Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/HSI61632.2024.10613593

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DOI： 10.1109/HSI61632.2024.10613543

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Publishing type：Research paper (scientific journal)   Publisher：Springer Science and Business Media LLC  

DOI： 10.1186/s40648-023-00262-y

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Publishing type：Research paper (scientific journal)   Publisher：Fuji Technology Press Ltd.  

DOI： 10.20965/jrm.2023.p0180

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DOI： 10.1109/SII55687.2023.10039212

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DOI： 10.1109/SII55687.2023.10039173

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DOI： 10.1016/j.polymertesting.2022.107800

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DOI： 10.1007/978-3-031-15226-9_50

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Language：English   Publishing type：Research paper (international conference proceedings)  

DOI： 10.1007/978-3-031-15226-9_6

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/SII55687.2023.10039470

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/ISIE51358.2023.10228060

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON51785.2023.10312418

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON51785.2023.10311873

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/ISIE51358.2023.10227941

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/ROBIO58561.2023.10354781

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON49645.2022.9968757

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Language：Japanese   Publisher：THE VIRTUAL REALITY SOCIETY OF JAPAN  

Various haptic devices for application to virtual reality have been developed. Most of them have to be stationary on a desk, thus users cannot move around. To overcome this shortcoming, we propose a wearable force feedback device that uses air jet. In this paper, a prototype for hand position guidance which is able to provide force in any direction is developed, and its performance to guide the wearer’s hand is evaluated by experiments.

DOI： 10.18974/tvrsj.27.3_264

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DOI： 10.3390/act11030089

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DOI： 10.1109/IECON49645.2022.9969096

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DOI： 10.1007/978-3-030-86294-7_30

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/SII52469.2022.9708865

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Other Link： https://dblp.uni-trier.de/db/conf/sii/sii2022.html#MatsuiOTNON22

Language：English   Publishing type：Research paper (international conference proceedings)  

DOI： 10.1007/978-3-030-86294-7_29

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Language：English   Publishing type：Research paper (scientific journal)  

DOI： 10.1109/ACCESS.2022.3227068

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DOI： 10.1109/RO-MAN53752.2022.9900630

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON49645.2022.9968618

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON49645.2022.9968625

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON49645.2022.9968815

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Other Link： https://dblp.uni-trier.de/db/conf/iecon/iecon2022.html#SuzukiSNON22

Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON49645.2022.9968554

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/IECON49645.2022.9968915

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/RO-MAN50785.2021.9515498

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/AIM46487.2021.9517536

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Language：Japanese   Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/AIM46487.2021.9517474

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DOI： 10.1109/ICIT46573.2021.9453574

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Language：English   Publishing type：Research paper (scientific journal)  

DOI： 10.3390/act10010017

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DOI： 10.1109/ACCESS.2021.3135035

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Publishing type：Research paper (scientific journal)   Publisher：Elsevier BV  

DOI： 10.2139/ssrn.3996748

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DOI： 10.2322/tastj.19.211

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DOI： 10.1109/ACCESS.2021.3114698

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DOI： 10.1109/ACCESS.2021.3112614

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DOI： 10.1088/1361-665X/aba846

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DOI： 10.1109/RO-MAN47096.2020.9223476

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/AIM43001.2020.9158934

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/AIM43001.2020.9158981

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DOI： 10.1109/AIM43001.2020.9158972

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DOI： 10.1109/AIM43001.2020.9158861

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/RoboSoft48309.2020.9116058

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Publishing type：Research paper (international conference proceedings)  

DOI： 10.1117/12.2558422

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/SII46433.2020.9026201

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/SII46433.2020.9025927

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DOI： 10.1109/SII46433.2020.9026165

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/SII46433.2020.9026285

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Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

DOI： 10.1109/SII46433.2020.9026231

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DOI： 10.1109/ACCESS.2020.2972572

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Language：Japanese   Publisher：The Robotics Society of Japan  

In recent years, the aging of pipelines has been severe and has caused fatal accidents. The pipe diameters are small, and the layouts are complex. Pneumatically driven mobile robots have become popular as inspection methods. Various types of robots have been studied, like earthworm-type robots, inchworm-type robots, and spiral-tube-type robots. Typically, they make periodic movements; however, they have challenges because they are driven by existing pneumatic valve technologies, which are limited to small mobile robots. Small pneumatic valves have low flow rates and limit the performance of pneumatic actuators. Therefore, we focused on the structure of the ball valve and periodic motion. Furthermore, in this paper, we developed the Compact Rotary Valve Mechanism for pneumatic mobile robots in pipe inspection, which generates periodic air pressure.

DOI： 10.7210/jrsj.38.965

DOI： 10.20965/jrm.2023.p0633_references_DOI_GrMm5ygjFtfynoUzZ62TOKgGCeZ

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DOI： 10.13180/clawar.2020.24-26.08.30

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DOI： 10.20965/jrm.2020.p0863

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DOI： 10.1109/ICAR46387.2019.8981664

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DOI： 10.1016/j.ifacol.2019.11.050

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DOI： 10.1016/j.ifacol.2019.11.057

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DOI： 10.1109/IECON.2019.8927514

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DOI： 10.1109/ICARM.2019.8833897

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DOI： 10.1109/LRA.2019.2902016

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DOI： 10.1088/1361-665X/ab192a

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DOI： 10.1088/1361-665X/ab0d9b

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DOI： 10.1109/SII.2019.8700353

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DOI： 10.1117/12.2514194

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DOI： 10.1117/12.2513246

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Language：Japanese   Publisher：The Japan Fluid Power System Society  

<p>Pneumatic rubber artificial muscle is attracting attention as an actuator having high cooperativeness with human because of its feature of being flexible and lightweight. The authors have developed Straight fiber type pneumatic artificial muscle (SF-ARM), which is a high power, highly displaced pneumatic rubber artificial muscle. Although SF-ARM has excellent contraction characteristