the contrary the proposed method utilizes the variations of the elliptical vibration locus in a positive manner Depth of cut can be actively controlled in elliptical vibration cutting by controlling vibration amplitude in the thrust direction By utilizing this as a fast tool servo function in elliptical vibration cutting high performance micro/nano sculpturing can be attained without using conventional fast tool servo technology A high speed amplitude control system is developed for elliptical vibration with a bandwidth of more than 300 Hz where the vibration amplitude can be controlled within 4 mu m(p-p) The developed control system is applied to sculpturing ultra-precision nano textured grooves on hardened steel with single crystal diamond tools It is confirmed that the textured grooves have the desired shapes and their profiles agree well with the vibration amplitude commands input to the control system Further a high performance micro/nano sculpturing system for plane surfaces is developed where the vibration amplitude is controlled in synchronization with the planing motion of an ultra-precision machine tool Nano sculpturing experiments on hardened steel earned out by the developed system are reported as well as consequent picture images and a variety of dimple patterns that were formed successfully on the hardened steel as nano scale sculptures (C) 2010 Elsevier Inc All rights reserved

    DOI: 10.1016/j.precisioneng.2010.09.006

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  • Control of chip flow with guide grooves for continuous chip disposal and chip-pulling turning Reviewed

    E. Shamoto, T. Aoki, B. Sencer, N. Suzuki, R. Hino, T. Koide

    CIRP ANNALS-MANUFACTURING TECHNOLOGY   60 ( 1 )   125 - 128   2011

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    This paper presents a new chip control method with guide grooves formed on the rake face to realize continuous chip disposal and chip-pulling turning. Chips are conventionally broken using chip breakers during turning operations for disposal. However, chips of highly ductile materials or thin chips generated in finishing can not be broken easily. In order to prevent the chips from jamming up, the authors propose to continuously guide the chips away from the cutting point. Special tool tips were developed and tested for guiding the chip. Chip controllability and mechanics of the chip-guided cutting are discussed in the present research. (C) 2011 CIRP.

    DOI: 10.1016/j.cirp.2011.03.081

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  • Dynamic Finite Element Analysis of Contact Stress in CMP Process Reviewed

    HASHIMOTO Yohei, SUZUKI Norikazu, HINO Rei, SHAMOTO Eiji

    Journal of the Japan Society for Precision Engineering   77 ( 5 )   513 - 519   2011

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    A dynamic analysis model of CMP process is developed by utilizing a finite element method in the present study. By considering relative motion of a wafer and a polishing pad in a steady-state process, a nonlinear equation of motion is derived based on Arbitrary Lagrangian-Eulerian (ALE) method in the proposed model. Since the dynamic CMP process in the steady-state can be treated as a static problem in an ALE coordinate system, computation time can be reduced significantly and meshing procedure can be simplified as compared with conventional dynamic structural analysis, i.e., time history response analysis. As a result, practical large scale problems can be solved accurately with consideration of the dynamic structural behavior. Two-dimensional structural analysis was carried out by applying the proposed model, and it was verified that the computation time can be reduced significantly as compared with the conventional analysis. Effects of viscosity of the polishing pad on polishing pressure distribution were examined, and it was clarified that stress concentration beneath the leading edge of the wafer greatly depends on the viscosity of the polishing pad, i.e., the consideration of dynamic viscoelastic behavior of the polishing pad is important to predict the polishing pressure distribution. The proposed model was subsequently applied to three-dimensional analysis of CMP process, and reasonable polishing pressure distribution, which was similar to that in the two-dimensional analysis, was derived successfully.

    DOI: 10.2493/jjspe.77.513

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  • Studies on Continuous Chip Disposal and Chip-Pulling Cutting

    SHAMOTO Eiji, YASUDA Koichiro, AOKI Tomoya, SUZUKI Norikazu, KOIDE Tomio

    Journal of the Japan Society for Precision Engineering   77 ( 5 )   520 - 524   2011

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    Chips are generally assisted to curl and then broken into pieces by chip breakers. This conventional concept sometimes fails especially when the workpiece is highly ductile or the chip is thin and flexible. Contrary to this conventional method, a new concept of continuous chip disposal is proposed in the present research, where the chip is controlled not to curl and guided to a chip disposer. The key to this concept is chip control to suppress the curl and to guide the chip to desired direction. The continuous chip disposal can also be combined easily with chip-pulling cutting. It is known that the cutting process is improved drastically by pulling the chip, i.e. cutting force, energy and heat are all reduced remarkably. Therefore, new chip control methods are developed as basic technologies to realize the continuous disposal and the chip-pulling. A chip control method is proposed to suppress the up-curl by convex tool geometry, i.e. curved rake face with inverse curvature to the up-curl. Tools with the inversely curved rake faces are developed, and it is confirmed that the up-curl can be suppressed at a certain inverse curvature. Another chip control method is proposed to suppress the side-curl and to control the chip flow direction at the same time by forming guide grooves on the rake face. The tools with the guide grooves and a guide tunnel are developed, and it is demonstrated that the chip can be guided successfully along the guide grooves into the guide tunnel over a fairly wide range of conditions.

    DOI: 10.2493/jjspe.77.520

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  • Chatter Suppression in Cutting with Irregular Pitch / Variable Helix End mills:Effect of Radial Depth of Cut on Chatter Stability

    Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2011   315 - 316   2011

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    Publisher:The Japan Society for Precision Engineering  

    DOI: 10.11522/pscjspe.2011A.0.315.0

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  • Identification of nonlinear viscoelasticity of polishing pad using a compression tester

    Suzuki Norikazu, Asaba Masakazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2011   161 - 162   2011

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    DOI: 10.11522/pscjspe.2011A.0.161.0

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  • Study on Tool Damage in High-speed Ceramic Milling of Superalloys:Effects of Dynamic Stiffness of Mechanical Structure and Cutting Conditions

    Eto Jun, Suzuki Norikazu, Shamoto Eiji, Yoshida Hiroyuki

    Proceedings of JSPE Semestrial Meeting   2011   231 - 232   2011

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    航空機エンジン部品等に用いられる超耐熱合金インコネル718の加工では,従来の超硬工具による低速加工に置き換わり,セラミック工具を用いた高速ミリングによる高能率加工が普及してきている.しかし,工具損耗が極めて激しいため,工具寿命の改善が必要とされている.本研究では,工具損耗に影響を与える因子として機械構造の動剛性や加工条件に着目し,各条件が工具損耗に与える影響について実験に基づいた基礎検討を行った.

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  • Chatter Stability Limits in End Milling with Anisotropic Flexible Tools Reviewed

    KURATA Yusuke, SUZUKI Norikazu, HINO Rei, SHAMOTO Eiji

    Journal of the Japan Society for Precision Engineering   77 ( 1 )   97 - 104   2011

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    Self-excited chatter vibration in end milling is caused by the regeneration and mode coupling mechanisms. In order to avoid chatter vibration, both mechanisms need to be investigated. Past researches have shown that the mode coupling effect in end milling can be suppressed by using cutting tools with anisotropic dynamic characteristics. However, it is difficult to apply previously developed analytical models for predicting the chatter stability limits in end milling with the anisotropic tools. Hence, suitable conditions for chatter suppression and the overall phenomena have not been clarified thoroughly yet. This paper proposes a new analytical model to predict chatter stability limits in end milling with tools that have anisotropic transfer functions. The model considers the anisotropic tool to vibrate steadily in a rotating coordinate system rather than in an inertial coordinate system. The cutting process is formulated in this rotating coordinate system, and variation in the transfer function of the anisotropic tool with respect to the spindle speed is considered. Fundamental cutting tests have been conducted to verify the proposed model. Experimentally identified stability limits agreed closely with the predictions. Furthermore, analytical investigations have shown that the transfer function of the cutting tool changes considerably with the spindle speed. This affects the chatter stability prediction significantly. Using the proposed model, it is concluded that higher stability limits can be achieved only at low spindle speed conditions by using anisotropic tools. However, the number of flutes on the tool is limited to be less than three, and they need to be arranged at suitable positions. The effect of the cutter helix also needs to be negligible.

    DOI: 10.2493/jjspe.77.97

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  • Microfluidic baker's transformation device for three-dimensional rapid mixing Reviewed

    Takao Yasui, Yusuke Omoto, Keiko Osato, Noritada Kaji, Norikazu Suzuki, Toyohiro Naito, Masaki Watanabe, Yukihiro Okamoto, Manabu Tokeshi, Eiji Shamoto, Yoshinobu Baba

    LAB ON A CHIP   11 ( 19 )   3356 - 3360   2011

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:ROYAL SOC CHEMISTRY  

    We developed a new passive-type micromixer based on the baker's transformation and realized a fast mixing of a protein solution, which has lower diffusion constant. The baker's transformation is an ideal mixing method, but there is no report on the microfluidic baker's transformation (MBT), since it is required to fabricate the complicated three-dimensional (3D) structure to realize the MBT device. In this note, we successfully fabricate the MBT device by using precision diamond cutting of an oxygen-free copper substrate for the mould fabrication and PDMS replication. TheMBTdevice with 10.4 mm mixing length enables us to achieve complete mixing of a FITC solution (D = 2.6 x 10(-10) m(2) s(-1)) within 51 ms and an IgG solution (D = 4.6 x 10(-11) m(2) s(-1)) within 306 ms. Its mixing speed is 70-fold higher for a FITC solution and 900-fold higher for an IgG solution than the mixing speed by the microchannel without MBT structures. The Peclet number to attain complete mixing in the MBT device is estimated to be 6.9 x 10(4).

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  • Proposal of Multi-Stage Vibration Air Bearing

    Shamoto Eiji, Komatsu Hiroki, Yamaji Fumie, Owaki Yoshihiro, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting   2010   661 - 662   2010

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    Publisher:The Japan Society for Precision Engineering  

    本研究では,まず,狭いすき間で振動する軸受面に,外部から気体を吸込んで圧力増加する現象が存在することを見出した.これを多段にして複数回の圧力増加を繰返し,より高圧を発生する新しい軸受として,多段振動気体軸受を提案する.さらに本報では,試作開発した本軸受装置の測定と,軸受隙間内気体の有限要素モデルによる解析により,軸受性能について検討した結果について報告する.

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  • Stability of self-excited chatter vibration in boring operation with irregular pitch cutters

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2010   351 - 352   2010

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    Publisher:The Japan Society for Precision Engineering  

    適切な不等ピッチ工具を利用することにより,自励びびり振動の発生原因となる再生効果を抑制し得ることが知られている.本研究ではボーリング加工を対象とし,不等ピッチ工具による自励びびり振動の抑制効果について検討を行う.まず,解析モデルを構築し実験的に検証を行った.さらに,モードカップリングの影響が小さい条件では効果的に抑制されるのに対し,大きい条件ではむしろ不安定になることを確認した.

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  • E04 Development of Control System for Optimizing Cutting Conditions

    UENO Hiroshi, ANDO Tomoharu, SENDA Harumitsu, SUZUKI Norikazu, SHAMOTO Eiji

    The Proceedings of The Manufacturing & Machine Tool Conference   2010   273 - 274   2010

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    The chatter vibration excited during machining process deteriorates quality of workpiece surfaces, and accelerates tool wear. In addition, it often takes long time to find chatter-free cutting conditions. Therefore, a new control system is developed in the present research for searching the optimum spindle speed at which chatter stability is maximized. The developed system detects the chatter vibration that occurs during machining process using a vibration sensor, and then optimizes the spindle speed automatically in real time. This report presents an overview and an application of the developed system.

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  • FE Analysis of One-Directional and Elliptical Vibration Cutting Processes. Reviewed

    Saeid Amini, Eiji Shamoto, Norikazu Suzuki, Mohammad, Javad Nategh

    IJAT   4 ( 3 )   252 - 258   2010

  • Effect of Cross Transfer Function on Chatter Stability in Plunge Cutting Reviewed

    Norikazu Suzuki, Kohei Nishimura, Eiji Shamoto, Kiyoshi Yoshino

    JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING   4 ( 5 )   883 - 891   2010

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:JAPAN SOC MECHANICAL ENGINEERS  

    An accurate analytical model for regenerative chatter vibration in plunge cutting is proposed. Effects of the cross transfer function and the cutting force ratio on chatter stability are considered in the proposed model. Equivalent transfer function is defined, which is useful to understand those effects on chatter stability. Basic plunge cutting experiments were conducted to verify the proposed model. Although the critical widths of cut in the CW and CCW rotation processes were significantly different from each other in the experiment, even when the other conditions were the same, chatter stability limits were predicted accurately by the proposed model as compared with the conventional model.

    DOI: 10.1299/jamdsm.4.883

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  • Chatter Stability in Turning and Milling with in Process Identified Process Damping Reviewed

    Yusuke Kurata, S. Doruk Merdol, Yusuf Altintas, Norikazu Suzuki, Eiji Shamoto

    JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING   4 ( 6 )   1107 - 1118   2010

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:JAPAN SOC MECHANICAL ENGINEERS  

    Process damping in metal cutting is caused by the contact between the flank face of the cutting tool and the wavy surface finish, which is known to damp chatter vibrations. An analytical model with process damping has already been developed and verified in earlier research, in which the damping coefficient is considered to be proportional to the ratio of vibration and cutting velocities. This paper presents in process identification of the process damping force coefficient derived from cutting tests. Plunge turning is used to create a continuous reduction in cutting speed as the tool reduces the diameter of a cylindrical workpiece. When chatter stops at a critical cutting speed, the process damping coefficient is estimated by inverse solution of the stability law. It is shown that the stability lobes constructed by the identified process damping coefficient agrees with experiments conducted in both turning and milling.

    DOI: 10.1299/jamdsm.4.1107

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  • 530 High-accuracy analysis of polishing pressure in CMP process

    SUZUKI Norikazu, HASHIMOTO Yohei, SHAMOTO Eiji

    The Proceedings of the Materials and processing conference   2009   _530 - 1_-_530-2_   2009

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By applying to the three dimensional (3D) coupled fluid-structure analysis of the CMP process, the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Consequently, the analytical results of polishing pressure and fluid pressure distributions considerably depend on the damping property too. The fluid pressure measuring experiment was also carried out, and it is confirmed that the feature of the measured fluid pressure distribution agrees with that simulated by developed CMP process analytical model.

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  • Comprehensive Study on Milling Conditions to Avoid Forced / Self-Excited Chatter Vibrations Reviewed

    SUZUKI Norikazu, IKADA Tsutomu, HINO Rei, SHAMOTO Eiji

    Journal of the Japan Society for Precision Engineering   75 ( 7 )   908 - 914   2009

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    Authorship:Lead author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    Chatter vibrations limit machining productivity and sometimes result in reduction of tool life in the end-milling process. There are two major types of chatter vibrations, i.e., forced and self-excited types. Their generation mechanics are different, and thus their characteristics and strategies to avoid them are also different. It is, therefore, needed in practice to understand their relationship and to select efficient milling conditions to stabilize the process for the self-excited chatter vibration and to minimize the forced chatter vibration at the same time. However, most of past research works have been focused only on the self-excited chatter vibration, and detailed analysis of the forced chatter vibration and its relationship to the self-excited chatter vibration can not be found in the literature. Thus, an analytical model of the end milling process with the forced chatter vibration is developed and verified experimentally. Then, the characteristics of the forced type and its relationship to the self-excited type are clarified, and the milling conditions to avoid the both types are clarified by utilizing the analytical model developed here and the model of the self-excited type developed in the past research.

    DOI: 10.2493/jjspe.75.908

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  • Development of elliptical vibration cutting technology and its application to ultraprecision / Micro machining of hard / Brittle materials Reviewed

    E. Shamoto, N. Suzuki

    Advanced Materials Research   69-70   133 - 137   2009

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    Precision machining, named 'elliptical vibration cutting', and its application to ultraprecision / micro machining of some hard / brittle materials are introduced in the present paper. The elliptical vibration cutting has a superior cutting performance in terms of low cutting force, low cutting energy, low heat generation, long tool life for steels, sintered tungsten alloy, etc., and large critical depth of cut for ductile machining of brittle materials such as glasses and single crystal calcium fluoride, etc. Based on these basic advantages, practical ultraprecision / micro machining of the hard / brittle materials is successfully realized by employing the ultrasonic elliptical vibration tools, which have been developed for ultraprecision machining. © (2009) Trans Tech Publications, Switzerland.

    DOI: 10.4028/www.scientific.net/AMR.69-70.133

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  • A Three Dimensional Coupled Fluid-Structure Analysis for CMP Process:Consideration on Damping Effect of Polishing Pad

    Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2009   315 - 316   2009

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    Publisher:The Japan Society for Precision Engineering  

    The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By extending to the three dimensional (3D) analysis and applying to the coupled fluid-structure analysis of the CMP process, the accurate CMP process model, which can consider the nonlinear dynamic motion, the damping effects and the stress concentration simultaneously, was developed in the present research. It was applied to the 3D CMP process analysis, and the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Thus, there is a possibility that the developed model can estimate the polishing stress and fluid pressure distributions of the CMP process accurately.

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  • Measurement of Fluid Pressure Distribution in CMP Process

    Suzuki Norikazu, Adachi Yosuke, Hashimoto Yohei, Suzuki Ko

    Proceedings of JSPE Semestrial Meeting   2009   321 - 322   2009

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    Publisher:The Japan Society for Precision Engineering  

    CMPプロセスでは,ウェハと研磨パッド間が潤滑状態となり,流体圧力が生じることが知られている.しかし,研磨パッドや研磨ヘッドは回転運動を行うため,その界面の流体圧力の測定は難しい.本研究では,無線通信により流体圧力を遠隔計測する装置を試作し,ウェハ-研磨パッド間の流体圧力の計測実験を行った.さらに,著者らが開発しているCMPプロセス解析との比較を行った.

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  • Development of Sculptured Surface Machining Technology for Hardened Steel by Utilizing Two-degree-of-freedom Elliptical Vibration Tool

    Suzuki Norikazu, Yokoi Hideo, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

    Proceedings of JSPE Semestrial Meeting   2009   47 - 48   2009

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    インサート工具の突き出し長さが大きく,傾斜した方向に軸振動を発生する自由曲面加工用の2自由度超音波楕円振動工具を開発した.さらに,焼入れ鋼の溝加工実験に適用し,びびり振動の発生メカニズムについて考察を行うとともに,安定限界向上の可能性について検討を行った.その結果,インサート工具の形状を非対称にすることでモードカップリング型のびびり振動が抑制され,安定限界切込みが増大することを確認した.

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  • Development of Sub-MHz Elliptical Vibration Tool

    Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2009   49 - 50   2009

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    Publisher:The Japan Society for Precision Engineering  

    振動切削では,超音波領域の振動を用いて断続的な加工を行うことによりなどさまざまな優れた効果が得られることが知られている.一般に20~40kHz程度の周波数が利用されるが,それ以上の高周波振動を利用した場合にどのような効果が得られかについては詳しく検討されていない.そこで,本研究では従来と比べて1桁程度周波数の高いサブMHzの楕円振動工具を試作し,その加工特性について評価を行った.

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  • Chatter suppression in milling with anisotropic tools Reviewed

    Yusuke Kurata, Norikazu Suzuki, Rei Hino, Eiji Shamoto

    20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science   547 - 552   2009

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    Chatter vibration in milling often results in poor surface finish and rapid tool wear, consequently limiting productivity. Thus, chatter suppression is one of the most important themes in industry. Self-excited chatter vibration in milling is generally caused by two kinds of mechanisms, i.e., regeneration and mode-coupling, and both mechanisms should be handled simultaneously to suppress the chatter vibration. Since the mode-coupling can be restricted by separating the natural frequencies of the vibration modes, it has been considered that use of an anisotropic rotating tool is effective on suppressing the chatter vibration in milling. However, the practical effects of the several parameters have not been revealed because it was difficult to predict the chatter stability accurately. On the other hand, the accurate analytical model of the milling process with the anisotropic rotating tool have been developed and verified experimentally by the authors. In order to reveal the practical chatter suppression effect of the anisotropic rotation tool, several cutting conditions, i.e., the immersion angle, the spindle speed and the number of flutes, on the chatter stability are investigated with the developed analytical model in the present study. By comparing the analytical results, it is confirmed that the mode-coupling is restricted and the stability limit in the axial depth of cut increases especially within the low spindle speed range by using the anisotropic rotating tool. The chatter suppression effect also depends on the radial depth of cut considerably. The relationships between the tool conditions, such as the difference of the natural frequencies and flute's angular position, and the chatter suppression effect are also investigated, and it is revealed that both affect the chatter stability significantly. ©2009 IEEE.

    DOI: 10.1109/MHS.2009.5351857

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  • Development of fluidic mixer with high productivity and mixing rate by applying principle of baker&prime;s transformation

    Omoto Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2009   795 - 796   2009

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    Publisher:The Japan Society for Precision Engineering  

    従来提案されているマイクロミキサは主に半導体プロセスにより作成される.振動装置などの特殊な機構を必要とする場合も多い.これに対し著者らは,金型により量産成形することができ,かつ特殊な機構を必要としない高効率マイクロミキサを考案した.本発表では,考案したミキサについて流体解析と模型実験を行い,ともにおおむね目的とする流体の挙動が確認されたことについて述べる.

    DOI: 10.11522/pscjspe.2009S.0.795.0

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  • Nonlinearity compensation for piezoelectric actuators based on non-creep line:Study on effects of driving speed and preload

    Shinoda Morio, Shamoto Eiji, Suzuki Norikazu, Tsukamoto Go, Yamauchi Akira

    Proceedings of JSPE Semestrial Meeting   2009   631 - 632   2009

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    Publisher:The Japan Society for Precision Engineering  

    圧電素子は高剛性、高分解能、高速応答性といった長所を持つため、位置決め装置のアクチュエータとして利用される。しかし、ヒステリシス、クリープといった非線形性を持つため位置決め性能が低下する。そこで本研究では、クリープの生じない変位と電圧の関係(非クリープ線)の発見に基づき、非線形性を補償するようにオープンループで位置決めを行う方法を開発している。本報では駆動速度、プリロードの影響について報告する。

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  • Simultaneous face milling of two sides of plates with high accuracy and high efficiency:Suppression of regenerative chatter vibration by speed difference between two spindles

    Shamoto Eiji, Nishimura Kohei, Kurata Yusuke, Suzuki Norikazu, Mori Tatsuya

    Proceedings of JSPE Semestrial Meeting   2009   577 - 578   2009

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    Publisher:The Japan Society for Precision Engineering  

    板材の加工は裏面をマグネットにより固定し,表面をフライス加工する方法が一般的である.しかし,二面を片面ずつ切削するために効率が低く,また弾性変形させた状態で切削することにより加工精度も低いことが問題となっている.これに対し,著者らは両面同時フライス加工法を採用し,それに伴う板材の剛性低下や複数主軸の同時使用に起因する再生型びびり振動を,左右主軸に回転数差を設けることにより抑制する手法を考案した.

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  • High Accuracy Analysis of Regenerative Chatter Vibration with Process Damping:Identification of process damping parameter by inverse analysis of chatter vibration

    Kurata Yusuke, Merdol S. Doruk, Altintas Yusuf, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2009   645 - 646   2009

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    Publisher:The Japan Society for Precision Engineering  

    切削加工において,低速領域ではプロセスダンピングの影響によりびびり振動が発生しにくいことが知られている.これを考慮した簡易的な解析モデルが考案されているが,従来手法はその影響を考慮するための変数の同定精度が低く,高精度な解析が難しいという問題があった.これに対し,本研究ではびびり振動の逆解析を利用した変数の新しい同定手法を考案し,高精度な安定限界解析が可能であることを実験的に確認した.

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  • 164 Development of 200 kHz elliptical vibration tool

    Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

    The Proceedings of Conference of Tokai Branch   2009   57 - 58   2009

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  • Study on Re-entrant Flowshop Scheduling Problem(2nd report) : Proposal of Heuristic Scheduling Method Reviewed

    HINO Rei, UEKAWA Daisuke, MORIKAWA Masanori, SUZUKI Norikazu, SHAMOTO Eiji

    Journal of the Japan Society of Precision Engineering   74 ( 11 )   1225 - 1230   2008.11

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    Two new heuristic procedures for re-entrant flow shop scheduling problem are proposed to plan a feasible production schedule in industrial manufacturing factories. Each job is assigned to one of idle periods within a limited time on a cyclic Gantt chart. One heuristic procedure is for an assignment of a target job on the machine while an adequate the idle time is remained for undecided jobs. Another heuristic procedure is based on solutions for two classical optimization problems, or a job assignment problem and a knapsack problem. The starting time of the target job is optimally determined at each step in the scheduling. The results indicate that the proposed procedures give a good schedule in comparison with the optimal schedule derived theoretically. The Calculation times are also evaluated and verified a validity of the use in actual manufacturing factories.

    DOI: 10.2493/jjspe.74.1225

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  • Study on Re-entrant Flowshop Scheduling Problem (1st report) : Optimization by Mathematical Programming Reviewed

    HINO Rei, UEKAWA Daisuke, MORIKAWA Masanori, SUZUKI Norikazu, SHAMOTO Eiji

    Journal of the Japan Society of Precision Engineering   74 ( 10 )   1119 - 1124   2008.10

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    A new theoretical formulation for re-entrant flow shop scheduling problem is derived to plan an optimum production schedule by mixed integer programming. Flow time, which is an index of the evaluation of the planned schedule, is minimized to decrease amount of work-in-process. Cycle time, which is another important index, is determined by the total load time on a bottleneck machine to manufacture the products at the highest productivity. Both objective function and constraint conditions are described in linear expressions and a general optimization tool is adopted to solve the formulated scheduling problems. Another objective function is also introduced in order to shorten the time for the optimization. Computational scheduling results obtained by the optimization are evaluated and discussed in the present paper.

    DOI: 10.2493/jjspe.74.1119

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  • A Coupled Fluid-Structure Analysis for CMP Process:Construction of A Method for Dynamic Structural Analysis -

    Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2008   853 - 854   2008

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    CMPにおける従来のウェハ-研磨パッド間の接触応力解析においては,動的な解析モデルを扱う際に解析精度が低くなるという問題があった.これに対し,動的なプロセスを準静的に扱う構造解析モデルを考案し,動的接触応力解析の高精度化・高速化について検討を行った.その結果,提案手法を用いることにより,ウェハエッジ部における応力集中などの従来困難であった解析の精度が向上し,解析時間が大幅に短縮されることを確認した.

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  • A new method to control work-in-process inventory for high manufacturing productivity Reviewed

    Rei Hino, Norikazu Suzuki, Eiji Shamoto

    MANUFACTURING SYSTEMS AND TECHNOLOGIES FOR THE NEW FRONTIER   221 - 224   2008

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:SPRINGER  

    A new method for controlling the WIP inventory is proposed in order to restrict the excessive production of unfinished products, while the manufacturing productivity is kept at a certain high value. Excessive WIPs decrease business profits and prevent the realization of agile manufacturing along with changes in markets, while insufficient number of WIPs reduce manufacturing productivity and flexibility to cope with malfunctions of production resources. Theoretical formulations of a scheduling problem without buffer is derived, and heuristic procedure is adopted to plan a feasible schedule. The proposed control methods are verified by computational simulations regarding job-shop type production system.

    DOI: 10.1007/978-1-84800-267-8_45

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  • Analysis of 3D elliptical vibration cutting with thin shear plane model Reviewed

    E. Shamoto, N. Suzuki, R. Hino

    CIRP ANNALS-MANUFACTURING TECHNOLOGY   57 ( 1 )   57 - 60   2008

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:TECHNISCHE RUNDSCHAU EDITION COLIBRI LTD  

    Simple analytical models of three dimensional (3D) elliptical vibration cutting are developed in order to simulate the cutting process quickly and to understand the basic mechanics. The elliptical vibration cutting has recently been applied in industry mainly to ultraprecision machining of dies and molds, where the vibration locus is not generally perpendicular to the cutting edge and thus all directions of shear, chip flow and cutting force have the 3D components. Therefore, the 3D elliptical vibration cutting models are developed, and the basic cutting mechanics are discussed in the present research. (c) 2008 CIRP.

    DOI: 10.1016/j.cirp.2008.03.073

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  • Effect of cross-terms in a transfer function on stabilitiy limits of regenerative chatter vibration:Study on plunge cuting

    Suzuki Norikazu, Nishimura Kohei, Shamoto Eiji, Yoshino Kiyoshi

    Proceedings of JSPE Semestrial Meeting   2008   71 - 72   2008

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    切削加工におけるびびり振動の安定限界に対して,機械構造の伝達特性におけるクロス項が与える影響について検討した研究はこれまでになく,ほとんどの場合には考慮すらされることがない.これに対し本研究では,びびり振動の安定限界に対して伝達特性のクロス項が与える影響について,その本質的な意味を明らかにするとともに,突切り切削を対象としてクロス項を考慮した再生型びびり振動の安定限界解析手法を提案する.

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  • Inverse identification of a transfer function with experimental results in end milling

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2008   69 - 70   2008

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    エンドミル加工のびびり振動の安定限界解析には伝達関数が必要となるが,小型もしくは複雑形状の機械構造や,回転中に伝達特性の変化する機械構造がびびり振動する場合には,伝達関数の高精度測定が難しいという問題がある.そこで,従来の伝達関数測定手法と異なり,加工実験中に計測されるびびり振動の周波数と実際の安定限界切込みから伝達関数を逆同定する手法を考案した.そして,加工実験により考案手法の検証を行った.

    DOI: 10.11522/pscjspe.2008S.0.69.0

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  • Ultra-precision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (3rd Report):Study on extending tool life

    Suzuki Norikazu, Ebata Yusuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2008   1043 - 1044   2008

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    新しいガラス成型用金型材料として期待されているタングステン合金の超音波楕円振動切削においては,従来の研究によってダイヤモンド工具の急激な摩耗が仕上げ面性状の劣化を引き起こし問題となることが明らかになっている.本研究ではこの摩耗メカニズムに着目し,工具形状や結晶方位などの変更による工具寿命の延長について検討を行う.さらに,各種工具を用いた寿命試験により,その効果について検証を行った.

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  • Improvement of Load Characteristics of 3 DOF Ultrasonic Elliptical Vibration Tool

    Suzuki Norikazu, Yokoi Hideo, Syamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2008   123 - 124   2008

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    著者らは楕円振動切削を利用した焼入れ鋼の自由曲面加工法を提案し,これを実現するための3自由度超音波楕円振動工具を開発している.従来の振動工具においては,大きな切削負荷が生じた際に振動軌跡が乱れて仕上げ面性状の劣化や工具の欠損を引き起こす問題があった.そこで,本研究では振動子に取り付けるシャンク形状の変更による負荷特性の改善を検討した.その結果,大幅に負荷特性を改善し得ることを確認した.

    DOI: 10.11522/pscjspe.2008A.0.123.0

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  • Experimental/Analytical Evaluation of Fluid Bearing Utilizing Traveling Waves

    Owaki Yoshihiro, Yamaji Fumie, Suzuki Norikazu, Syamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2008   937 - 938   2008

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    本研究では進行波を利用した新しい流体軸受を提案している.本軸受では圧電素子を用いて軸受面に進行波を発生し,軸受面中心に向かう力を流体に与えることで軸受面下の圧力を上昇させ,非接触の支持を実現する.本報では本軸受の試作機に対する測定と既に構築している本軸受の軸受隙間の有限要素モデルによる解析により,本原理による軸受としての性能について検討する.

    DOI: 10.11522/pscjspe.2008A.0.937.0

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  • 256 Effect of off-diagonal elements in a transfer function on stability limits of regenerative chatter vibration in plunge cutting

    SUZUKI Norikazu, NISHIMURA Kohei, KURATA Yusuke, SHAMOTO Eiji

    The Proceedings of Conference of Tokai Branch   2008   139 - 140   2008

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  • 657 Study on restraint of creep of piezoelectric actuator

    TSUKAMOTO Go, SUZUKI Norikazu, SHINODA Morio, SHAMOTO Eiji

    The Proceedings of Conference of Tokai Branch   2008   435 - 436   2008

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  • Ultra-precision micro machining of hard material by applying elliptical vibration cutting:Proposal of texturing method by high-speed amplitude control

    Suzuki Norikazu, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

    Proceedings of JSPE Semestrial Meeting   2008   127 - 128   2008

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    楕円振動切削では,切込方向の振動振幅を能動的に制御することによって切込み深さに変動を与えることができる.本研究では,この特徴に基づき,振動振幅制御を利用した高硬度材の超精密微細テクスチャ加工技術を提案する.振動振幅を高速制御することが可能な約40kHzの楕円振動制御装置を用いて,焼入れ鋼のテクスチャ加工実験を行った.基礎的な溝加工実験の結果,良好な超精密微細加工を実現できることを確認した.

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  • FEM simulation of Elliptical Vibration Cutting

    Amini Saeid, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2008   125 - 126   2008

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    Ultrasonic vibration cutting processes are modeled and simulated in the present research, utilizing MSC-Marc FEM software. The vibration is applied to the cutting tool in one or two directions denoted by vibration cutting (VC) and elliptical vibration cutting (EVC), respectively. The cutting forces and the stresses developed within the workpiece during the vibration cutting processes are estimated and compared with those in the conventional cutting (CC) process. The influence of various parameters such as speed ratio and amplitude are subsequently investigated. It is partially concluded that though the cutting force fluctuates periodically in VC and EVC, its average value changes from CC to VC and EVC in descending order. The cutting force decreases with a rise in the speed ratio in EVC and does not change in VC.

    DOI: 10.11522/pscjspe.2008A.0.125.0

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  • Regenerative effect and mode-coupling in self-excited chatter vibration

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2008   295 - 296   2008

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    Publisher:The Japan Society for Precision Engineering  

    回転工具を用いる加工では,一般に再生効果とモードカップリングの影響が混在した自励型びびり振動が発生するが,通常これらの影響はほとんど区別されることはない.これに対し,本研究ではボーリング加工を対象として,再生効果とモードカップリングの影響を切り分けた実験条件において安定限界解析の比較を行った.その結果,それぞれの影響が小さくなる条件において安定限界が最も大きくなることを確認した.

    DOI: 10.11522/pscjspe.2008A.0.295.0

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  • Job Shop Scheduling Focusing on Role of Buffers : 2nd Report, Feasibility Judgement by Utilizing Graph Reviewed

    HINO Rei, KODAMA Yusuke, SUZUKI Norikazu, SHAMOTO Eiji

    Transactions of the Japan Society of Mechanical Engineers C   73 ( 735 )   3084 - 3091   2007.11

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    A scheduling problem is formulated focusing on jobs stored in production resources in the present paper. In a production system with finite buffer capacity, the job are stored in not only buffers but also production resources such as machine tools and assembly robots. Therefore, successive jobs cannot be processed by the resources until the previous jobs are removed from them. In such a scheduling problem, certain processing orders of jobs are infeasible because start times and release times of the jobs can not be determined. The graph representation method for conventional scheduling problems is extended in order to judge feasibility of the present schedules, in which the jobs stored in the resources are taken into account. A local searching method is applied to improve the schedules of the production systems with finite buffer capacity. It gives an appropriate schedule in combination with the dispatching procedure proposed in the first report.

    DOI: 10.1299/kikaic.73.3084

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  • Study on Production Scheduling with Consideration of Synchronized Operations by Multiple Resources Reviewed

    HINO Rei, KOBAYASHI Yasuhiko, SUZUKI Norikazu, SHAMOTO Eiji

    Journal of the Japan Society of Precision Engineering   73 ( 7 )   834 - 839   2007.7

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    This study deals with scheduling problems with consideration of synchronized operations by multiple production resources. Transfer of a material between a machine tool and a conveying device by a human operator is a typical example of the synchronized operations. When the synchronized operations are taken into consideration, it is necessary to check conflicts between the resources before an appropriate job is assigned by Earliest Starting Time rule, which is one of the popular dispatching rules. A new sequence is proposed in the present paper to check the conflicts. Feasible scheduling with the consideration of synchronized operations is realized by combining the proposed sequence with a conventional dispatching rule. Computational scheduling results are shown in order to verify the effectiveness of the selecting sequences proposed here. Computational scheduling is carried out, and the results show that a practical production schedule can be planned without any conflicts by the proposed sequence, despite complex constraints due to the consideration of synchronized operations. Furthermore, a blocked status of the machine tool, the conveying device and the buffer appears on the Gantt chart unlike the conventional scheduling methods.

    DOI: 10.2493/jjspe.73.834

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  • Ultraprecision Machining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting Reviewed

    SUZUKI Norikazu, YAN Zhenmin, HARITANI Makoto, YANG Ji-bin, HAMADA Seiji, HINO Rei, SHAMOTO Eiji

    Journal of the Japan Society of Precision Engineering   73 ( 3 )   360 - 366   2007.3

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    Authorship:Lead author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    &#039;Ultrasonic elliptical vibration cutting&#039; technology is applied in the present research to ultraprecision machining of tungsten alloy, which is expected as a material of molds for glass parts instead of sintered tungsten carbide or CVD-silicon carbide. It is confirmed that ulptraprecision grooving of the tungsten alloy cannot be realized by the ordinary cutting. On the other hand, it can be realized by the elliptical vibration cutting at a cutting depth of less than 0.8 μm. Effects of the cutting distance on the cutting force and the surface roughness are also clarified, and it is found that surface roughness of less than 100 nm Rz can be attained up to a cutting distance of 35 m. Practical molds of the tungsten alloy for spherical glass lenses and a glass prism are successfully machined by the elliptical vibration cutting.

    DOI: 10.2493/jjspe.73.360

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  • Sculptured Surface Machining of Die Steel by Applying Elliptical Vibration Cutting (2nd Report) : Development of 3 DOF Ultrasonic Elliptical Vibration Tool Reviewed

    SUZUKI Norikazu, HINO Rei, TSUCHIYA Eiji, SHAMOTO Eiji

    Journal of the Japan Society of Precision Engineering   73 ( 1 )   117 - 123   2007.1

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    Authorship:Lead author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    A new ultrasonic elliptical vibration tool is developed in the present research to realize sculptured surface machining of die steel by applying &quot;elliptical vibration cutting&quot;. The new vibration tool is designed to have three degree-of-freedom (3 DOF), so that it is suitable to machine the three-dimensional sculptured surfaces. The 3 DOF ultrasonic elliptical vibration tool generates an arbitrary ultrasonic elliptical vibration in the three-dimensional space by combining two directional bending vibrations and a longitudinal vibration. It is excited by piezoelectric actuators at 34.4kHz, which is an average resonant frequency of the three vibrations. The developed vibration tool is attached to the 4 axis precision machine tool developed in the previous report, and mirror surfaces of hardened steel are obtained successfully by the proposed method.

    DOI: 10.2493/jjspe.73.117

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  • Micromixer based on baker's transformation

    Keiko Osato, Manabu Tokeshi, Noritada Kaji, Yusuke Omoto, Norikazu Suzuki, Yasuhiko Sakai, Eiji Shamoto, Yoshinobu Baba

    Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007   309 - 311   2007

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    Herein we report the development of a new passive micromixer with 3-D structure based on Baker's transformation. The 3-D structure was fabricated on an oxygen-free copper block by using an ultrasonic elliptical vibration cutting method [1] and was used as a mold master. Using this master mold, we fabricated a PDMS micromixer chip. The mixing efficiency of the micromixer was evaluated by measuring the fluorescence image that results from mixing of two liquids (FITC solution and water). From these measurements, we found that the mixing efficiency at relatively high flow rate conditions is much better than that of low flow rate conditions. The mixing behavior in the microchannel was observed by a confocal fluorescence microscopy.

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  • Elliptical vibration cutting of tungsten alloy molds for optical glass parts Reviewed

    N. Suzuki, M. Haritani, J. Yang, R. Hino, E. Shamoto

    CIRP ANNALS-MANUFACTURING TECHNOLOGY   56 ( 1 )   127 - 130   2007

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:TECHNISCHE RUNDSCHAU EDITION COLIBRI LTD  

    Elliptical vibration cutting is applied to ultra-precision machining of tungsten alloy molds for optical glass parts in the present research. The tungsten alloy is expected as a new mold material instead of conventional ones such as sintered tungsten carbide and CVD-silicon carbide. However, it cannot be finished precisely by ordinary cutting because of rapid tool wear, brittle fracture and adhesion to the tool. Therefore, the ultrasonic elliptical vibration cutting is applied to the ultra-precision machining of tungsten alloy. Practical ultra-precision molds are obtained by the elliptical vibration cutting, and they are applied to glass molding successfully.

    DOI: 10.1016/j.cirp.2007.052.032

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  • Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (2nd Report)

    Suzuki Norikazu, Haritani Makoto, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2007   681 - 682   2007

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    Elliptical vibration cutting is applied to ultra-precision machining of tungsten alloy molds for optical glass parts in the present research. The tungsten alloy is expected as a new mold material instead of conventional ones such as sintered tungsten carbide and CVD-silicon carbide. Ultra-precision molds of the tungsten alloy for a prism, a small spherical lens and an array of micro V-grooves were machined by the elliptical vibration cutting. It is confirmed that surface roughness of less than 100 nmRz and desired shape can be attained. They were applied to glass molding of borosilicate glass BK7 without any coatings, and it is found that accurate transcript with no adhesion can be achieved successfully.

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  • Chatter Stability Limits in End-Milling with Anisotropic Flexible Tools:Experimental verification of proposed analytical model

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2007   571 - 572   2007

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    Publisher:The Japan Society for Precision Engineering  

    従来のエンドミル加工におけるびびり振動安定限界解析では,空間に固定された座標系内で構造物の伝達関数を定義し,固定座標系内で一定の振動が生じることを前提としている.これに対して著者らは,低剛性の回転工具に,その工具に固定された座標系内で一定の振動が発生する場合に対応した安定限界解析モデルを構築している.本研究では,異方性を持つエンドミル工具を用いた切削実験を行い,本手法の有効性について検証を行った.

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  • Analysis of Stability Limits for Forced Chatter Vibration in End-Milling

    Suzuki Norikazu, Ikada Tsutomu, Kurata Yusuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2007   569 - 570   2007

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    Publisher:The Japan Society for Precision Engineering  

    びびり振動を抑制・回避するためには,安定限界解析手法を利用した適切な加工条件の選択や構造の改善が有効となる.これに対し,本研究では,強制型びびり振動を引き起こす主要因となる切削力の周期変動を考慮した,エンドミル加工における強制型びびり振動の安定限界解析手法を考案した.さらに,エンドミル加工による検証実験を行い,本解析手法により強制型びびり振動の安定限界を高精度に予測し得ることを確認した.

    DOI: 10.11522/pscjspe.2007A.0.569.0

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  • Proposal of parabolic vibration cutting method

    Shamoto Eiji, Suzuki Norikazu, Kikuchi Kaname, Tsuchiya Eiji, Hamada Seiji

    Proceedings of JSPE Semestrial Meeting   2007   433 - 434   2007

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    Publisher:The Japan Society for Precision Engineering  

    本研究では新しい振動切削加工法として,放物線振動切削加工法を提案する。本手法では工具刃先を切削方向に放物線軌跡で超音波振動させながら加工を行うことにより、間欠切削と引き切りの効果を同時に得るとともに、切れ刃方向の力が反転し相殺するため,実質的に著しい切削抵抗の低減が期待される。本報では、超音波放物線振動子を開発し,通常切削および従来振動切削と本手法の基礎的な比較実験を行った結果について報告する。

    DOI: 10.11522/pscjspe.2007A.0.433.0

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  • A Coupled Fluid-Structure Analysis for CMP Process:Effects of material properties of polishing pad and wafer shape

    Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2007   1017 - 1018   2007

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    Publisher:The Japan Society for Precision Engineering  

    CMPプロセスでは,研磨に使用する材料の形状や機械特性が研磨特性に大きく影響することが経験的に知られている.著者らは,複雑なCMPプロセスのメカニズムの解明を目的とし,これまでに流体-構造連成解析を利用したCMPプロセスの解析手法について検討を行っている.本稿では,本解析手法を利用し,研磨パッドの材質やウェハ形状などの各種パラメータが研磨特性に及ぼす影響について評価を行った結果について報告する.

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  • Experimental verification of CMP process analysis Reviewed

    Yohei Hashimoto, Norikazu Suzuki, Rei Hino, Eiji Shamoto

    2007 INTERNATIONAL SYMPOSIUM ON MICRO-NANO MECHATRONICS AND HUMAN SCIENCE, VOLS 1 AND 2   592 - 597   2007

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    The present study performs an experimental verification of an analytical model of the Chemical Mechanical Polishing (CM-P) process, focusing on friction force and the distribution of the material removal rate. A coupled Fluid-Structure analytical model, which can predict the friction force and the distribution of the material removal rate, is developed. Oxide CMP experiments are conducted using a fabricated CMP system, and measured friction force and distribution of the material removal rate are compared with the analytical results. As a result, it is confirmed that the wafer's rotational speed affects the friction force and the distribution of the material removal rate. Additionally, the results determined by the developed analytical model agree with the measurements. The magnitude of the friction force under a condition in which the wafer does not rotate becomes smaller than when the wafer rotates at the same speed as the polishing pad. The direction of the friction force inclines against the rotational center of the polishing pad. The material removal rate when the wafer does not rotate is high around the edge of the wafer as compared with that at other areas. In particular, it becomes high around the leading edge and the area where the rotational radius of the polishing pad is large. These specific characteristics of the friction force and the distribution of the material removal rate are explained using the analytical results.

    DOI: 10.1109/MHS.2007.4420922

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  • Proposal of a New Fluid Bearing Utilizing Traveling Waves Reviewed

    SHAMOTO Eiji, SUZUKI Norikazu, UEDA Hirotoshi, HINO Rei

    Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers   72 ( 12 )   1483 - 1488   2006.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    A new non-contact fluid bearing, which utilizes traveling waves, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the waves traveling radially on the bearing surface. Conventional hydrostatic bearings utilize externally compressed fluid, which requires plumbing and large facilities. The proposed bearing realizes non-contact precision motion without those facilities, and furthermore it has a capability to electrically control the bearing force or clearance. A prototype air bearing was developed on the basis of the proposed principle by utilizing piezo-electric actuators. Its non-contact smooth motion was confirmed, and its basic performance is clarified experimentally in terms of stiffness, bearing clearance, load capacity, pressure distribution of the air film, etc.

    DOI: 10.2493/jspe.72.1483

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  • Sculptured Surface Machining of Die Steel by Applying Elliptical Vibration Cutting (1st Report) : Proposal of a New Machining Method and Development of 4-Axis Controlled Precision Machine Tool Reviewed

    SHAMOTO Eiji, SUZUKI Norikazu, TSUCHIYA Eiji, HORI Yasunori, INAGAKI Hiroshi, YOSHINO Kiyoshi

    Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers   72 ( 9 )   1139 - 1145   2006.9

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    New machining method and system are developed in the present research to realize sculptured surface machining of die steel by applying &quot;elliptical vibration cutting&quot;. The present report presents the new machining method, and a 4-axis controlled precision machine tool and special CAM software for the proposed method. It is expected that shape accuracy, tool life, machining efficiency and energy consumption are all improved by the proposed method as compared with the conventional ball end milling. The prototype machine tool is developed by employing an air spindle driven directly by a coreless servo mortar, precision ball screws and precision linear roller guides. The CAM software is developed by utilizing a commercial main processor and developing a new post processor to generate tool paths for the 4-axis controlled motion. A new 3-DOF elliptical vibration system, which is required to complete the present technology, and application to hard materials will be presented in the next reports. It is confirmed in the present report that mirror surface machining of aluminum alloy can be realized by applying the proposed machining method and the developed machine tool and CAM software.

    DOI: 10.2493/jspe.72.1139

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  • Ultraprecision Cutting of Sintered Tungsten Carbide by Applying Elliptical Vibration Cutting : Study on Ductile Cutting Mechanics Reviewed

    SUZUKI Norikazu, HINO Rei, MASUDA Shinsuke, SHAMOTO Eiji

    Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers   72 ( 4 )   539 - 545   2006.4

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    Authorship:Lead author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    Sintered tungsten carbide is machined in ductile mode by applying &quot;elliptical vibration cutting&quot;, and the mechanics of the ductile mode cutting are investigated in the present research. Grooving experiments of the sintered tungsten carbide are carried out at low vibration frequency so that the vibration cutting process can be monitored easily. The groove machined by the elliptical vibration cutting is smooth without any visible fractures, while those machined by the conventional linear vibration cutting and the ordinary cutting are rough with numerous micro fractures. It is considered that the difference is caused by reduction of thickness of workpiece material cut in each cycle of the elliptical vibration. The same difference is confirmed at ultrasonic frequency, and it is also clarified that high quality surfaces are obtained when the vertical amplitude of the elliptical vibration is lower than 0.5 μm_&lt;0-p&gt;, which corresponds to grain size of the sintered tungsten carbide. Based on these fundamental results, the ultrasonic elliptical vibration cutting is applied to ultraprecision planing of the sintered tungsten carbide, and ultraprecision machining with surface roughness of less than 50 nm Rz is realized, although the tool life is relatively short.

    DOI: 10.2493/jspe.72.539

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  • 125 Analysis of CMP process in mixed lubrication : Experimental verification of analytical model in terms of friction resistance

    SUZUKI Norikazu, HASHIMOTO Yohei, HAYASHI Masayuki, SHAMOTO Eiji

    The Proceedings of The Manufacturing & Machine Tool Conference   2006 ( 6 )   225 - 226   2006

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    An analytical approach to estimate the coefficient of friction (COF) in chemical mechanical polishing (CMP) process in mixed lubrication is developed in the present research. The Stribeck curve is calculated by experimental and analytical results of friction resistances. An analytical model, which can predict the distribution of contact stress and fluid pressure under the condition of nonuniform velocity distribution by utilizing the Stribeck curve, is developed. Polishing experiments are carried out for the verification of the model in terms of the friction resistance. It is confirmed that the effect of the wafer rotational speed on the friction resistance can be predicted successfully by the developed analytical model.

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  • Ultraprecision micro-machining of single crystal germanium by applying elliptical vibration cutting Reviewed

    Norikazu Suzuki, Zhenmin Yan, Rei Hino, Eiji Shamoto, Yasuhiro Hirahara, Tadashi Masuda

    2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE   41 - +   2006

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    'Ultrasonic elliptical vibration cutting' technology, which has been developed by the authors, is applied to ultraprecision machining of single crystal germanium in the present research. The germanium is an excellent material for infrared optical devices, whereas ultraprecision micro-machining of the germanium is difficult due to its brittleness. Micro grooving experiments are carried out on the (100), (110) and (111) surfaces of single crystal germanium substrates, and basic effects of the elliptical vibration on the ductile micro-machining are clarified as follows. Critical depth of cut to generate a completely fracture-free surface on the single crystal germanium is increased significantly in all crystal orientations on the (100) and (111) surfaces, and ultraprecision micro grooving is realized successfully at a large depth of cut of 1 pin by applying the elliptical vibration cutting. This improvement by the elliptical vibration cutting is considered to be caused by reduction of instantaneous uncut chip thickness and cutting force in each cycle of the elliptical vibration. When the rake angle becomes negative, influence of the crystal orientation on the critical depth of cut becomes negligible, while it is considerable at 0 degree. On the other hand, the rake angle does not have considerable influence on average values of the critical depth of cut between -20 to 0 degree. The critical depth of cut is increased in all crystal orientations as the cutting speed is reduced in the elliptical vibration cutting.

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  • A new fluid bearing utilizing traveling waves Reviewed

    E. Shamoto, N. Suzuki, A. Hamaguchi

    CIRP Annals - Manufacturing Technology   55 ( 1 )   411 - 414   2006

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier USA  

    A new non-contact fluid bearing, which utilizes traveling waves, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the waves traveling radially on the bearing surface. Conventional hydrostatic bearings utilize externally compressed fluid, which requires plumbing and compressors. On the other hand, the proposed bearing realizes non-contact smooth motion without such a large apparatus, and furthermore it has a capability to electrically control the bearing force or clearance. A prototype air bearing is developed on the basis of the proposed principle by utilizing piezo-electric actuators, and its non-contact smooth motion is confirmed.

    DOI: 10.1016/S0007-8506(07)60447-8

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  • Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting

    Suzuki Norikazu, Shamoto Eiji, Haritani Makoto, Yan Sekihin, Ootsuki Masato, Hamada Seiji

    Proceedings of JSPE Semestrial Meeting   2006   1031 - 1032   2006

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    Publisher:The Japan Society for Precision Engineering  

    &amp;prime;Ultrasonic elliptical vibration cutting&amp;prime; technology is applied in the present research to ultraprecision machining of Tungsten alloy, which is expected as a material of molds for glass parts instead of sintered tungsten carbide. It is confirmed that ulptraprecision grooving cannot be realized by the ordinary cutting. On the other hand, it can be realized by the elliptical vibration cutting at a cutting depth of less than 1 um. Effects of the cutting distance on the cutting force and the roughness are also clarified, and it is found that surface roughness of less than 100 nm Rz can be realized up to a cutting distance of 35 m. Practical molds for spherical glass lenses and a glass prism are successfully machined.

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  • Analysis of CMP process in boundary lubrication

    Suzuki Norikazu, Hashimoto Yohei, Hayashi Masayuki, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2006   517 - 518   2006

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    Publisher:The Japan Society for Precision Engineering  

    Polishing experiments are carried out in the present research in order to verify an analytical model for a simulation of Chemical Mechanical Polishing (CMP) process. A three-dimensional finite element analysis of CMP process, which considers the boundary lubrication between a wafer and a polishing pad, is utilized to predict a friction resistance. Additionally, the friction forces are measured in the polishing experiments by force sensors built into the experimental setup. It is conformed that the predictions of friction resistance directions fit experimental results. These results indicate that the friction resistance direction depends on the ratio of the wafer to the polishing pad rotation speeds.

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  • Ductile Machining of Single Crystal Germanium by Applying Elliptical Vibration Cutting

    Suzuki Norikazu, Yan Xhen, Shamoto Eiji, Hirahara Yasuhiro, Masuda Tadashi

    Proceedings of JSPE Semestrial Meeting   2006   785 - 786   2006

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    Publisher:The Japan Society for Precision Engineering  

    &amp;prime;Ultrasonic elliptical vibration cutting&amp;prime; technology is applied in the present research to ultraprecision machining of single crystal germanium, which is an excellent substrate material for optical devices. Micro grooving experiments are carried out on (100), (110) and (111) faces of the single crystal germanium to clarify the basic effects of the elliptical vibration on the ductile micro machining. It is confirmed that a groove formed in &lt;011&gt; direction on the (111) surface is filled with asperities at a depth of 0.19 um due to cleavage fractures in the ordinary cutting. While a smooth mirror surface is obtained by the elliptical vibration cutting at a depth of cut of less than 1.04 um in same direction. These experimental results indicate that the critical depth of cut is increased at a specific orientation angle by applying the elliptical vibration cutting. However critical depths of cut depend on cutting directions and crystal orientations. We also clarified that the critical depth of cut can be increased at the lower cutting speed.

    DOI: 10.11522/pscjspe.2006A.0.785.0

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  • 508 Development of Ultraprecision Alignment Device with High Load Capacity Driven by Means of Walking Drive

    SHAMOTO Eiji, TSUKAMOTO Go, SUZUKI Norikazu, KATO Akio

    The Proceedings of The Manufacturing & Machine Tool Conference   2006   79 - 80   2006

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    This paper presents a new ultraprecision alignment device with high load capacity, which is targeted for ultraprecision bonding in a vacuum. The ultraprecision bonding is recently needed for emerging production technologies such as nanoimprint, MEMS and WOW. The device is driven by &#039;Walking Drive&#039;, which is an unique driving method to realize ultraprecision positioning with long stroke by utilizing piezoelectric actuators. The method is suitable for high load capacity and the ultraprecision positioning in a vacuum. Mechanical parts of the device are designed by utilizing FEM analysis, so that the device has a high load capacity of greater than 1 ton. It is confirmed experimentally that the developed alignment system has the high load capacity and also fine positioning resolution of less than 10nm.

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  • Sculptured Surface Machining by Applying Ultrasonic Elliptical Vibration Cutting

    Shamoto Eiji, Suzuki Norikazu, Tsuchiya Eiji, Hori Yasunori, Inagaki Hiroshi, Yoshino Kiyoshi

    Proceedings of JSPE Semestrial Meeting   2005   73 - 74   2005

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    Publisher:The Japan Society for Precision Engineering  

    A new machining method is proposed to obtain precise sculptured surfaces by applying &amp;Prime;elliptical vibration cutting&amp;Prime;. A 4&amp;ndash;axis controlled precision machine tool, which consists of an air spindle and precision elements, is developed. 4&amp;ndash;axis control tool paths for machining sculptured surfaces are also generated by utilizing commercial CAM software and a special post processor. It is confirmed that mirror surface machining of hardened die steel can be realized by integrating the precision machine tool, the special CAM system and the 3 DOF vibration system developed in the previous research.

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  • Study on three dimensional cutting mechanics

    Shamoto Eiji, Suzuki Norikazu, Kato Masahiro

    Proceedings of JSPE Semestrial Meeting   2005   1067 - 1068   2005

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    Publisher:The Japan Society for Precision Engineering  

    An analytical model of three dimensional cutting process with two cutting edges is presented without relying on empirical rules in the present research. The shear deformation zone is simplified to a thin shear plane, and Krystof&amp;prime;s maximum shear stress model and Merchant&amp;prime;s minimum energy model for the orthogonal cutting process are extended to the three dimensional cutting process to predict the shear direction. The three dimensional cutting parameters including cutting forces and chip flow direction are computed with the developed model, and it is confirmed that the computed chip flow direction agrees roughly with Colwell&amp;prime;s empirical law of chip flow.

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  • Analysis of distribution of material removal rate in CMP process

    Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2005   277 - 278   2005

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    Publisher:The Japan Society for Precision Engineering  

    本研究では、CMPプロセスにおいて実用的な解を与える研磨レート分布解析手法の確立を目指している。本報では、基礎的なCMPプロセスの解析モデルを構築し、有限要素解析を利用してウェハ&amp;ndash;研磨パッド間の流体圧力分布及び接触応力分布の解析を行うと同時に、研磨レート分布の推定を行った。さらに酸化膜CMPにおける基礎的な研磨実験を行い、研磨条件がCMPプロセスに及ぼす影響について検証を行った。

    DOI: 10.11522/pscjspe.2005A.0.277.0

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  • Development of 3 DOF ultrasonic vibration tool for elliptical vibration cutting of sculptured surfaces Reviewed

    E. Shamoto, N. Suzuki, E. Tsuchiya, Y. Hori, H. Inagaki, K. Yoshino

    CIRP Annals - Manufacturing Technology   54 ( 1 )   321 - 324   2005

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Hallwag Publishing Ltd  

    A new machining method is proposed to obtain sculptured mirror surfaces by applying elliptical vibration cutting. The tool is vibrated elliptically unlike rotated end mills and fed along the sculptured surface in the proposed method. A 3 DOF ultrasonic vibration tool is developed, which can generate an arbitrary ultrasonic elliptical vibration in the 3D space so that it is suitable to machine the 3D sculptured surfaces. A precision machine tool is also developed, and the proposed method is successfully applied to mirror surface machining of hardened die steel.

    DOI: 10.1016/S0007-8506(07)60113-9

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  • A new method to machine sculptured surfaces by applying ultrasonic elliptical vibration cutting Reviewed

    Eiji Shamoto, Norikazu Suzuki, Rei Hino, Eiji Tsuchiya, Yasunori Hori, Hiroshi Inagaki, Kiyoshi Yoshino

    Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr   2005   84 - 89   2005

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    A new machining method is proposed to obtain sculptured mirror surfaces by applying elliptical vibration cutting. The tool is vibrated elliptically, unlike conventional rotating end mills, and is fed along the sculptured surface while the rotational position of the tool is controlled in accordance with the sculptured surface orientation in the proposed method. In order to realize the sculptured surface machining of hardened die steel with single crystal diamond tool, special components are required, i.e. a vibration system that can generate an arbitrary ultrasonic elliptical vibration in the 3D space, a 4-axis controlled precision machine tool and a special CAM system. The elliptical vibration system, which consists of a 3 DOF ultrasonic vibration tool and a vibration controller, is developed. The vibration tool can generate the arbitrary elliptical vibration at 34.4 kHz by combining two bending vibrations and a longitudinal vibration. The vibration controller is fabricated to keep the elliptical vibration to have a desired locus in the 3D space. The 4-axis controlled precision machine tool, which consists of an air spindle, precision linear guides, precision ball screws and so on, is developed. Commercial CAM software is utilized and a special post processor is developed to generate tool paths for the 4-axis control machining of sculptured surfaces. The developed ultrasonic elliptical vibration machining system is applied to precision diamond cutting of hardened die steel, and it is confirmed that mirror surface machining with surface roughness of less than 0.28 μm Rz can be realized for spherical surface machining of hardened die steel.

    DOI: 10.1109/MHS.2005.1589969

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  • Development of Fluid Bearing Utilizing Traveling Wave

    Shamoto Eiji, Suzuki Norikazu, Hamaguchi Akihide, Nunome Kiyonari

    Proceedings of JSPE Semestrial Meeting   2005   658 - 658   2005

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    Publisher:The Japan Society for Precision Engineering  

    A new non-contact fluid bearing, which utilizes traveling wave, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the wave traveling on the bearing surface. Conventional fluid bearings utilize externally compressed fluid, which requires some cost and large facilities. The proposed bearing realizes non-contact precision tables without the large facilities, and furthermore it has a capability to electrically control the bearing force and moment. A prototype device is developed on the basis of the proposed principle, and its non-contact smooth motion has been observed.

    DOI: 10.11522/pscjspe.2005S.0.658.0

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  • Development of a New Fluid Bearing Utilizing Surface Tension

    Shamoto Eiji, Komura Takamichi, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting   2005   875 - 876   2005

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    Publisher:The Japan Society for Precision Engineering  

    A prototype slider is developed in the present research by utilizing a new fluid bearing proposed in the previous research. The moving part is supported with a thin fluid film held on the bearing surface by surface tension. Conventional hydrostatic sliders utilize externally compressed fluid, which requires some cost and large facilities and causes micro vibrations by ripple of the fluid pressure. The non&amp;ndash;contact precision slider is realized without the large facilities by utilizing the proposed bearing, and it has high load capacity and enough rigidity for the simple structure. The prototype slider is fabricated by utilizing a water film and a guide rail of polished glass, and its resistance force against the feed motion is investigated here.

    DOI: 10.11522/pscjspe.2005A.0.875.0

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  • Cutting process control by applying elliptical vibration cutting.

    社本 英二, 鈴木 教和, 加藤 晃央, 柳田 和彦

    Proceedings of JSPE Semestrial Meeting   2004   427 - 427   2004

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    Publisher:The Japan Society for Precision Engineering  

    著者らが考案している楕円振動切削加工法では、背分力をゼロもしくは反転させることが可能である。また、振動軌跡における振動振幅や位相差などの各振動パラメータを変化させることにより、切削プロセスを意図的に変化させることができる。本研究では、振動振幅や位相差を変化させることにより切削力を制御する切削プロセス制御システムの開発を行った.さらに切削実験を行い、開発した制御システムの有効性を検討した。

    DOI: 10.11522/pscjspe.2004A.0.427.0

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  • Proposal of a New Fluid Bearing Utilizing Surface Tension

    Shamoto Eiji, Hashimoto Kento, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting   2004   384 - 384   2004

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    Publisher:The Japan Society for Precision Engineering  

    本研究では、表面張力を利用した新しい流体軸受を考案している。提案する装置では、軸受隙間に水の膜を作り、表面張力によってその状態を維持する。従来の非接触軸受と異なり、外部装置を必要としない単純な構造のため、使用する場所に制限されず、流体の脈動による微振動も無くす事ができる。実際に表面張力によって移動部を浮上させ、滑らかな送り動作が可能である事を確認している。また剛性等の測定も検討している。

    DOI: 10.11522/pscjspe.2004S.0.384.0

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  • Analysis of Chatter Stability Limits in End-Milling

    Shamoto Eiji, Suzuki Norikazu, Suzuki Hiromi, Se Gyouken, Inoue Atsushi, Kuroda Motofumi

    Proceedings of JSPE Semestrial Meeting   2004   462 - 462   2004

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    Publisher:The Japan Society for Precision Engineering  

    エンドミル加工では、加工時に発生するびびり振動により、切削条件が制限されることが多い。このびびり振動を抑制し切削安定限界を上げることは、加工能率の向上へとつながる。本研究では、工具を主体としたびびり振動の発生機構をモデル化し、解析的に求めた切削安定限界と実験値を比較する。また、積極的に安定限界領域を拡大する手法についても検討を行う。

    DOI: 10.11522/pscjspe.2004S.0.462.0

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  • Development of 3 DOF vibration system for ultrasonic elliptical vibration cutting

    Shamoto Eiji, Suzuki Norikazu, Nakamura Akihiro

    Proceedings of JSPE Semestrial Meeting   2004   670 - 670   2004

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    Publisher:The Japan Society for Precision Engineering  

    筆者らは楕円振動切削と呼ぶ加工法を提案し、優れた切削性能を持つことを確認している。実用的な自由曲面を加工するためには多様な加工形状に対応できる振動装置が必要となる。しかし、既に開発している2自由度型超音波楕円振動切削装置では振動子と被削材の干渉により加工形状が制約されてしまう。そこで、任意の面内で楕円振動軌跡を得ることができ、加工形状の制約が少ない3自由度型超音波楕円振動切削装置の開発を行った。

    DOI: 10.11522/pscjspe.2004S.0.670.0

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  • Ductile mode machining of cemented tungsten carbide by applying Elliptical Vibration Cutting

    Suzuki Norikazu, Masuda Shinsuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2004   425 - 425   2004

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    Publisher:The Japan Society for Precision Engineering  

    微細形状を有するガラス製品の量産を目的とし、超硬合金製金型に対する超精密微細加工の要求が増加している。これに対し、筆者らは楕円振動切削の適用を試み、すでに良好な延性モード加工を行い得ることを確認している。本報では、低周波振動における溝加工実験を行い、楕円振動切削による延性モード加工のメカニズムについて検討を行った。その結果、低周波振動においても延性モード加工行い得ることを確認した.

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  • Development of 3 DOF ultrasonic vibration control system to realize elliptical vibration cutting of free-form surface

    Suzuki Norikazu, Tsuchiya Eiji, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting   2004   426 - 426   2004

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    Publisher:The Japan Society for Precision Engineering  

    著者らは楕円振動切削を適用することにより焼入れ鋼金型に対して直接ダイヤモンド鏡面切削を行うことが可能な新しい加工技術の開発を目指している.これまでの研究において,1方向のたて振動と2方向のたわみ振動を同一周波数で発生させることのできる3自由度型の振動工具の開発を行っている.本報では,開発した3自由度型振動工具を安定して制御することが可能な制御システムを設計・試作を行い,その制御特性の評価を行った.

    DOI: 10.11522/pscjspe.2004A.0.426.0

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  • Development of Elliptical Vibration Cutting Machine by Utilizing Mechanical Vibrator Reviewed

    SHAMOTO Eiji, SONG YoungChan, YOSHIDA Hideki, SUZUKI Norikazu, MORIWAKI Toshimichi, KOHDA Seido, YAMANISHI Tetsuji

    Journal of the Japan Society of Precision Engineering   69 ( 4 )   542 - 548   2003.4

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society for Precision Engineering  

    A new &quot;elliptical vibration cutting machine&quot; is fabricated by developing a unique double spindle mechanism, and its basic performance is evaluated in the present research. The developed machine generates circular vibration mechanically by rotating an eccentric sleeve with a built-in motor. The tool spindle is inserted within the rotating sleeve and connected to a servo motor via a flexible coupling. Radius and maximum frequency of the circular vibration are set to 0.5 mm and 167 Hz respectively. The developed machine is evaluated by measuring accuracy and stiffness of the rotating and vibrating spindle. The developed machine is applied here to &quot;elliptical vibration planing&quot; of hardened steel by clamping the tool spindle, though it can also be applied to &quot;elliptical vibration milling&quot; by rotating the inner tool spindle at the same time. The &quot;elliptical vibration planing&quot; is conducted with a CBN tool, and the results show that the present method is better than conventional ball end milling in all aspects of tool life and cost, surface roughness, cutting time and cutting force. Furthermore, a hardened steel mirrow with roughness of about 0.1μm Ra is obtained by the elliptical vibration planing with a single crystal diamond tool.

    DOI: 10.2493/jjspe.69.542

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  • Ultraprecision Ductile Machining of Single Crystal Materials by Applying Ultrasonic Elliptical Vibration Cutting

    Shamoto Eiji, Suzuki Norikazu, Masuda Shinsuke

    Proceedings of JSPE Semestrial Meeting   2003   419 - 419   2003

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    Publisher:The Japan Society for Precision Engineering  

    単結晶フッ化カルシウム(CaF2)は切削による延性モード加工が困難であるため,通常はポリシングにより加工されることが多い.本研究では切削性能の向上を目的として考案されている楕円振動切削加工を適用することにより単結晶材料の延性モード切削を試みた.&lt;br&gt;基礎的な溝加工実験により超音波楕円振動付加による影響の評価を行った.その結果,楕円振動切削を用いることで大幅に臨界切込み量が増大することがわかった.

    DOI: 10.11522/pscjspe.2003A.0.419.0

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  • Study on three dimensional cutting mechanics : Machining with two cutting edges

    SHAMOTO Eiji, OYABA Mitsuru, SUZUKI Norikazu

    The Proceedings of Conference of Tokai Branch   2003   213 - 214   2003

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  • Ultraprecision micromachining of hardened steel by applying ultrasonic elliptical vibration cutting Reviewed

    Norikazu Suzuki, Akihiro Nakamura, Eiji Shamoto, Kazuhiro Harada, Makoto Matsuo, Michio Osada

    MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science   221 - 226   2003

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    Utraprecision micromachining of hardened steel with a single point diamond tool, which is practically impossible due to rapid tool wear, is realized by applying 'Elliptical Vibration Cutting technology, which has been developed by the authors. A practical ultrasonic elliptical vibration cutting system is developed in the present research, which consists of a practical vibration control system and an ultraprecision planing machine. The control system is fabricated to keep the elliptical vibration to have a desired locus, where the amplitudes of the two directional vibrations and their phase shift are kept to be desired values, and the vibration frequency is locked to an average value of their resonant frequencies. The vibration control system is mounted on the ultraprecision planing machine, which consists of three feed tables with double hydrostatic oil guideways in XVZ axes, two rotary index tables in BC axes and a five axis control system. The developed elliptical vibration cutting system is applied to ultraprecision diamond planing of hardened die steel, and a high quality mirror surface is obtained over a targe area of the whole finished surface. Maximum roughness of the finished surface is less than 0.04 μm Ry, although the cutting distance reaches 1110 m. On the other hand, the surface finished by ordinary cutting without the vibration, is cloudy with maximum roughness of more than 0.52 μm Ry within a cutting distance of 1 m. Based on this advantage, the elliptical vibration cutting system is successfully applied to ultraprecision micromachining of dies for a front light panel of LCD. An optical quality surface with fine microgrooves over a Urge area of 122 x 91 mm2 and with surface roughness of less than 0.04 μm Ry is obtained by the developed system, which is difficult for any conventional machining methods including grinding, polishing and ordinary cutting.

    DOI: 10.1109/MHS.2003.1249936

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  • 画像を用いたCMP研磨パッド表面状態の定量的評価方法

    小島 弘之, 鈴木 教和, 廣瀬 丈師, 西口 隆

    精密工学会大会学術講演会講演論文集   2002 ( 2 )   477 - 477   2002.10

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    CMPプロセスにおける研磨パッドの表面状態は研磨レート等の基本的な研磨特性に大きな影響を与える.研磨パッドの表面状態について,これまで筆者らは表面あらさを用いた評価を試みてきたが,測定箇所の発泡状態等により測定結果が大きくばらつき,研磨特性との相関を明瞭とするために多量の測定を要する問題があった.そこで本研究では,研磨パッドの損耗に伴うパッド表面の平滑化に着目し,研磨パッド表面の画像から平滑化の度合いを算出する簡便な研磨パッド表面状態の評価方法について検討を行った.実験の結果、本測定法は研磨パッドの表面あらさRaによる評価と比較して研磨パッド表面状態を精度良く評価できることが判った.

    DOI: 10.11522/pscjspe.2002A.0.477.0

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  • Development of ultrasonic elliptical vibration controller for elliptical vibration cutting Reviewed

    E. Shamoto, N. Suzuki, T. Moriwaki, Y. Naoi

    CIRP Annals - Manufacturing Technology   51 ( 1 )   327 - 330   2002

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    A new ultrasonic vibration controller is elaborated for ultrasonic elliptical vibration cutting. A method is developed to remove cross talks between the two directional vibrations of the stepped vibrator excited in the same bending mode in two directions, so that the two directional vibrations can be controlled independently. A controller is fabricated to keep the elliptical vibration to have a desired locus, where the amplitudes of the two directional vibrations and their phase shift are kept to be desired values, and the vibration frequency is locked to an average value of their resonant frequencies. The developed vibration control system is applied to ultraprecision diamond turning of hardened die steel, and an ultraprecise mirror surface with a shape accuracy of less than 0.2 μm is obtained.

    DOI: 10.1016/S0007-8506(07)61528-5

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  • Elliptical Vibration Cutting (4th Report) : Development of Tool Vibration Control System and Its Application to Ultraprecision Cutting Reviewed

    SHAMOTO Eiji, SUZUKI Norikazu, MORIWAKI Toshimichi, NAOI Yoshikazu

    Journal of the Japan Society of Precision Engineering   67 ( 11 )   1871 - 1877   2001.11

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    A new tool vibration system is developed for the ultrasonic elliptical vibration cutting, and it is applied to ultraprecision cutting of hardened steel in the present research. A method and a device to remove crosstalks between the two directional vibrations are developed, so that the two directional vibrations can be controlled independently. Then, a controller is developed to keep the elliptical vibration to have a desired locus, where the amplitudes of the two directional vibrations, phase shift between them are kept to be desired values and the vibration frequency is locked to an average of their resonant frequencies. The developed vibration control system is applied to ultraprecision diamond turning of hardened steel, and an ultraprecise steel mirror with a shape accuracy of about 0.1μm is achieved.

    DOI: 10.2493/jjspe.67.1871

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  • Study on Ultrasonic Elliptical Vibration Cutting : Development of Vibration Control System and its Application to Machining

    SHAMOTO Eiji, SUZUKI Norikazu, IENAGA Ken, NAOI Yoshikazu, MORIWAKI Toshimichi

    The Proceedings of The Manufacturing & Machine Tool Conference   2000   185 - 186   2000

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    A new system is developed to control the ultrasonic elliptical vibration applied to the cutting tool, and it is applied to the ultraprecision elliptical vibration cutting of hardened stainless steel in the present research. Steady feedback control of the vibration locus is realized by developing a cross talk remover, which eliminates interference between the two directional vibrations. The controller keeps the vibration amplitudes and the phase difference between the two vibrations to be desired values and to chase the average resonant frequency of the vibrations simultaneously. The machining experiments show that shape accuracy and roughness of the finished surface are improved significantly by applying the developed system.

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Books

  • 次世代半導体用の難加工結晶材料のための超精密加工技術 - SiC、GaN、AlN、Ga2O3、ダイヤモンド -

    ( Role: Joint author第7章 加工メカニズム解明に向けた取り組み,第6節 pp41-50)

    2024.4  ( ISBN:9784905507710

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  • Advanced applications of elliptical vibration cutting in micro/nanomachining of difficult-to-cut materials in "Simulation and Experiments of Material-Oriented Ultra-Precision Machining"

    Jianguo Zhang, Norikazu Suzuki, Eiji Shamoto( Role: Contributor)

    Springer Nature Singapore Pte Ltd.  2018.12 

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    Responsible for pages:167-200   Language:English   Book type:Scholarly book

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  • 超音波振動切削 in ”鉄の事典 13.3 切る・削る・接合する 13.3.4.e”

    社本英二, 鈴木教和( Role: Contributor)

    朝倉書店  2014.12 

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    Total pages:820   Language:Japanese   Book type:Scholarly book

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  • Ultrasonic Vibration Diamond Cutting and Ultrasonic Elliptical Vibration Cutting in "Comprehensive Materials Processing"

    Shamoto, E, Suzuki, N( Role: ContributorVolume 11: Advanced Machining Technologies, 11.16)

    Science Direct  2014 

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    Responsible for pages:405-454   Language:English   Book type:Scholarly book

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  • 超精密楕円振動切削加工法による光学ガラスレンズの金型加工 in "「光学ガラスレンズの設計・成形加工ノウハウ集」 第3章ガラスレンズ金型の加工方法およびコーティング技術 第1節"

    社本英二, 鈴木教和( Role: Contributor)

    技術情報協会  2007.1  ( ISBN:4861041325

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MISC

  • 中央大学 デジタル生産工学研究室 Invited

    鈴木教和

    砥粒加工学会誌   66 ( 4 )   202 - 202   2022.4

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  • DX時代の工作機械とスマートファクトリー Invited

    鈴木教和

    日刊工業新聞   28 - 28   2022.3

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  • 精密工学会アフィリエイト 精密工学会アフィリエイト委員会インタビュー(第1回)

    道畑 正岐, 鈴木 教和, 柿沼 康弘, 伊東 聡, 橋本 洋平, 杉原 達哉

    精密工学会誌 = Journal of the Japan Society for Precision Engineering   84 ( 4 )   331 - 334   2018.4

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  • 切削加工の見える化とセンサデータ応用技術 (特集 IoT時代の機械加工の見える化と加工状態モニタリング技術の進化)

    鈴木 教和

    機械技術 = Mechanical engineering   66 ( 1 )   21 - 24   2018.1

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  • Development of Accurate Prediction Technology of Material Removal Rate Distribution in Planarization CMP

    SUZUKI Norikazu, HASHIMOTO Yohei

    Journal of the Japan Society for Precision Engineering   84 ( 3 )   221 - 224   2018

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    DOI: 10.2493/jjspe.84.221

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  • Chatter Vibration in Cutting

    SUZUKI Norikazu

    JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS   61 ( 7 )   457 - 462   2016

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    Language:Japanese   Publisher:Japanese Society of Tribologists  

    DOI: 10.18914/tribologist.61.7_457

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  • 1706Estimation of transfer function of flexible mechanical structures by utilizing cutting force model and observer technique

    SUZUKI Norikazu, IKEDA Ryosuke, SANO Kenji, SHAMOTO Eiji

    Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21   2015 ( 8 )   "1706 - 1"-"1706-3"   2015.10

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    This study presents a novel method to estimate transfer function of flexible mechanical structures mounted on a traveling stage by utilizing only internal information of computerized numerical control (CNC) system. Disturbance force input to CNC is estimated by observer technique and cutting force is estimated based on cutting force model. Analyzing both the forces, frequency response function (FRF) of the mechanical structure is estimated by the proposed method. Assuming a simple dynamic model of the mechanical structure, modal parameters representing the dynamic characteristics of the structure are also identified. Experimental results of a face turning test indicated that the transfer function can be estimated accurately by the proposed method.

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  • Observer, machine technologies and applied technology utilizing cutting theory for intelligent machine tools and manufacturing

    吉岡 勇人, 柿沼 康弘, 鈴木 教和

    砥粒加工学会誌   59 ( 9 )   502 - 507   2015.9

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  • Ultra-precision micro machining of sintered tungsten carbide by applying elliptical vibration cutting technology

    鈴木 教和

    砥粒加工学会誌   59 ( 8 )   445 - 448   2015.8

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  • B11 Micro/nano machining of hardened steel with nano-accuracy by amplitude control sculpturing method in elliptical vibration cutting

    Suzuki Norikazu, Zhang Jianguo, Shamoto Eiji

    The ... Manufacturing & Machine Tool Conference   2014 ( 10 )   85 - 86   2014.11

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    This study presents the micro-/nano-structure machining of hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this method, machinable part geometry is essentially restricted by vibration/machining conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, experimental investigations are conducted. By applying the proposed method, highly accurate machining of the sinusoidal sweep structure is attained with a machining error of less than 20 nm. The proposed sculpturing method is subsequently applied to the machining of a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method.

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  • 精密工学会アフィリエイト 博士論文 難削材料の楕円振動切削に関する研究

    鈴木 教和

    精密工学会誌   79 ( 5 )   413 - 418   2013.5

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    Language:Japanese   Publisher:精密工学会 ; 1986-  

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  • 切削加工におけるびびり振動の現象理解と安定性解析 (特集 機械加工における「びびり振動」と抑制技術)

    鈴木 教和

    機械技術   61 ( 5 )   14 - 17   2013.5

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  • 超音波楕円振動切削の基礎と高硬度材料の超精密・微細加工 (特集 超音波振動による超精密・微細加工の実用化技術をさぐる)

    社本 英二, 鈴木 教和

    機械技術   61 ( 3 )   26 - 29   2013.3

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  • 精密工学会アフィリエイト アフィリエイト通信 : アフィリエイト留学記 ブリティッシュコロンビア大学での在外研究体験

    鈴木 教和

    精密工学会誌   79 ( 2 )   154 - 157   2013.2

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  • Internatioual Conference Report

    鈴木 教和

    Journal of the Japan Society for Precision Engineering   79 ( 9 )   879 - 879   2013

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    DOI: 10.2493/jjspe.79.879

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  • 第8回国際マイクロ生産技術会議 (ICOMM2013)

    鈴木 教和

    精密工学会誌   79 ( 6 )   571 - 571   2013

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    DOI: 10.2493/jjspe.79.571

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  • Gravure & Interview : FUJIMI INCORPORATED

    MORINAGA Hitoshi

    Journal of the Japan Society for Precision Engineering   78 ( 11 )   919 - 922   2012

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    DOI: 10.2493/jjspe.78.919

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  • Preface

    Eiji Shamoto, Norikazu Suzuki, Burak Sencer

    Procedia CIRP   4   1   2012

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    Language:English   Publisher:Elsevier B.V.  

    DOI: 10.1016/j.procir.2012.10.001

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  • Development of Mass-Producible Rapid Mixer Based on Baker’s Transformation

    尾本悠輔, 加藤大香士, 鈴木教和, 安井隆雄, 大里恵子, 加地範匡, 渡慶次学, 馬場嘉信, 酒井康彦, 社本英二

    日本機械学会論文集 B編(Web)   78 ( 788 )   2012

  • 568 Study on Cutting of Difficult-to-Cut Materials with Rotary Tools

    AN Ran, SUZUKI Norikazu, SHAMOTO Eiji, UKAI Kota, YOSHIDA Hiroyuki

    2011 ( 60 )   "568 - 1"-"568-2"   2011.3

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    Rotary cutting process is modeled and its cutting performances are discussed in the present study. Actively or passively driven rotary cutting can be equivalent to oblique cutting. Assuming bearing resistance is negligible, passively driven rotary cutting can be further simplified as orthogonal cutting. Rotary milling tool is developed and applied to face milling tests of Inconel 718. Comparing with the conventional milling, experimental results indicated the feasibility of higher performance machining of Inconel 718 by the rotary tool.

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  • 16・2 切削加工(16.加工学・加工機器,<特集>機械工学年鑑)

    鈴木 教和

    日本機械学会誌   114 ( 1113 )   620 - 620   2011

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    Language:Japanese   Publisher:一般社団法人 日本機械学会  

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  • Analysis technology for CMP process

    SUZUKI Norikazu

    Journal of the Japan Society for Abrasive Technology   54 ( 11 )   640 - 643   2010.11

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  • Ultraprecision/micro machining of difficult-to-machine materials by ultrasonic elliptical vibration cutting

    SHAMOTO Eiji, SUZUKI Norikazu

    Journal of the Japan Society for Abrasive Technology   54 ( 11 )   636 - 639   2010.11

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  • 楕円振動切削による超精密微細形状加工 (特集 最先端製品の開発を支える微細精密加工技術)

    社本 英二, 鈴木 教和

    機械技術   58 ( 5 )   23 - 26   2010.5

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  • Chatter Vibration in Cutting, Part 1

    SUZUKI Norikazu

    Journal of the Japan Society for Precision Engineering   76 ( 3 )   280 - 284   2010

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    Publisher:The Japan Society for Precision Engineering  

    DOI: 10.2493/jjspe.76.280

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  • Chatter Vibration in Cutting, Part 2

    SUZUKI Norikazu

    Journal of the Japan Society for Precision Engineering   76 ( 4 )   404 - 408   2010

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    DOI: 10.2493/jjspe.76.404

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  • D20 Effect of Cross Transfer Function on Chatter Stability in Plunge Cutting(Analytical advancement of machining process)

    SUZUKI Norikazu, NISHIMURA Kohei, SHAMOTO Eiji, YOSHINO Kiyoshi

    Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21   2009 ( 5 )   501 - 505   2009.12

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    An accurate analytical model for the regenerative chatter vibration in the plunge cutting is proposed in the present research. Effects of the cross transfer function and the cutting force ratio on the chatter stability are considered in the proposed model. Equivalent transfer function is defined, which is useful to understand those effects on the chatter stability. It is verified experimentaly that the chatter stability limits can be predicted accurately by the proposed model as compared with the conventional model.

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  • Ultra-Precision Machining by Applying Elliptical Vibration Cutting

    SUZUKI Norikazu, SHAMOTO Eiji

    Journal of the Society of Mechanical Engineers   112 ( 1090 )   732 - 733   2009

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  • Ductile machining of tungsten alloy molds for optical glass parts by applying elliptical vibration cutting

    SUZUKI Norikazu, SHAMOTO Eiji

    Journal of the Japan Society for Abrasive Technology   52 ( 11 )   630 - 633   2008.11

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  • 超音波加工 自由曲面金型の鏡面切削を実現する3自由度超音波楕円振動工具の開発

    鈴木 教和, 社本 英二

    超音波techno   20 ( 5 )   101 - 105   2008.9

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  • タングステン合金の超音波楕円振動切削--超精密・微細金型の製作と光学ガラスの成形 (特集 さまざまな場面で使用される超音波加工)

    鈴木 教和, 社本 英二

    超音波techno   19 ( 6 )   20 - 24   2007.11

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  • 3次元構造を利用したマイクロミキサー

    大里恵子, 渡慶次学, 渡慶次学, 加地範匡, 加地範匡, 尾本悠輔, 鈴木教和, 酒井康彦, 社本英二, 馬場嘉信, 馬場嘉信, 馬場嘉信, 馬場嘉信, 馬場嘉信

    化学とマイクロ・ナノシステム研究会講演要旨集   15th   2007

  • 超音波加工 超音波楕円振動切削技術の実用化--超音波楕円振動制御システムの開発と超精密切削への適用

    鈴木 教和, 社本 英二

    超音波techno   18 ( 4 )   87 - 91   2006.7

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  • Ultraprecision Cutting by Applying Elliptical Vibration(<Special Issue>Latest Advances in Ultraprecision Machining Systems)

    SHAMOTO Eiji, SUZUKI Norikazu

    Journal of the Japan Society of Precision Engineering   72 ( 4 )   440 - 443   2006.4

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    DOI: 10.2493/jjspe.72.440

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  • 楕円振動切削による硬脆材料の超精密微細溝加工 (特集 難加工への挑戦--高難易度加工&難削材切削加工技術)

    鈴木 教和, 社本 英二

    機械技術   53 ( 12 )   24 - 27   2005.12

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  • 楕円振動切削加工法による超精密・微細金型加工技術 (特集 小物・精密・高付加価値金型の加工技術)

    社本 英二, 鈴木 教和

    機械技術   52 ( 13 )   23 - 27   2004.12

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  • 高硬度金型の超精密微細加工を実現する楕円振動切削加工技術の開発 (特集 中小企業が切り拓く先端的型技術--折り返しを迎えた戦略的基盤技術力強化事業) -- (超微細・精密・複雑構造部品成形加工金型技術)

    社本 英二, 鈴木 教和, 浜田 晴司

    型技術   19 ( 12 )   55 - 58   2004.11

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  • 画像を用いたCMP研磨パッド表面状態の定量的評価方法

    小島 弘之, 鈴木 教和, 廣瀬 丈師, 西口 隆

    精密工学会大会学術講演会講演論文集   2002 ( 2 )   414 - 414   2002.10

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Presentations

  • Experimental Verification of Fast Parameter Identification Method Utilizing Instantaneous Spindle Speed Variation in End Milling

    Hideyuki Fujii, Norikazu Suzuki

    The 25th International Symposium on Advances in Abrasive Technology (ISAAT2023)  2023.12 

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  • Experimental Verification of Model-based CMP Process Simulation Considering Distribution of Material Removal Efficiency

    Kodai Hirano, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

    The 25th International Symposium on Advances in Abrasive Technology (ISAAT2023)  2023.12 

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    Event date: 2023.12    

    Presentation type:Poster presentation  

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  • 精密切削のDX化を支えるデジタルツイン技術の最前線 Invited

    鈴木教和

    精密加工研究会 第115回例会  2023.12 

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    Event date: 2023.12    

    Presentation type:Oral presentation (invited, special)  

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  • Simulation of CMP abrasive behavior considering pad surface topography

    Taku Ishihara, Akihito Hashimoto, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

    The International Conference on Planarization Technology (ICPT 2023)  2023.10 

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    Event date: 2023.10 - 2023.11

    Presentation type:Poster presentation  

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  • Surface integrity estimation in end milling by utilizing model-based inverse analysis of cutting force Invited

    Norikazu Suzuki

    International Symposium on Upcoming Prominent Engineering solutions (ISUPEN2023)  2023.9 

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    Event date: 2023.9    

    Presentation type:Oral presentation (invited, special)  

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  • CMP process modeling and its digital twin technology

    Norikazu Suzuki

    CIRP-2023- “MTSM”- 1, Collaborative Working Group on Semiconductor and Microelectronic Manufacturing  2023.8 

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    Event date: 2023.8    

    Presentation type:Oral presentation (general)  

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  • Influence of Vibration Conditions on Tool Life in Low-Frequency Vibration Cutting of Difficult-to-Cut Materials

    Yukio Takahashi, Genki Murata, Hiroto Teratani, Norikazu Suzuki

    the international Conference on Leading Edge Manufacturing/Materials & Processing (LEM&P 2023)  2023.6 

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    Event date: 2023.6    

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  • Advanced simulation technology for next generation CMP Invited

    Norikazu Suzuki

    The 4th Science Salon - Next Generation Green Power Technology  2023.3 

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    Event date: 2023.3    

    Language:English   Presentation type:Oral presentation (invited, special)  

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  • Estimation of hardness and residual stress on the end milled surface by linear regression model

    Hideyuki FUJII, Yukio TAKAHASHI, Reo YANO, Norikazu SUZUKI, Yuki YAMADA, Yasuhiro IMABEPPU, Naruhiro IRINO

    Proceedings of 19th International Conference on Precision Engineering (ICPE2022), C307, (Nov. 28 - Dec. 2, 2022, Nara, Japan)  2022.11 

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    Event date: 2022.11 - 2022.12

    Language:English   Presentation type:Oral presentation (general)  

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  • High efficient machining condition prediction model by machine learning of real and simulated cutting data

    Kengo KAWAI, Naruhiro IIRINO, Hajime MIZUYAMA, Atsushi MATSUBARA, Norikazu SUZUKI, Yasuhiro IMABEPPU, Yuta SHINBA

    Proceedings of 19th International Conference on Precision Engineering (ICPE2022), C218, (Nov. 28 - Dec. 2, 2022, Nara, Japan)  2022.11 

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    Event date: 2022.11 - 2022.12

    Language:English   Presentation type:Oral presentation (general)  

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  • Experimental investigation on modified Preston model by utilizing stop polishing method

    Takumi Sato, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

    The International Conference on Planarization Technology (ICPT 2022)  2022.9 

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    Event date: 2022.9    

    Language:English   Presentation type:Oral presentation (general)  

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  • State estimation of CMP process using model-based simulation

    Kodai Hirano, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

    The International Conference on Planarization Technology (ICPT 2022)  2022.9 

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    Event date: 2022.9    

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  • TIME DOMAIN SIMULATION OF TURNING OPERATIONS WITH FLANK TEXTURED TOOL International conference

    Norikazu Suzuki, Tsubasa Fujinaka, Yuya Yokokawa

    The ASME 2022 17th International manufacturing Science and Engineering Conference, MSEC2022  ( Purdue University, Indiana, US )   2022.6  ASME

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  • 切削加工のびびり振動や知能化技術 Invited

    鈴木教和

    第8回生産加工部門委員会 「話題提供」  2022.1  自動車技術会 生産加工部門委員会

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    Language:Japanese   Presentation type:Oral presentation (invited, special)  

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  • Time domain simulation of turning process considering amplitude-dependency in process damping International conference

    Tsubasa Fujinaka, Norikazu Suzuki, Tomoki Nakanomiya, Eiji Shamoto

    The 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century (LEM21)  ( Kitakyushu (on demand) )   2021.11  日本機械学会

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  • Analytical study on identification of milling simulation parameters by utilizing spindle speed variation method International conference

    Satoshi MIWA, Norikazu SUZUKI, Kazuki TAKAHEI, Eiji SHAMOTO

    The 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century (LEM21)  ( Kitakyushu (on demand) )   2021.11  日本機械学会

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  • びびり振動の解析と抑制 Invited

    鈴木教和

    切削加工の基礎・応用・実践講座「難削材加工とデジタル化にむけた切削の基礎から実践まで」 第2回【高能率・高品位加工に向けた切削の応用から実践】  ( Web )   2021.10  精密工学会 切削加工専門委員会

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    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

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  • 研磨プロセスのスマート化を支えるモデルベースシミュレーション Invited

    鈴木教和

    第20回研究会 -研磨のモデリング・シミュレーション・挙動評価と産業展開-  2021.7  KENMA研究会

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  • Time domain simulation of dynamic corner milling process considering chatter vibration with finite amplitude International conference

    Norikazu Suzuki, Hiroki Hayashi, Eiji Shamoto, Naruhiro Irino, Yasuhiro Imabeppu

    The ASME 2021 16th International manufacturing Science and Engineering Conference, MSEC2021  ( on demand )   2021.6  ASME

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  • 動的切削プロセスのモデルベースシミュレーションとびびり振動の回避

    鈴木教和

    令和3年度地区部会大会 第1回研究会「北陸信越支部の大学・公設試験場による新技術発信と精密加工技術の勘どころ」  2021.6  砥粒加工学会 北陸信越地区部会

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  • Development of Cyber-Physical-System for CMP process utilizing model-based simulation Invited

    Norikazu Suzuki

    The 6th Ebara Open Innovation Symposium on CMP  2021.6  Ebara Corporation

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  • Development of a milling technology with SPRT for Ni-base super alloy

    Kato Yuya, Suzuki Norikazu, Shamoto Eiji, Naiki Yukio, Takagi Yuji

    Proceedings of JSPE Semestrial Meeting  2018  The Japan Society for Precision Engineering

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    Event date: 2018    

    Language:Japanese  

    &lt;p&gt;Ni基耐熱合金に対して従動式ロータリ機構を備えたミーリング工具による正面フライスを実施し,その実用性について検討を行った.実験の結果,回転運動を伴わない通常切削に対して約12倍の工具寿命延長効果が確認された.また,切削シミュレーションを援用したプロセスの見える化技術を開発し,その分析を行った.諸検討により,ランピング加工においてランピング角の制約が厳しいことが明らかとなり,その解決手法を提案した.&lt;/p&gt;

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  • Primary study on post-processing technology utilizing machining process for additive manufacturing

    Ohba Takayuki, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2018  The Japan Society for Precision Engineering

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    Event date: 2018    

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    &lt;p&gt;3Dプリンタの普及に伴い,3次元積層造形構造の利用が急速に進められている.造形技術が急速に発展した一方で,その表面に形成される積層段差の後処理技術に関しては,自動化技術が確立されていない.本研究では,3次元積層造形構造の表面除去加工における自動化技術について検討を行った.汎用工作機械に,柔軟な治具をかいして工作物を固定し,研削と研磨による定圧加工を行うことで,自動化の可能性があることを明らかにした.&lt;/p&gt;

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  • Intelligent process identification by utilizing disturbance force estimation and cutting simulation in milling process

    Ikeda Ryosuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2017  The Japan Society for Precision Engineering

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    Event date: 2017    

    Language:Japanese  

    著者らは,モデルベースシミュレーションを利用して,構造物の動特性や切削プロセスを代表するパラメータの新しい同定手法を提案している.本稿では,一般的なミリング様式のプロセスをモデル化し,構造物の動的挙動と加工プロセスを推定する時間領域シミュレータを開発した.さらに,パラメータ同定アルゴリズムを考案した.シミュレーションによる検証を通じて,提案手法により知的なプロセス同定を実現し得ることを確認した.

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  • Textures on flank face to attainchatter suppression in cutting

    Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2017  The Japan Society for Precision Engineering

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    Event date: 2017    

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    切削加工においては,低速度条件でびびり振動の安定性が向上することが知られている.これはプロセスダンピングと呼ばれる工具逃げ面と被削材が接触して振動を減衰する現象が発現するためである.本研究では,プロセスダンピングを効果的に利用することが可能な逃げ面テクスチャを提案する.切削シミュレーションに基づく簡易的な形状設計手法について解説するとともに,検証実験を通じて提案手法の効果を明らかにする.

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  • 切削加工におけるびびり振動の安定性を向上するロバストな再生振動相殺技術(キーノートスピーチ)

    鈴木 教和

    精密工学会学術講演会講演論文集  2017  公益社団法人 精密工学会

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    Event date: 2017    

    Language:Japanese  

    切削加工における高能率化を実現する上でびびり振動対策は極めて重要である.不等ピッチ・不等リード工具は,不安定化を引き起こす再生振動の抑制に効果的に利用することができる.本稿では,びびり振動の周波数および軸方向切込み条件に対して高いロバスト性を満たす,実用的な工具設計理論を紹介する.さらに,再生効果抑制理論を応用したインデクサブルカッタの設計法およびパラレールターニングの研究事例を紹介する.

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  • Intelligent identification of milling process by utilizing disturbance force estimation based on multi-inertial model of ball-screw drive system and cutting simulation

    Ohno Shoya, Suzuki Norikazu, Shamoto Eiji, Ikeda Ryosuke, Takahei Kazuki, Fujita Tomoya

    Proceedings of JSPE Semestrial Meeting  2017  The Japan Society for Precision Engineering

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    Event date: 2017    

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    モデルベースシミュレーションを利用して,構造物の動特性や切削プロセスのパラメータを同定する手法が提案されている.本稿では,ボールねじ駆動系の多慣性モデルを考慮したCNC工作機械の外乱オブザーバを検討した.これをすでに提案されているプロセス同定システムに適用し,汎用的な工作機械を対象とした知的同定の実行可能性について検討を行った.検証実験の結果,ミリングプロセスの同定を概ね実現し得ることを確認した.

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  • Suppression of chatter vibration using parallel turning assisted with swing motion

    OKUMA Toshiki, SAKATA Shinya, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, SUZUKI Norikazu, KAKINUMA Yasuhiro

    The Proceedings of Mechanical Engineering Congress, Japan  2017  The Japan Society of Mechanical Engineers

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    Event date: 2017    

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    &lt;p&gt;Multi-tasking machine tools attract attention, because they can perform highly efficient machining by using multiple tools. Parallel turning with two tools can realize high material removal rate and the productivity is remarkably improved when appropriate cutting condition is selected. On the other hand, compared to turning with a single tool, the stability of the process reduces, and chatter vibration tends to occur. Chatter vibration does not only limit productivity but also cause poor surface and dimensional accuracy. In this research, to suppress chatter vibration in parallel turning, we propose swing motion assisted parallel turning with an optimum amplitude ratio, calculated from chatter frequency and spindle speed. The proposed method aims to suppress chatter vibration by giving variations in phase delay due to high speed swing of tool. Chatter frequency is measured from estimated cutting force applying disturbance observer. The result of swing motion assisted turning test indicates that chatter vibration can be suppressed by dynamically changing cutting point based on the optimum amplitude ratio.&lt;/p&gt;

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  • Analysis of dynamic material properties based on asperity model of polishing pad surfaces

    Oshika Shingo, Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2016  The Japan Society for Precision Engineering

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    Event date: 2016    

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    研磨パッド表面に存在する凹凸構造は研磨効率に直接的に影響するため,その分析は研磨メカニズムを理解する上で重要である.本研究では,研磨パッドの表面アスペリティを楕円球と楕円錐の集合体としてモデル化し,状測定結果から研磨に作用すると考えられる箇所の形状パラメータを同定する手法を考案した.さらに,弾性変形を仮定した力学モデルを定式化し,動的圧縮試験の結果から,材料物性パラメータについて分析を行った.

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  • A novel in-situ observation of local polishing efficiency by utilizing heat measurement

    Misono Hirotaka, Suzuki Norikazu, Oshika Shingo, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2016  The Japan Society for Precision Engineering

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    Event date: 2016    

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    研磨プロセスのミクロな材料除去メカニズムを説明可能な理論は確立されていない.これが研磨効率の推定を困難にし,効率的なプロセス開発の妨げとなっている.本研究では,研磨効率のその場観察手法を提案する.材料除去に起因する赤外線をウェハ越しに観察することで,研磨中の局所的な材料除去の発生個所を特定する.表面凹凸が制御された織布パッドによる検証実験を実施し,ミクロな材料除去メカニズムについて考察を行った.

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  • Primitive study on cutting force model considering chatter vibration with finite vibration amplitude

    Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2016  The Japan Society for Precision Engineering

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    Event date: 2016    

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    低切削速度条件ではプロセスダンピングという現象が発現してびびり振動の安定性が向上する.多くのモデルが提案されてきたが,その現象の詳細なメカニズムは不明であり,切削力モデルも検証されていない.そこで,本研究では,低速領域でびびり振動が発生する場合の切削現象について検討を行う.有限の振動変位を持つびびり振動が発生する場合の新しい切削力モデルを提案し,有限要素解析による検討を通じてその検証を行う.

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  • Semidiscrete time domain solution of cutting process using variable helix end mills

    Ishiguro Rikiya, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2016  The Japan Society for Precision Engineering

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    Event date: 2016    

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    不等リードエンドミルを用いて浅切込み加工を行う場合に,びびり振動を効果的に抑制することができる.しかし,このプロセスでは切削の断続性に起因して,高精度な安定性解析が難しいことが知られている.このような時間遅れを伴う常微分方程式の解法としてSemidiscrete method(SD法)が提案されている.本研究では,不等リードエンドミルを用いるプロセスに対応したSD法を提案し,先行研究の解析モデルとの比較による検証を行った.

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  • Model-based process identification by utilizing disturbance force estimation against servo system and cutting simulation

    Ikeda Ryousuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2016  The Japan Society for Precision Engineering

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    Event date: 2016    

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    本研究では,外乱力の推定結果に基づいてモデルベースで動的切削プロセスのパラメータ同定を行う新しい手法を提案する.まず,加工に用いる機械構造の動剛性モデルと再生効果を含めた切削プロセスモデル,および各モデルに基づく時間領域シミュレータを開発する.加工中にCNC制御系に作用する外乱力の推定値から,逆解析を行うことでプロセスモデルのパラメータ同定を行う.断続切削実験により,提案手法の実現可能性を確認する.

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  • Suppression of chatter vibration by unequal pitch turning applying estimated cutting force

    KADOTA Takashi, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, YOSHIOKA Hayato, SUZUKI Norikazu, KAKINUMA Yasuhiro

    The Proceedings of The Manufacturing & Machine Tool Conference  2016  The Japan Society of Mechanical Engineers

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    Event date: 2016    

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    &lt;p&gt;Multi-tasking machine tool with multi-turret is attracting a great deal of attention, which can offer higher efficiency and higher accuracy. However, chatter vibration generated during parallel turning with two tools might be one of the bottlenecks for higher material removal rate. To suppress chatter vibration, we proposed unequal pitch turning method in this research. In this method, the upper tool was properly controlled based on optimum pitch angle calculated from spindle speed and chatter frequency. Chatter frequency was identified from estimated cutting force by disturbance observer. From the result of parallel turning test, it is clear that chatter vibration can be suppressed by controlling the upper tool based on optimum pitch angle.&lt;/p&gt;

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  • Development of a milling cutter with SPRT for difficult-to-cut materials machining

    KATO Yuya, SUZUKI Norikazu, SHAMOTO Eiji, NAIKI Yukio, TAKAGI Yuji

    The Proceedings of The Manufacturing & Machine Tool Conference  2016  The Japan Society of Mechanical Engineers

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    Event date: 2016    

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    &lt;p&gt;In order to improve milling performance of difficult-to-cut materials, a unique milling cutter with SPRT (Self-Propelled-Rotary-Tool) was developed. Use of slide bearings enables a compact SPRT mechanism, while influence of bearing friction becomes not negligible. To attain self-revolution of a circular insert regardless of the bearing friction, the cutter geometry was optimized. Through face milling experiments of Inconel 718, superior tool wear resistance was verified as compared to the conventional milling without insert rotation. Analytical result of the measured cutting forces also indicated interesting phenomena in SPRT milling.&lt;/p&gt;

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  • S1330102 Experimental Verification of Design Theory for End mills to Attain Robust Chatter Suppression

    ISHIGURO Rikiya, SUZUKI Norikazu, SHAMOTO Eiji

    The Proceedings of Mechanical Engineering Congress, Japan  2015  The Japan Society of Mechanical Engineers

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    Event date: 2015    

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    Chatter vibration in milling often results in poor surface finish and rapid tool wear, consequently limiting productivity. It is known that regenerative effect, which causes chatter vibration, can be suppressed by utilizing irregular pitch cutters. In order to attain robust regeneration suppression for arbitrary chatter frequency, the authors have proposed a novel design theory of irregular pitch cutters. The fundamental mechanism of it is the simultaneous suppression of multi-mode regenerations. In the present study, the effect on chatter suppression has been verified through a series of end milling experiment. Analytical and experimental results indicated that the chatter stability is effectively increased by utilizing the irregular pitch cutter designed by the proposed theory.

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  • Analysis on surface-asperity structure of polishing pad and investigation on its mechanical model

    Hashimoto Yohei, Oshika Shingo, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2015  The Japan Society for Precision Engineering

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    Event date: 2015    

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    研磨加工において,研磨パッド表面に存在する突起の構造とその微視的な変形挙動は,加工メカニズムを考察する上で重要となる.本研究では,レーザ顕微鏡を用いて研磨に使用した研磨パッド表面形状の評価観察を行い,突起構造の分析とモデル化について検討した.そして,突起構造の変形挙動を表現する新しい力学モデルの検討を行った.

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  • A new estimation method of transfer function of mechanical structures by utilizing internal information of CNC

    Ikeda Ryousuke, Suzuki Norikazu, Sano Kenji, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2015  The Japan Society for Precision Engineering

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    Event date: 2015    

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    機械構造の振動モデルを仮定し,切削力モデルと外乱オブザーバ技術を利用して切削力と外乱力を推定することで,工作機械の制御ループ外に存在する機械構造の伝達関数をCNCの内部情報のみから推定する新しい手法を提案する.剛性が低くなるように設計したツールホルダを超精密工作機械のテーブルに固定して断続的な旋削実験を行い,提案手法により周波数伝達関数の計測とモーダルパラメータの推定が可能であることを確認した.

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  • B11 Micro/nano machining of hardened steel with nano-accuracy by amplitude control sculpturing method in elliptical vibration cutting

    Suzuki Norikazu, Zhang Jianguo, Shamoto Eiji

    The Proceedings of The Manufacturing & Machine Tool Conference  2014  The Japan Society of Mechanical Engineers

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    Event date: 2014    

    Language:Japanese  

    This study presents the micro-/nano-structure machining of hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this method, machinable part geometry is essentially restricted by vibration/machining conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, experimental investigations are conducted. By applying the proposed method, highly accurate machining of the sinusoidal sweep structure is attained with a machining error of less than 20 nm. The proposed sculpturing method is subsequently applied to the machining of a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method.

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  • High Efficiency Elliptical Vibration Cutting of Steel using Large Nose Radius Single Crystal Diamond Tool

    Wang Yilong, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2014  The Japan Society for Precision Engineering

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    Event date: 2014    

    Language:Japanese  

    Thus far, Elliptical Vibration Cutting has shown its superior machining performance in steel machining by using which the diamond tool life can be significantly improved. However, this machining technology is currently limited to the relatively small-size workpiece machining due to the small feed rates. If it is used to machine large-size steel workpiece, the machining time and cumulative cutting distance (or tool wear) will be remarkably increased which in turn dramatically increase the machining cost and cycle time. In order to apply this emerging machining technology effectively in industrial application, Elliptical Vibration Cutting with large nose radius single crystal diamond tool was proposed in this paper. However, the minimum uncut chip thickness (under which the material is not sheared but ploughed), that due to the presence of the tool edge radius becomes a major challenge when the large nose radius diamond tool is employed. Therefore, the influence of the minimum uncut chip thickness on material removal behavior during diamond machining needs to be understood and implemented in models. In this paper a simple but practical analytical model was developed for the optimization of machining conditions to minimize ploughing effect. The analytical model was then validated in a qualitative manner with experimental tests using steel workpieces.

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  • Influence of process damping on chatter stability in turning operations

    Uchiyama Daisuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2014  The Japan Society for Precision Engineering

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    Event date: 2014    

    Language:Japanese  

    低切削速度領域においてプロセスダンピングと呼ばれる現象が発現し,びびり振動の安定性が向上することが知られている.多くの解析モデルがすでに提案されているのに対し,実験的なプロセスの評価は十分になされていない.本研究では,端面旋削実験により切削プロセスに対するプロセスダンピングの影響について評価を行う.さらに,材料物性と工具形状に基づきプロセスダンピングの影響を定量化する新しい解析モデルを提案する.

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  • Influence of various modelling on prediction accuracy in polishing pressure simulation

    Hashimoto Yohei, Suzuki Norikazu, Shen Yue, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2014  The Japan Society for Precision Engineering

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    Event date: 2014    

    Language:Japanese  

    著者らはこれまでに,CMPプロセスに対する研磨パッドの粘性特性と研磨パッド表面の凹凸形状による非線形弾性特性を考慮した解析手法を開発している.本報では,ジンバル方式の研磨ヘッド構造を利用するCMPプロセスを対象とした検討により,各種物性や形状のモデル化が研磨圧力シミュレーションの結果に与える影響について明らかにする.さらに,実験結果と比較することにより解析精度を検証する.

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  • Tool failure mechanism in high-speed ceramic milling of super alloys

    Suzuki Norikazu, Enmei Risa, Hashimoto Yohei, Shamoto Eiji, Hatano Yuki

    Proceedings of JSPE Semestrial Meeting  2014  The Japan Society for Precision Engineering

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    Event date: 2014    

    Language:Japanese  

    航空機部品等に用いる耐熱合金の加工では,セラミック工具を用いた高速ミーリングによる高能率加工が利用されている.しかし,工具損耗が激しく寿命が短いという問題があり,その改善が要求されている.本研究では,インコネル718の加工で摩耗した工具形状を評価し,これを考慮した切削力モデルを考案した.さらに,切削力測定結果との比較により工具表面に生じる応力場を推定し,特徴的な工具損耗メカニズムについて考察を行った.

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  • Design of variable helix cutters to suppress regeneration in end milling operations

    Suzuki Norikazu, Kojima Takuya, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2013  The Japan Society for Precision Engineering

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    Event date: 2013    

    Language:Japanese  

    切削加工において再生効果は自励びびり振動の安定性に大きく影響する.不等リードエンドミルはびびり振動の周波数や主軸回転数などの変化に対してロバストに再生効果を抑制することができる特徴を持つ.しかし,最適な工具形状を設計しなければ優れた抑制効果を実現することはできない.本研究では,再生効果の影響をロバストに抑制することのできる不等リードエンドミルの工具形状の新しい設計手法を提案する.

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  • EHL analysis of CMP process with airbag type polishing head

    Asaba Masakazu, Suzuki Norikazu, Shamoto Eiji, Yasuda Hozumi, Yamaki Satoru

    Proceedings of JSPE Semestrial Meeting  2013  The Japan Society for Precision Engineering

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    Event date: 2013    

    Language:Japanese  

    半導体CMPの量産工程で一般に用いられるエアーバッグ研磨ヘッド構造を考慮したCMPプロセスのEHL解析モデルを開発した.本研究では,研磨ヘッドの構造として,リテーナリングやメンブレンゴムを考慮するとともに,ウェハ等との接触問題を考慮する.また,ALE有限要素法を適用することで動的な問題を取り扱うとともに,研磨パッドの非線形粘弾性を同時に考慮することで,従来不可能であった実用的な研磨プロセスの解析の実現に挑戦する.

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  • Modeling and controller design of gantry type stage for suppressing torsional vibration of machine tools with low base stiffness

    Ishizaki Kosuke, Sencer Burak, Suzuki Norikazu, Shamoto Eji

    Proceedings of JSPE Semestrial Meeting  2013  The Japan Society for Precision Engineering

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    Event date: 2013    

    Language:Japanese  

    ベースの剛性不足に起因して機械構造全体で生じる低周波振動により,工作機械の制御系の性能が低下する問題がある.本研究では,問題となりやすいベースのねじり振動モードの影響を考慮したガントリーテーブルの制御システムをモデル化する.そして,ベースのねじれ振動を抑制する新しい補償器とその設計手法を提案する.実機を用いて検証を行い,提案手法によってねじり振動が効果的に抑制されることを確認した.

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  • Non-Contact On-Machine Measurement of Turning Accuracy by Utilizing Image Sensor - Development of measurement method for workpiece diameter -

    Asari Naohiro, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2013  The Japan Society for Precision Engineering

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    Event date: 2013    

    Language:Japanese  

    従来,旋削加工の高精度化のため,各種機上計測手法が実用に供されている.しかし,これらの従来手法では,工作物への接触や計測装置の大きさによって計測範囲や形状に制約が多い.そこで本研究では,工具をイメージセンサに取り換えて工作物を回転し,加工面の移動距離と回転角度から直径を計測することで,制約の少ない機上計測手法を提案・開発する.本報では,提案手法とその画像処理方法,計測の繰返し性等について報告する.

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  • Study on Milling of Difficult-to-Cut Materials with Self-Propelled Rotary Tools

    An Ran, Suzuki Norikazu, Shamoto Eiji, Ukai Kota, Hasegawa Yu, Yoshida Hiroyuki, Ishikawa Yoichi, Yamada Sachio

    Proceedings of JSPE Semestrial Meeting  2012  The Japan Society for Precision Engineering

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    Event date: 2012    

    Language:Japanese  

    インコネル等に代表される難削材の切削加工では,工具摩耗の抑制にロータリ切削が効果的であることが知られている.本研究では,傾斜切削理論に基づいたロータリ切削機構のモデル化を行う.さらに,その切削機構の特徴を示すとともに基礎的なロータリ切削実験による検証を行う.さらに,従動式ロータリ機構を適用したロータリミリング工具を試作し,インコネル718のロータリミリングにおける工具摩耗抑制効果について評価を行う.

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  • Study on Avoidance of Regenerative Chatter Vibration by Tool Path/Posture Optimization:- Proposal of Concept and Application to Turning Process -

    Shamoto Eiji, Fujimaki Shunsuke, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting  2012  The Japan Society for Precision Engineering

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    Event date: 2012    

    Language:Japanese  

    本研究では,工具軌跡/姿勢を最適化することで再生型びびり振動を回避する新たな手法を提案する.びびり振動安定性が主軸回転数や切込み量等の切削条件に依存することはよく知られているが,工具軌跡にも依存することはあまり知られていない.本稿では,旋削加工を例に,工具形状や切込み量,送り量を考慮した上で工具軌跡/姿勢を最適化するための簡易指標を示し,その指標の有用性を解析及び実験的に検証する.

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  • EHL Analysis of CMP process with consideration of dynamic contact problem of polishing pad with surface asperities

    鈴木 教和, 橋本 洋平, 浅羽 正和

    砥粒加工学会学術講演会講演論文集 ABTEC  2012  砥粒加工学会

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    Event date: 2012    

    Language:Japanese  

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  • Study on Fluid Bearing Utilizing Traveling Waves:-Development of Modular Piezoelectric Traveling-Wave Actuator and Precision Slider-

    Komatsu Hiroki, Kato Takashi, Sencer Burak, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2012  The Japan Society for Precision Engineering

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    Event date: 2012    

    Language:Japanese  

    本研究では,進行波を利用した新たな非接触流体軸受を提案している.本軸受は,軸受面上に発生させた進行波によって軸受中心に向かう力を流体に与えることで,軸受隙間内の圧力を上昇させ非接触支持を実現する.本報では,装置の製作性と性能を向上させるためにモジュール化した進行波圧電アクチュエータを開発し,そのアクチュエータを用いた軸受の開発・評価を行う.また本軸受を用いた精密スライダの開発を目指す.

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  • Novel Design Method of Irregular Pitch Tools for Simultaneous Suppression of Multi-Mode Regenerations

    Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2012  The Japan Society for Precision Engineering

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    Event date: 2012    

    Language:Japanese  

    切削加工における自励びびり振動は再生効果に強く依存する.不等ピッチ工具を用いて再生効果を抑制することで安定限界を効果的に向上することもできるが,その効果はピッチ角の設計に依存する.本研究では,エンドミル加工における再生効果の新しい定量化手法を提案するとともに,共振周波数の異なる複数の振動モードが存在する際に,それらの振動モードに対して同時に再生効果を打ち消す新しいピッチ角の設計手法を提案する.

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  • 568 Study on Cutting of Difficult-to-Cut Materials with Rotary Tools

    AN Ran, SUZUKI Norikazu, SHAMOTO Eiji, UKAI Kota, YOSHIDA Hiroyuki

    The Proceedings of Conference of Tokai Branch  2011  The Japan Society of Mechanical Engineers

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    Event date: 2011    

    Language:Japanese  

    Rotary cutting process is modeled and its cutting performances are discussed in the present study. Actively or passively driven rotary cutting can be equivalent to oblique cutting. Assuming bearing resistance is negligible, passively driven rotary cutting can be further simplified as orthogonal cutting. Rotary milling tool is developed and applied to face milling tests of Inconel 718. Comparing with the conventional milling, experimental results indicated the feasibility of higher performance machining of Inconel 718 by the rotary tool.

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  • Chatter Suppression in Cutting with Irregular Pitch / Variable Helix End mills:Effect of Radial Depth of Cut on Chatter Stability

    Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2011  The Japan Society for Precision Engineering

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    Event date: 2011    

    不等ピッチ/リードエンドミルは自励びびり振動の発生原因である再生効果を抑制し得るが,条件によっては効果的に自励びびり振動を抑制し得ないこともある.本研究では,Multi-Frequencyモデルを用いて,これらの工具を用いた場合の安定限界に対する半径方向切込みの影響について検討した.解析の結果,切込みが浅くモードカップリングが生じにくい条件で自励びびり振動を効果的に抑制し得ることを確認した.

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  • Identification of nonlinear viscoelasticity of polishing pad using a compression tester

    Suzuki Norikazu, Asaba Masakazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2011  The Japan Society for Precision Engineering

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    Event date: 2011    

    CMPに用いられる研磨パッドの圧縮試験を行い,その非線形弾性特性および比例減衰係数の同定を試みた.粘性特性を精度よく同定するには,高ひずみ速度で圧縮試験を行う必要があるため,本研究では,VCM(ボイスコイルモータ)を用いた圧縮試験装置を開発した.さらに,古典的な力学モデルに基づいて研磨パッド表面層のモデル化を行い,実験結果と比較することでその凹凸パラメータを同定し,研磨圧力の解析に適用した.

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  • Study on Tool Damage in High-speed Ceramic Milling of Superalloys:Effects of Dynamic Stiffness of Mechanical Structure and Cutting Conditions

    Eto Jun, Suzuki Norikazu, Shamoto Eiji, Yoshida Hiroyuki

    Proceedings of JSPE Semestrial Meeting  2011  The Japan Society for Precision Engineering

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    Event date: 2011    

    航空機エンジン部品等に用いられる超耐熱合金インコネル718の加工では,従来の超硬工具による低速加工に置き換わり,セラミック工具を用いた高速ミリングによる高能率加工が普及してきている.しかし,工具損耗が極めて激しいため,工具寿命の改善が必要とされている.本研究では,工具損耗に影響を与える因子として機械構造の動剛性や加工条件に着目し,各条件が工具損耗に与える影響について実験に基づいた基礎検討を行った.

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  • E04 Development of Control System for Optimizing Cutting Conditions

    UENO Hiroshi, ANDO Tomoharu, SENDA Harumitsu, SUZUKI Norikazu, SHAMOTO Eiji

    The Proceedings of The Manufacturing & Machine Tool Conference  2010  The Japan Society of Mechanical Engineers

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    Event date: 2010    

    Language:Japanese  

    The chatter vibration excited during machining process deteriorates quality of workpiece surfaces, and accelerates tool wear. In addition, it often takes long time to find chatter-free cutting conditions. Therefore, a new control system is developed in the present research for searching the optimum spindle speed at which chatter stability is maximized. The developed system detects the chatter vibration that occurs during machining process using a vibration sensor, and then optimizes the spindle speed automatically in real time. This report presents an overview and an application of the developed system.

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  • Stability of self-excited chatter vibration in boring operation with irregular pitch cutters

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2010  The Japan Society for Precision Engineering

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    Event date: 2010    

    適切な不等ピッチ工具を利用することにより,自励びびり振動の発生原因となる再生効果を抑制し得ることが知られている.本研究ではボーリング加工を対象とし,不等ピッチ工具による自励びびり振動の抑制効果について検討を行う.まず,解析モデルを構築し実験的に検証を行った.さらに,モードカップリングの影響が小さい条件では効果的に抑制されるのに対し,大きい条件ではむしろ不安定になることを確認した.

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  • Proposal of Multi-Stage Vibration Air Bearing

    Shamoto Eiji, Komatsu Hiroki, Yamaji Fumie, Owaki Yoshihiro, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting  2010  The Japan Society for Precision Engineering

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    Event date: 2010    

    本研究では,まず,狭いすき間で振動する軸受面に,外部から気体を吸込んで圧力増加する現象が存在することを見出した.これを多段にして複数回の圧力増加を繰返し,より高圧を発生する新しい軸受として,多段振動気体軸受を提案する.さらに本報では,試作開発した本軸受装置の測定と,軸受隙間内気体の有限要素モデルによる解析により,軸受性能について検討した結果について報告する.

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  • Simultaneous face milling of two sides of plates with high accuracy and high efficiency:Suppression of regenerative chatter vibration by speed difference between two spindles

    Shamoto Eiji, Nishimura Kohei, Kurata Yusuke, Suzuki Norikazu, Mori Tatsuya

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    板材の加工は裏面をマグネットにより固定し,表面をフライス加工する方法が一般的である.しかし,二面を片面ずつ切削するために効率が低く,また弾性変形させた状態で切削することにより加工精度も低いことが問題となっている.これに対し,著者らは両面同時フライス加工法を採用し,それに伴う板材の剛性低下や複数主軸の同時使用に起因する再生型びびり振動を,左右主軸に回転数差を設けることにより抑制する手法を考案した.

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  • Nonlinearity compensation for piezoelectric actuators based on non-creep line:Study on effects of driving speed and preload

    Shinoda Morio, Shamoto Eiji, Suzuki Norikazu, Tsukamoto Go, Yamauchi Akira

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    圧電素子は高剛性、高分解能、高速応答性といった長所を持つため、位置決め装置のアクチュエータとして利用される。しかし、ヒステリシス、クリープといった非線形性を持つため位置決め性能が低下する。そこで本研究では、クリープの生じない変位と電圧の関係(非クリープ線)の発見に基づき、非線形性を補償するようにオープンループで位置決めを行う方法を開発している。本報では駆動速度、プリロードの影響について報告する。

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  • Development of fluidic mixer with high productivity and mixing rate by applying principle of baker&prime;s transformation

    Omoto Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    従来提案されているマイクロミキサは主に半導体プロセスにより作成される.振動装置などの特殊な機構を必要とする場合も多い.これに対し著者らは,金型により量産成形することができ,かつ特殊な機構を必要としない高効率マイクロミキサを考案した.本発表では,考案したミキサについて流体解析と模型実験を行い,ともにおおむね目的とする流体の挙動が確認されたことについて述べる.

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  • 530 High-accuracy analysis of polishing pressure in CMP process

    SUZUKI Norikazu, HASHIMOTO Yohei, SHAMOTO Eiji

    The Proceedings of the Materials and processing conference  2009  The Japan Society of Mechanical Engineers

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    Event date: 2009    

    Language:Japanese  

    The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By applying to the three dimensional (3D) coupled fluid-structure analysis of the CMP process, the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Consequently, the analytical results of polishing pressure and fluid pressure distributions considerably depend on the damping property too. The fluid pressure measuring experiment was also carried out, and it is confirmed that the feature of the measured fluid pressure distribution agrees with that simulated by developed CMP process analytical model.

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  • 164 Development of 200 kHz elliptical vibration tool

    Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

    The Proceedings of Conference of Tokai Branch  2009  The Japan Society of Mechanical Engineers

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    Event date: 2009    

    Language:Japanese  

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  • High Accuracy Analysis of Regenerative Chatter Vibration with Process Damping:Identification of process damping parameter by inverse analysis of chatter vibration

    Kurata Yusuke, Merdol S. Doruk, Altintas Yusuf, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    切削加工において,低速領域ではプロセスダンピングの影響によりびびり振動が発生しにくいことが知られている.これを考慮した簡易的な解析モデルが考案されているが,従来手法はその影響を考慮するための変数の同定精度が低く,高精度な解析が難しいという問題があった.これに対し,本研究ではびびり振動の逆解析を利用した変数の新しい同定手法を考案し,高精度な安定限界解析が可能であることを実験的に確認した.

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  • Development of Sub-MHz Elliptical Vibration Tool

    Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    振動切削では,超音波領域の振動を用いて断続的な加工を行うことによりなどさまざまな優れた効果が得られることが知られている.一般に20~40kHz程度の周波数が利用されるが,それ以上の高周波振動を利用した場合にどのような効果が得られかについては詳しく検討されていない.そこで,本研究では従来と比べて1桁程度周波数の高いサブMHzの楕円振動工具を試作し,その加工特性について評価を行った.

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  • Development of Sculptured Surface Machining Technology for Hardened Steel by Utilizing Two-degree-of-freedom Elliptical Vibration Tool

    Suzuki Norikazu, Yokoi Hideo, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    インサート工具の突き出し長さが大きく,傾斜した方向に軸振動を発生する自由曲面加工用の2自由度超音波楕円振動工具を開発した.さらに,焼入れ鋼の溝加工実験に適用し,びびり振動の発生メカニズムについて考察を行うとともに,安定限界向上の可能性について検討を行った.その結果,インサート工具の形状を非対称にすることでモードカップリング型のびびり振動が抑制され,安定限界切込みが増大することを確認した.

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  • Measurement of Fluid Pressure Distribution in CMP Process

    Suzuki Norikazu, Adachi Yosuke, Hashimoto Yohei, Suzuki Ko

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    CMPプロセスでは,ウェハと研磨パッド間が潤滑状態となり,流体圧力が生じることが知られている.しかし,研磨パッドや研磨ヘッドは回転運動を行うため,その界面の流体圧力の測定は難しい.本研究では,無線通信により流体圧力を遠隔計測する装置を試作し,ウェハ-研磨パッド間の流体圧力の計測実験を行った.さらに,著者らが開発しているCMPプロセス解析との比較を行った.

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  • A Three Dimensional Coupled Fluid-Structure Analysis for CMP Process:Consideration on Damping Effect of Polishing Pad

    Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2009  The Japan Society for Precision Engineering

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    Event date: 2009    

    The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By extending to the three dimensional (3D) analysis and applying to the coupled fluid-structure analysis of the CMP process, the accurate CMP process model, which can consider the nonlinear dynamic motion, the damping effects and the stress concentration simultaneously, was developed in the present research. It was applied to the 3D CMP process analysis, and the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Thus, there is a possibility that the developed model can estimate the polishing stress and fluid pressure distributions of the CMP process accurately.

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  • 256 Effect of off-diagonal elements in a transfer function on stability limits of regenerative chatter vibration in plunge cutting

    SUZUKI Norikazu, NISHIMURA Kohei, KURATA Yusuke, SHAMOTO Eiji

    The Proceedings of Conference of Tokai Branch  2008  The Japan Society of Mechanical Engineers

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    Event date: 2008    

    Language:Japanese  

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  • Experimental/Analytical Evaluation of Fluid Bearing Utilizing Traveling Waves

    Owaki Yoshihiro, Yamaji Fumie, Suzuki Norikazu, Syamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    本研究では進行波を利用した新しい流体軸受を提案している.本軸受では圧電素子を用いて軸受面に進行波を発生し,軸受面中心に向かう力を流体に与えることで軸受面下の圧力を上昇させ,非接触の支持を実現する.本報では本軸受の試作機に対する測定と既に構築している本軸受の軸受隙間の有限要素モデルによる解析により,本原理による軸受としての性能について検討する.

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  • A Coupled Fluid-Structure Analysis for CMP Process:Construction of A Method for Dynamic Structural Analysis -

    Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    CMPにおける従来のウェハ-研磨パッド間の接触応力解析においては,動的な解析モデルを扱う際に解析精度が低くなるという問題があった.これに対し,動的なプロセスを準静的に扱う構造解析モデルを考案し,動的接触応力解析の高精度化・高速化について検討を行った.その結果,提案手法を用いることにより,ウェハエッジ部における応力集中などの従来困難であった解析の精度が向上し,解析時間が大幅に短縮されることを確認した.

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  • Regenerative effect and mode-coupling in self-excited chatter vibration

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    回転工具を用いる加工では,一般に再生効果とモードカップリングの影響が混在した自励型びびり振動が発生するが,通常これらの影響はほとんど区別されることはない.これに対し,本研究ではボーリング加工を対象として,再生効果とモードカップリングの影響を切り分けた実験条件において安定限界解析の比較を行った.その結果,それぞれの影響が小さくなる条件において安定限界が最も大きくなることを確認した.

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  • FEM simulation of Elliptical Vibration Cutting

    Amini Saeid, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    Ultrasonic vibration cutting processes are modeled and simulated in the present research, utilizing MSC-Marc FEM software. The vibration is applied to the cutting tool in one or two directions denoted by vibration cutting (VC) and elliptical vibration cutting (EVC), respectively. The cutting forces and the stresses developed within the workpiece during the vibration cutting processes are estimated and compared with those in the conventional cutting (CC) process. The influence of various parameters such as speed ratio and amplitude are subsequently investigated. It is partially concluded that though the cutting force fluctuates periodically in VC and EVC, its average value changes from CC to VC and EVC in descending order. The cutting force decreases with a rise in the speed ratio in EVC and does not change in VC.

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  • Ultra-precision micro machining of hard material by applying elliptical vibration cutting:Proposal of texturing method by high-speed amplitude control

    Suzuki Norikazu, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    楕円振動切削では,切込方向の振動振幅を能動的に制御することによって切込み深さに変動を与えることができる.本研究では,この特徴に基づき,振動振幅制御を利用した高硬度材の超精密微細テクスチャ加工技術を提案する.振動振幅を高速制御することが可能な約40kHzの楕円振動制御装置を用いて,焼入れ鋼のテクスチャ加工実験を行った.基礎的な溝加工実験の結果,良好な超精密微細加工を実現できることを確認した.

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  • Improvement of Load Characteristics of 3 DOF Ultrasonic Elliptical Vibration Tool

    Suzuki Norikazu, Yokoi Hideo, Syamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    著者らは楕円振動切削を利用した焼入れ鋼の自由曲面加工法を提案し,これを実現するための3自由度超音波楕円振動工具を開発している.従来の振動工具においては,大きな切削負荷が生じた際に振動軌跡が乱れて仕上げ面性状の劣化や工具の欠損を引き起こす問題があった.そこで,本研究では振動子に取り付けるシャンク形状の変更による負荷特性の改善を検討した.その結果,大幅に負荷特性を改善し得ることを確認した.

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  • Ultra-precision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (3rd Report):Study on extending tool life

    Suzuki Norikazu, Ebata Yusuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    新しいガラス成型用金型材料として期待されているタングステン合金の超音波楕円振動切削においては,従来の研究によってダイヤモンド工具の急激な摩耗が仕上げ面性状の劣化を引き起こし問題となることが明らかになっている.本研究ではこの摩耗メカニズムに着目し,工具形状や結晶方位などの変更による工具寿命の延長について検討を行う.さらに,各種工具を用いた寿命試験により,その効果について検証を行った.

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  • Inverse identification of a transfer function with experimental results in end milling

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    エンドミル加工のびびり振動の安定限界解析には伝達関数が必要となるが,小型もしくは複雑形状の機械構造や,回転中に伝達特性の変化する機械構造がびびり振動する場合には,伝達関数の高精度測定が難しいという問題がある.そこで,従来の伝達関数測定手法と異なり,加工実験中に計測されるびびり振動の周波数と実際の安定限界切込みから伝達関数を逆同定する手法を考案した.そして,加工実験により考案手法の検証を行った.

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  • Effect of cross-terms in a transfer function on stabilitiy limits of regenerative chatter vibration:Study on plunge cuting

    Suzuki Norikazu, Nishimura Kohei, Shamoto Eiji, Yoshino Kiyoshi

    Proceedings of JSPE Semestrial Meeting  2008  The Japan Society for Precision Engineering

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    Event date: 2008    

    切削加工におけるびびり振動の安定限界に対して,機械構造の伝達特性におけるクロス項が与える影響について検討した研究はこれまでになく,ほとんどの場合には考慮すらされることがない.これに対し本研究では,びびり振動の安定限界に対して伝達特性のクロス項が与える影響について,その本質的な意味を明らかにするとともに,突切り切削を対象としてクロス項を考慮した再生型びびり振動の安定限界解析手法を提案する.

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  • 657 Study on restraint of creep of piezoelectric actuator

    TSUKAMOTO Go, SUZUKI Norikazu, SHINODA Morio, SHAMOTO Eiji

    The Proceedings of Conference of Tokai Branch  2008  The Japan Society of Mechanical Engineers

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    Event date: 2008    

    Language:Japanese  

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  • A Coupled Fluid-Structure Analysis for CMP Process:Effects of material properties of polishing pad and wafer shape

    Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2007  The Japan Society for Precision Engineering

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    Event date: 2007    

    CMPプロセスでは,研磨に使用する材料の形状や機械特性が研磨特性に大きく影響することが経験的に知られている.著者らは,複雑なCMPプロセスのメカニズムの解明を目的とし,これまでに流体-構造連成解析を利用したCMPプロセスの解析手法について検討を行っている.本稿では,本解析手法を利用し,研磨パッドの材質やウェハ形状などの各種パラメータが研磨特性に及ぼす影響について評価を行った結果について報告する.

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  • Proposal of parabolic vibration cutting method

    Shamoto Eiji, Suzuki Norikazu, Kikuchi Kaname, Tsuchiya Eiji, Hamada Seiji

    Proceedings of JSPE Semestrial Meeting  2007  The Japan Society for Precision Engineering

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    Event date: 2007    

    本研究では新しい振動切削加工法として,放物線振動切削加工法を提案する。本手法では工具刃先を切削方向に放物線軌跡で超音波振動させながら加工を行うことにより、間欠切削と引き切りの効果を同時に得るとともに、切れ刃方向の力が反転し相殺するため,実質的に著しい切削抵抗の低減が期待される。本報では、超音波放物線振動子を開発し,通常切削および従来振動切削と本手法の基礎的な比較実験を行った結果について報告する。

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  • Analysis of Stability Limits for Forced Chatter Vibration in End-Milling

    Suzuki Norikazu, Ikada Tsutomu, Kurata Yusuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2007  The Japan Society for Precision Engineering

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    Event date: 2007    

    びびり振動を抑制・回避するためには,安定限界解析手法を利用した適切な加工条件の選択や構造の改善が有効となる.これに対し,本研究では,強制型びびり振動を引き起こす主要因となる切削力の周期変動を考慮した,エンドミル加工における強制型びびり振動の安定限界解析手法を考案した.さらに,エンドミル加工による検証実験を行い,本解析手法により強制型びびり振動の安定限界を高精度に予測し得ることを確認した.

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  • Chatter Stability Limits in End-Milling with Anisotropic Flexible Tools:Experimental verification of proposed analytical model

    Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2007  The Japan Society for Precision Engineering

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    Event date: 2007    

    従来のエンドミル加工におけるびびり振動安定限界解析では,空間に固定された座標系内で構造物の伝達関数を定義し,固定座標系内で一定の振動が生じることを前提としている.これに対して著者らは,低剛性の回転工具に,その工具に固定された座標系内で一定の振動が発生する場合に対応した安定限界解析モデルを構築している.本研究では,異方性を持つエンドミル工具を用いた切削実験を行い,本手法の有効性について検証を行った.

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  • Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (2nd Report)

    Suzuki Norikazu, Haritani Makoto, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2007  The Japan Society for Precision Engineering

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    Event date: 2007    

    Elliptical vibration cutting is applied to ultra-precision machining of tungsten alloy molds for optical glass parts in the present research. The tungsten alloy is expected as a new mold material instead of conventional ones such as sintered tungsten carbide and CVD-silicon carbide. Ultra-precision molds of the tungsten alloy for a prism, a small spherical lens and an array of micro V-grooves were machined by the elliptical vibration cutting. It is confirmed that surface roughness of less than 100 nmRz and desired shape can be attained. They were applied to glass molding of borosilicate glass BK7 without any coatings, and it is found that accurate transcript with no adhesion can be achieved successfully.

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  • 125 Analysis of CMP process in mixed lubrication : Experimental verification of analytical model in terms of friction resistance

    SUZUKI Norikazu, HASHIMOTO Yohei, HAYASHI Masayuki, SHAMOTO Eiji

    The Proceedings of The Manufacturing & Machine Tool Conference  2006  The Japan Society of Mechanical Engineers

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    Event date: 2006    

    Language:Japanese  

    An analytical approach to estimate the coefficient of friction (COF) in chemical mechanical polishing (CMP) process in mixed lubrication is developed in the present research. The Stribeck curve is calculated by experimental and analytical results of friction resistances. An analytical model, which can predict the distribution of contact stress and fluid pressure under the condition of nonuniform velocity distribution by utilizing the Stribeck curve, is developed. Polishing experiments are carried out for the verification of the model in terms of the friction resistance. It is confirmed that the effect of the wafer rotational speed on the friction resistance can be predicted successfully by the developed analytical model.

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  • 508 Development of Ultraprecision Alignment Device with High Load Capacity Driven by Means of Walking Drive

    SHAMOTO Eiji, TSUKAMOTO Go, SUZUKI Norikazu, KATO Akio

    The Proceedings of The Manufacturing & Machine Tool Conference  2006  The Japan Society of Mechanical Engineers

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    Event date: 2006    

    Language:Japanese  

    This paper presents a new ultraprecision alignment device with high load capacity, which is targeted for ultraprecision bonding in a vacuum. The ultraprecision bonding is recently needed for emerging production technologies such as nanoimprint, MEMS and WOW. The device is driven by &#039;Walking Drive&#039;, which is an unique driving method to realize ultraprecision positioning with long stroke by utilizing piezoelectric actuators. The method is suitable for high load capacity and the ultraprecision positioning in a vacuum. Mechanical parts of the device are designed by utilizing FEM analysis, so that the device has a high load capacity of greater than 1 ton. It is confirmed experimentally that the developed alignment system has the high load capacity and also fine positioning resolution of less than 10nm.

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  • Ductile Machining of Single Crystal Germanium by Applying Elliptical Vibration Cutting

    Suzuki Norikazu, Yan Xhen, Shamoto Eiji, Hirahara Yasuhiro, Masuda Tadashi

    Proceedings of JSPE Semestrial Meeting  2006  The Japan Society for Precision Engineering

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    Event date: 2006    

    &amp;prime;Ultrasonic elliptical vibration cutting&amp;prime; technology is applied in the present research to ultraprecision machining of single crystal germanium, which is an excellent substrate material for optical devices. Micro grooving experiments are carried out on (100), (110) and (111) faces of the single crystal germanium to clarify the basic effects of the elliptical vibration on the ductile micro machining. It is confirmed that a groove formed in &lt;011&gt; direction on the (111) surface is filled with asperities at a depth of 0.19 um due to cleavage fractures in the ordinary cutting. While a smooth mirror surface is obtained by the elliptical vibration cutting at a depth of cut of less than 1.04 um in same direction. These experimental results indicate that the critical depth of cut is increased at a specific orientation angle by applying the elliptical vibration cutting. However critical depths of cut depend on cutting directions and crystal orientations. We also clarified that the critical depth of cut can be increased at the lower cutting speed.

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  • Analysis of CMP process in boundary lubrication

    Suzuki Norikazu, Hashimoto Yohei, Hayashi Masayuki, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2006  The Japan Society for Precision Engineering

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    Event date: 2006    

    Polishing experiments are carried out in the present research in order to verify an analytical model for a simulation of Chemical Mechanical Polishing (CMP) process. A three-dimensional finite element analysis of CMP process, which considers the boundary lubrication between a wafer and a polishing pad, is utilized to predict a friction resistance. Additionally, the friction forces are measured in the polishing experiments by force sensors built into the experimental setup. It is conformed that the predictions of friction resistance directions fit experimental results. These results indicate that the friction resistance direction depends on the ratio of the wafer to the polishing pad rotation speeds.

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  • Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting

    Suzuki Norikazu, Shamoto Eiji, Haritani Makoto, Yan Sekihin, Ootsuki Masato, Hamada Seiji

    Proceedings of JSPE Semestrial Meeting  2006  The Japan Society for Precision Engineering

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    Event date: 2006    

    &amp;prime;Ultrasonic elliptical vibration cutting&amp;prime; technology is applied in the present research to ultraprecision machining of Tungsten alloy, which is expected as a material of molds for glass parts instead of sintered tungsten carbide. It is confirmed that ulptraprecision grooving cannot be realized by the ordinary cutting. On the other hand, it can be realized by the elliptical vibration cutting at a cutting depth of less than 1 um. Effects of the cutting distance on the cutting force and the roughness are also clarified, and it is found that surface roughness of less than 100 nm Rz can be realized up to a cutting distance of 35 m. Practical molds for spherical glass lenses and a glass prism are successfully machined.

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  • Development of a New Fluid Bearing Utilizing Surface Tension

    Shamoto Eiji, Komura Takamichi, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting  2005  The Japan Society for Precision Engineering

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    Event date: 2005    

    A prototype slider is developed in the present research by utilizing a new fluid bearing proposed in the previous research. The moving part is supported with a thin fluid film held on the bearing surface by surface tension. Conventional hydrostatic sliders utilize externally compressed fluid, which requires some cost and large facilities and causes micro vibrations by ripple of the fluid pressure. The non&amp;ndash;contact precision slider is realized without the large facilities by utilizing the proposed bearing, and it has high load capacity and enough rigidity for the simple structure. The prototype slider is fabricated by utilizing a water film and a guide rail of polished glass, and its resistance force against the feed motion is investigated here.

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  • Sculptured Surface Machining by Applying Ultrasonic Elliptical Vibration Cutting

    Shamoto Eiji, Suzuki Norikazu, Tsuchiya Eiji, Hori Yasunori, Inagaki Hiroshi, Yoshino Kiyoshi

    Proceedings of JSPE Semestrial Meeting  2005  The Japan Society for Precision Engineering

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    Event date: 2005    

    A new machining method is proposed to obtain precise sculptured surfaces by applying &amp;Prime;elliptical vibration cutting&amp;Prime;. A 4&amp;ndash;axis controlled precision machine tool, which consists of an air spindle and precision elements, is developed. 4&amp;ndash;axis control tool paths for machining sculptured surfaces are also generated by utilizing commercial CAM software and a special post processor. It is confirmed that mirror surface machining of hardened die steel can be realized by integrating the precision machine tool, the special CAM system and the 3 DOF vibration system developed in the previous research.

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  • Analysis of distribution of material removal rate in CMP process

    Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2005  The Japan Society for Precision Engineering

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    Event date: 2005    

    本研究では、CMPプロセスにおいて実用的な解を与える研磨レート分布解析手法の確立を目指している。本報では、基礎的なCMPプロセスの解析モデルを構築し、有限要素解析を利用してウェハ&amp;ndash;研磨パッド間の流体圧力分布及び接触応力分布の解析を行うと同時に、研磨レート分布の推定を行った。さらに酸化膜CMPにおける基礎的な研磨実験を行い、研磨条件がCMPプロセスに及ぼす影響について検証を行った。

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  • Study on three dimensional cutting mechanics

    Shamoto Eiji, Suzuki Norikazu, Kato Masahiro

    Proceedings of JSPE Semestrial Meeting  2005  The Japan Society for Precision Engineering

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    Event date: 2005    

    An analytical model of three dimensional cutting process with two cutting edges is presented without relying on empirical rules in the present research. The shear deformation zone is simplified to a thin shear plane, and Krystof&amp;prime;s maximum shear stress model and Merchant&amp;prime;s minimum energy model for the orthogonal cutting process are extended to the three dimensional cutting process to predict the shear direction. The three dimensional cutting parameters including cutting forces and chip flow direction are computed with the developed model, and it is confirmed that the computed chip flow direction agrees roughly with Colwell&amp;prime;s empirical law of chip flow.

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  • Development of Fluid Bearing Utilizing Traveling Wave

    Shamoto Eiji, Suzuki Norikazu, Hamaguchi Akihide, Nunome Kiyonari

    Proceedings of JSPE Semestrial Meeting  2005  The Japan Society for Precision Engineering

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    Event date: 2005    

    A new non-contact fluid bearing, which utilizes traveling wave, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the wave traveling on the bearing surface. Conventional fluid bearings utilize externally compressed fluid, which requires some cost and large facilities. The proposed bearing realizes non-contact precision tables without the large facilities, and furthermore it has a capability to electrically control the bearing force and moment. A prototype device is developed on the basis of the proposed principle, and its non-contact smooth motion has been observed.

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  • Cutting process control by applying elliptical vibration cutting.

    社本 英二, 鈴木 教和, 加藤 晃央, 柳田 和彦

    Proceedings of JSPE Semestrial Meeting  2004  The Japan Society for Precision Engineering

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    Event date: 2004    

    著者らが考案している楕円振動切削加工法では、背分力をゼロもしくは反転させることが可能である。また、振動軌跡における振動振幅や位相差などの各振動パラメータを変化させることにより、切削プロセスを意図的に変化させることができる。本研究では、振動振幅や位相差を変化させることにより切削力を制御する切削プロセス制御システムの開発を行った.さらに切削実験を行い、開発した制御システムの有効性を検討した。

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  • Development of 3 DOF ultrasonic vibration control system to realize elliptical vibration cutting of free-form surface

    Suzuki Norikazu, Tsuchiya Eiji, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2004  The Japan Society for Precision Engineering

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    Event date: 2004    

    著者らは楕円振動切削を適用することにより焼入れ鋼金型に対して直接ダイヤモンド鏡面切削を行うことが可能な新しい加工技術の開発を目指している.これまでの研究において,1方向のたて振動と2方向のたわみ振動を同一周波数で発生させることのできる3自由度型の振動工具の開発を行っている.本報では,開発した3自由度型振動工具を安定して制御することが可能な制御システムを設計・試作を行い,その制御特性の評価を行った.

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  • Ductile mode machining of cemented tungsten carbide by applying Elliptical Vibration Cutting

    Suzuki Norikazu, Masuda Shinsuke, Shamoto Eiji

    Proceedings of JSPE Semestrial Meeting  2004  The Japan Society for Precision Engineering

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    Event date: 2004    

    微細形状を有するガラス製品の量産を目的とし、超硬合金製金型に対する超精密微細加工の要求が増加している。これに対し、筆者らは楕円振動切削の適用を試み、すでに良好な延性モード加工を行い得ることを確認している。本報では、低周波振動における溝加工実験を行い、楕円振動切削による延性モード加工のメカニズムについて検討を行った。その結果、低周波振動においても延性モード加工行い得ることを確認した.

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  • Development of 3 DOF vibration system for ultrasonic elliptical vibration cutting

    Shamoto Eiji, Suzuki Norikazu, Nakamura Akihiro

    Proceedings of JSPE Semestrial Meeting  2004  The Japan Society for Precision Engineering

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    Event date: 2004    

    筆者らは楕円振動切削と呼ぶ加工法を提案し、優れた切削性能を持つことを確認している。実用的な自由曲面を加工するためには多様な加工形状に対応できる振動装置が必要となる。しかし、既に開発している2自由度型超音波楕円振動切削装置では振動子と被削材の干渉により加工形状が制約されてしまう。そこで、任意の面内で楕円振動軌跡を得ることができ、加工形状の制約が少ない3自由度型超音波楕円振動切削装置の開発を行った。

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  • Analysis of Chatter Stability Limits in End-Milling

    Shamoto Eiji, Suzuki Norikazu, Suzuki Hiromi, Se Gyouken, Inoue Atsushi, Kuroda Motofumi

    Proceedings of JSPE Semestrial Meeting  2004  The Japan Society for Precision Engineering

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    Event date: 2004    

    エンドミル加工では、加工時に発生するびびり振動により、切削条件が制限されることが多い。このびびり振動を抑制し切削安定限界を上げることは、加工能率の向上へとつながる。本研究では、工具を主体としたびびり振動の発生機構をモデル化し、解析的に求めた切削安定限界と実験値を比較する。また、積極的に安定限界領域を拡大する手法についても検討を行う。

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  • Proposal of a New Fluid Bearing Utilizing Surface Tension

    Shamoto Eiji, Hashimoto Kento, Suzuki Norikazu

    Proceedings of JSPE Semestrial Meeting  2004  The Japan Society for Precision Engineering

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    Event date: 2004    

    本研究では、表面張力を利用した新しい流体軸受を考案している。提案する装置では、軸受隙間に水の膜を作り、表面張力によってその状態を維持する。従来の非接触軸受と異なり、外部装置を必要としない単純な構造のため、使用する場所に制限されず、流体の脈動による微振動も無くす事ができる。実際に表面張力によって移動部を浮上させ、滑らかな送り動作が可能である事を確認している。また剛性等の測定も検討している。

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  • Study on three dimensional cutting mechanics : Machining with two cutting edges

    SHAMOTO Eiji, OYABA Mitsuru, SUZUKI Norikazu

    The Proceedings of Conference of Tokai Branch  2003  The Japan Society of Mechanical Engineers

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    Event date: 2003    

    Language:Japanese  

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  • Ultraprecision Ductile Machining of Single Crystal Materials by Applying Ultrasonic Elliptical Vibration Cutting

    Shamoto Eiji, Suzuki Norikazu, Masuda Shinsuke

    Proceedings of JSPE Semestrial Meeting  2003  The Japan Society for Precision Engineering

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    Event date: 2003    

    単結晶フッ化カルシウム(CaF2)は切削による延性モード加工が困難であるため,通常はポリシングにより加工されることが多い.本研究では切削性能の向上を目的として考案されている楕円振動切削加工を適用することにより単結晶材料の延性モード切削を試みた.&lt;br&gt;基礎的な溝加工実験により超音波楕円振動付加による影響の評価を行った.その結果,楕円振動切削を用いることで大幅に臨界切込み量が増大することがわかった.

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  • CMP Pad Surface Analysis with Digital Images

    Kojima Hiroyuki, Suzuki Norikazu, Hirose Takenori, Nishiguchi Takashi

    Proceedings of JSPE Semestrial Meeting  2002  The Japan Society for Precision Engineering

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    Event date: 2002    

    CMPプロセスにおける研磨パッドの表面状態は研磨レート等の基本的な研磨特性に大きな影響を与える.研磨パッドの表面状態について,これまで筆者らは表面あらさを用いた評価を試みてきたが,測定箇所の発泡状態等により測定結果が大きくばらつき,研磨特性との相関を明瞭とするために多量の測定を要する問題があった.そこで本研究では,研磨パッドの損耗に伴うパッド表面の平滑化に着目し,研磨パッド表面の画像から平滑化の度合いを算出する簡便な研磨パッド表面状態の評価方法について検討を行った.実験の結果、本測定法は研磨パッドの表面あらさRaによる評価と比較して研磨パッド表面状態を精度良く評価できることが判った.

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  • Study on Ultrasonic Elliptical Vibration Cutting : Development of Vibration Control System and its Application to Machining

    SHAMOTO Eiji, SUZUKI Norikazu, IENAGA Ken, NAOI Yoshikazu, MORIWAKI Toshimichi

    The Proceedings of The Manufacturing & Machine Tool Conference  2000  The Japan Society of Mechanical Engineers

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    Event date: 2000    

    Language:Japanese  

    A new system is developed to control the ultrasonic elliptical vibration applied to the cutting tool, and it is applied to the ultraprecision elliptical vibration cutting of hardened stainless steel in the present research. Steady feedback control of the vibration locus is realized by developing a cross talk remover, which eliminates interference between the two directional vibrations. The controller keeps the vibration amplitudes and the phase difference between the two vibrations to be desired values and to chase the average resonant frequency of the vibrations simultaneously. The machining experiments show that shape accuracy and roughness of the finished surface are improved significantly by applying the developed system.

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Awards

  • JSPE Best Paper Award

    2024.3   The Japan Society for Precision Engineering   Parameter identification for linear model of the milling process using spindle speed variation

    Kazuki Takahei, Satoshi Miwa, Eiji Shamoto, Norikazu Suzuki

  • Excellent Poster Award

    2022.11   The 19th International Machine Tool Engineers' Conference   A novel method of model parameter identification for highly-accurate milling simulation

    Norikazu Suzuki, Hideyuki Fujii, Yukio Takahashi

  • Best Paper Award

    2019.11   ASPEN2019  

    S. Yamato, K. Nakanishi, N. Suzuki, Y. Kakinuma

  • Excellent Paper Award

    2019.9   CJUMP2019  

    J. Zhang, N. Suzuki, E. Shamoto, J. Zhang, X. Chen, J. Xiao, W. Bai, J. Xu

  • 優秀講演論文表彰

    2017.11   日本機械学会  

    K. Takahei, T. Fujita, R. Ikeda, N. Suzuki, S. Ohno, E. Shamoto

  • SI2016優秀講演賞

    2016.12   計測自動制御学会   CNCの内部情報を利用した柔軟な機械構造を伴うエンドミルプロセスのモデルベースパラメータ同定

    池田遼輔, 鈴木教和, 社本英二

  • Excellent Poster Award (優秀ポスター賞)

    2016.11   IMEC,日工会   モデルベースシミュレーションを利用した知的切削プロセス同定技術の開発

    鈴木教和, 池田遼輔, 社本英二

  • 部門一般表彰優秀講演論文表彰

    2016.10   日本機械学会   推定切削力を応用した不等ピッチターニングによるびびり振動抑制

    門田崇志, 山田雄基, 中西賢一, 橘純司, 吉岡勇人, 鈴木教和, 柿沼康弘

  • 論文賞 (一般財団法人 FA財団)

    2014.12   FA財団  

    Eiji Shamoto, Tatsuya Mori, Burak Sencer, Norikazu Suzuki, Rei Hino

  • 部門一般表彰優秀講演論文表彰

    2014.11   日本機械学会   楕円振動切削における振幅変調法を利用した焼入れ鋼のナノ精度微細加工

    鈴木教和, 張建国, 社本英二

  • 2013年度精密工学会沼田記念論文賞

    2014.3   精密工学会   研磨パッドの微細凹凸接触を考慮したCMPプロセスのEHL解析

    橋本洋平, 鈴木教和, 浅羽正和, 樋野励, 社本英二

  • 2013年度精密工学会論文賞

    2014.3   精密工学会  

    E. Shamoto, T. Mori, B. Sencer, N. Suzuki, R. Hino

  • Best Poster Award

    2012.11   IMEC,日工会   びびり振動に対する動剛性無限大化を実現する革新的中ぐり工具の設計

    N. Suzuki, R. Watanabe, K. Nishimura, E. Shamoto

  • 工作機械技術振興賞・論文賞

    2012.6   工作機械技術振興財団  

    鈴木 教和, 横井 秀郎, 社本 英二

  • 精密工学会沼田記念論文賞

    2012.3   精密工学会   切りくずの連続処理と引張り切削に関する研究-すくい面形状による切りくず制御の試み-

    社本英二, 安田浩一朗, 青木友弥, 鈴木教和, 小出富夫

  • Hot Article Award Analytical Sciences

    2012.1  

    T. Yasui, Y. Omoto, K. Osato, N. Kaji, N. Suzuki, T. Naito, Y. Okamoto, M. Tokehi, E. Shamoto, Y. Baba

  • 第5回切削加工ドリームコンテスト アカデミック部門:金賞

    2008.10   森精機製作所   焼入れ鋼の超精密微細3次元彫画

    鈴木教和, 横井秀郎, 橋本洋平, 布目清成, 社本英二

  • 優秀論文表彰 (財団法人 マザック財団)

    2008.5   マザック財団  

    鈴木教和

  • 2007年度(第27回)精密工学会技術賞

    2007.9   精密工学会   高硬度材の超精密・微細加工用楕円振動切削装置の開発

    浜田晴司, 上山崇, 鈴木教和, 社本英二

  • ベストプレゼンテーション賞

    2007.3   超音波楕円振動切削によるタングステン合金の超精密微細加工(第2報)

    鈴木教和

  • Best Paper Award in 2005 International Symposium on Micro-NanoMechatronics and Human Science(MHS2005)

    2005.11   MHS2005   A New Method to Machine Sculptured Surfaces by Applying Ultrasonic Elliptical Vibration Cutting

    Eiji Shamoto, Norikazu Suzuki, Rei Hino, Eiji Tsuchiya, Yasunori Hori, Hiroshi Inagaki, Kiyoshi Yoshino

  • 第26次 工作機械技術振興賞 奨励賞

    2005.6   工作機械技術振興財団   CMPにおける研磨レート解析に関する研究

    鈴木教和, 橋本洋平, 長谷部貴士, 社本英二

  • 2003年精密工学会賞

    2004.3   精密工学会   機械式円振動発生機構を利用した楕円振動切削加工機の開発

    社本英二, 宋詠燦, 吉田秀樹, 鈴木教和, 森脇俊道, 幸田盛堂, 山西哲司

  • 2001年精密工学会賞

    2002.3   精密工学会   楕円振動切削加工法 (第4報)-工具振動システムの開発と超精密切削への応用

    社本英二, 鈴木教和, 森脇俊道, 直井嘉和

  • ベストプレゼンテーション賞

    1998.3   日本機械学会   楕円振動切削加工法による自由曲面の創成

    鈴木教和

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Research Projects

  • Development of Innovative Robot Polishing Technology by Model Based Simulation and Optimization involving AI

    Grant number:22K03866  2022.4 - 2025.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)  Kanazawa Institute of Technology

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    Grant amount: \4290000 ( Direct Cost: \3300000 、 Indirect Cost: \990000 )

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  • 次世代CMPプロセスを拓くデジタルツイン基盤とサイバーフィジカルシステムの開発

    Grant number:22H01381  2022.4 - 2025.3

    日本学術振興会  科学研究費補助金  基盤研究(B) 

    鈴木教和

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    Grant type:Competitive

    Grant amount: \17420000 ( Direct Cost: \13400000 、 Indirect Cost: \4020000 )

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  • Design of cutting tool flank texture that overturns the conventional limit in chatter stability

    Grant number:19H02041  2019.4 - 2022.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B) 

    Suzuki Norikazu

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    Grant amount: \17290000 ( Direct Cost: \13300000 、 Indirect Cost: \3990000 )

    A simulation technique for process damping phenomena in cutting has been developed, as well as a design technique for the flank surface texture of cutting tools that effectively generate process damping. The developed tool exhibits process damping not only at low cutting speed range but also at high cutting speeds without significant adhesion or increased edge force. The flank texture does not cause any critical defects on the flank surface and cut surface, and thus can provide robust vibration damping against vibration frequency. The analysis technique to estimate the process damping coefficient using FEM and the compensation for the effects of tool edge geometry and flank adhesion enable highly accurate estimation of the process damping phenomenon.

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  • A novel model-based process monitoring for next-generation cutting technology

    Grant number:16H04243  2016.4 - 2019.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)  Grant-in-Aid for Scientific Research (B)  Nagoya University

    Suzuki Norikazu

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    Grant amount: \17420000 ( Direct Cost: \13400000 、 Indirect Cost: \4020000 )

    A novel model-based monitoring technology in cutting process is proposed to establish advanced next-generation intelligence technology. In the proposed method, based on theoretical analysis technology of cutting process and measurement / estimation technology of machine tools, a new identification of cutting process parameters and dynamics parameters is automatically made. These parameters are evaluation indices of the machining system. Developed analysis models representing the basic milling process were verified through a series of cutting experiments. Using only the internal information of the CNC, without human manual operations, the parameters are identified. With the identified parameters, tool life and processing accuracy are evaluated. The developed technology is also useful to develop next-generation intelligence technology that automatically estimates process stability.

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  • Cutter design of irregular pitch / variable helix end mills to increase chatter stability in cutting

    Grant number:25289015  2013.4 - 2016.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)  Grant-in-Aid for Scientific Research (B)  Nagoya University

    Suzuki Norikazu, SHAMOTO Eiji, Hino Rei

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    Grant amount: \18590000 ( Direct Cost: \14300000 、 Indirect Cost: \4290000 )

    It is known that regenerative effect, which causes self-excited chatter vibration, can be suppressed by utilizing irregular pitch / variable helix tools. In order to suppress the regenerative effect sufficiently, a suitable combination of pitch angles needs to be designed. The present study proposes a design method of end mills, which ensures robust suppression of regeneration. Firstly, irregular pitch design for simultaneous suppression of multi-mode regenerations is formulated. In order to quantify the regenerative effect, a parameter named “Regeneration Factor (RF)” is proposed. Minimizing the mean value of the RF within certain frequency range, suppression frequencies are aligned in the proposed method, resulting in robust suppression of regeneration regardless of chatter frequency and/or spindle speed. The design method is extended for variable helix tools. The effect of the proposed method on chatter suppression is verified through a series of experimental investigations.

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  • 動剛性の異方性を積極的に利用するびびり振動抑制法の提案

    2010.4 - 2012.3

    日本学術振興会  科学研究費補助金  若手研究(B) 

    鈴木教和

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    Grant type:Competitive

    Grant amount: \4160000

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  • Proposal of novel chatter suppression method by utilizing anisotropic dynamics

    Grant number:22760097  2010 - 2011

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B)  Grant-in-Aid for Young Scientists (B)  Nagoya University

    SUZUKI Norikazu

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    Grant amount: \4160000 ( Direct Cost: \3200000 、 Indirect Cost: \960000 )

    A novel chatter suppression method in boring operation is proposed. The anisotropic boring tool with a step portion and notches on the cylinder periphery is designed, which has anisotropic dynamic characteristics. Since the direct and the cross transfer function components of the proposed tool are designed to cancel out each vibration, the nominal compliance of the boring tool in cutting process can be reduced significantly. Hammering tests of the developed tool clarified that appropriate anisotropic frequency response function is roughly attained by the proposed design. The developed tool was subsequently applied to turning experiments, and it was clarified that the stability limit in the radial depth of cut significantly increases by using the proposed boring tool as compared to the ordinary boring tool.

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  • びびり振動を自動回避する次世代工作機械の開発

    2008.4 - 2010.3

    日本学術振興会  科学研究費補助金  若手研究(B) 

    鈴木教和

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    Grant type:Competitive

    Grant amount: \4290000

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  • Development of next generation machine tool to enable automatic chatter avoidance

    Grant number:20760083  2008 - 2009

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B)  Grant-in-Aid for Young Scientists (B)  Nagoya University

    SUZUKI Norikazu

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    Grant amount: \4290000 ( Direct Cost: \3300000 、 Indirect Cost: \990000 )

    Practical chatter avoidance method for milling is proposed, and the feasibility of development of the next generation machine tools, which is equipped with the automatic chatter avoidance functions, are discussed. In the proposed method, the chatter types are distinguished by measured chatter vibration while machining, then, the suitable chatter avoidance condition is estimated. Consequently, the cutting condition can be improved and optimized by iterating this step. Meanwhile, proposed method do not need either measuring transfer function or sophistication and skills to calculate stability/allowable limits in chatter vibrations, which are required in the conventional methods. It was confirmed that the suitable chatter avoidance conditions can be predicted and optimized by the proposed method.

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  • 焼結材料の延性モード加工を可能とする超高周波振動切削加工に関する研究

    2005.4 - 2007.3

    日本学術振興会  科学研究費補助金  若手研究(B) 

    鈴木教和

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    Grant type:Competitive

    Grant amount: \3500000

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  • 焼結材料の延性モード加工を可能とする超高周波振動切削加工に関する研究

    Grant number:17760103  2005 - 2006

    日本学術振興会  科学研究費助成事業 若手研究(B)  若手研究(B)  名古屋大学

    鈴木 教和

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    Grant amount: \3500000 ( Direct Cost: \3500000 )

    本研究では従来より振動切削に用いられている振動周波数(主に20kHz)に対して一桁以上高周波となる数百kHz〜1MHz程度の低振幅振動(0.1〜1μm_<p-p>)を工具刃先に付加する振動切削加工技術の実現に挑戦する.本年度の研究では,有限要素解析技術を用いて,縦振動とたわみ振動を200kHz以上の高周波で組み合わせることのできる振動工具の設計を行い,試作装置の振動特性について評価を行った.また,別途開発を行ってきた40kHzの振動装置を用いて焼結金属(タングステン合金)に対する加工特性評価実験,および超精密金型の試作を行った.さらに試作した金型を用いてガラス部品の成形試験を行い,本手法の実用性について評価を行った.以下に得られた成果および知見を示す.
    (1)有限要素解析技術を利用して2次の縦振動と4次のたわみ振動の共振周波数がともに200kHzとなる超音波楕円振動子の設計を行った.実際に振動子の試作を行い振動特性の評価を行った結果,たわみ振動の共振周波数が181kHz,縦振動が208kHzとなり,27kHzのずれが生じることがわかった.また,約200kHz付近で駆動することにより0.1μm_<p-p>の楕円振動を発生できることを確認した.
    (2)40kHzの超音波楕円振動装置を用いてタングステン合金の超精密加工実験を行った.近似2次元切削実験の結果,1μm前後の切取り厚さが延性-脆性の臨界条件となり,0.2μmの切取り厚さにおいても連続型の切りくずが生成されることを確認した.
    (3)上記の振動装置を用いてタングステン合金性の金型を試作し,良好な形状精度と仕上げ面性状を両立できることを確認した.さらに,試作した金型を用いて光学ガラスの成形を行った結果,微細形状が精密に転写され良好なガラス部品を成形可能であることを確認した.

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  • 楕円振動切削加工法による超硬合金の超精密微細加工

    2003.4 - 2005.3

    日本学術振興会  科学研究費補助金  若手研究(B) 

    鈴木教和

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    Grant type:Competitive

    Grant amount: \3500000

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  • 楕円振動切削加工法による超硬合金の超精密微細加工

    Grant number:15760078  2003 - 2004

    日本学術振興会  科学研究費助成事業 若手研究(B)  若手研究(B)  名古屋大学

    鈴木 教和

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    Grant amount: \3500000 ( Direct Cost: \3500000 )

    本研究課題においては、楕円振動切削加工法および超精密楕円振動制御技術を適用することによって、一般的な切削加工では不可能と考えられる超硬合金のダイヤモンド切削を試みた。本年度は、前年度行った基礎的な検討の結果に基づき、さらに詳細な基本メカニズムの検討および実用的な加工特性の評価を行い、主に以下に示す成果を得た。
    (1)工作機械のNC制御を利用した低周波プロセスによる延性モード加工メカニズムの検討
    0.1Hz以下の低周波の振動を発生させ、基礎的な溝加工実験を行った結果、楕円振動切削では超音波によるプロセスと同様の延性モード加工が行われることに対して、従来型の振動切削においては通常の切削と同様に脆性モードとなることを確認した。この結果から、楕円振動切削においては振動の各周期ごとに切取られる被削材の厚み(実質的な切取り厚さ)が,特に仕上げ面を生成する振動の下死点付近において微小な値をとることにより,見かけの臨界切込みが増加し延性モード加工が行われるものと考えられる。
    (2)平面加工におけるダイヤモンド工具の長寿命化の検討
    切削油剤の供給方法の検討として、ミストおよびクーラント液供給において比較を行った結果、その加工特性に大きな違いは無いことがわかった。一方、2種類の楕円振動装置を用いて工具刃先の振動の方向が与える影響について比較した結果、楕円振動の発生する平面が切削方向を含むように設定した場合において、工具寿命が若干向上することを確認した。
    (3)楕円振動切削による超精密微細加工実験
    実用的な微細金型を想定した、V溝加工実験を行った。その結果、通常の切削においては脆性破壊が生じて鋭利な加工形状を得ることが困難であったことに対し、本手法を適用することにより鋭利な角が得られ、実用的な超硬金型の超精密微細加工を実現し得る可能性があることを確認した。

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Teaching Experience

  • Laboratory Practice in Precision Engineering

    2021 - Now   Institution:Chuo University

  • Control of Machining

    2021 - Now   Institution:Chuo University

  • Metal Machining II

    2021 - Now   Institution:Chuo University

  • Machine Tools

    2021 - Now   Institution:Chuo University

  • Advanced Lectures on Aerospace Manufacturing

    2018 - 2021   Institution:Nagoya University

  • Foundations of Mechanics II

    2017 - 2020   Institution:Nagoya University

  • Design Practice I (for G30 program)

    2013 - 2020   Institution:Nagoya University

  • Design Practice I

    2009 - 2020   Institution:Nagoya University

  • Introduction to Production Engineering (for G30/NUPACE)

    2016 - 2019   Institution:Nagoya University

  • Advanced Lectures on Ultra Precision Engineering

    2009 - 2017   Institution:Nagoya University

  • Advanced Lectures on Ultra Precision Machining

    2009 - 2017   Institution:Nagoya University

  • Elements of Applied Mechanics

    2016       Institution:Nagoya University

  • Basic Seminar A

    2009 - 2013   Institution:Nagoya University

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Committee Memberships

  • 2023.2 - Now

    プラナリゼーションCMPとその応用技術専門委員会   副委員長  

  • 2022.6 - Now

    一般社団法人 型技術協会   理事  

  • 2013 - Now

    International Conference on Planarization/CMP Technology   International Program Committee of ICPT  

  • 2022.5 - 2024.3

    一般社団法人 日本機械学会 RC295 持続可能社会を実現するDX時代の生産技術に関する研究分科会   幹事  

  • 2022.4 -  

    自動車技術会   生産加工部門委員長  

  • 2012    

    3rd CIRP conference PMI2012   Program chair  

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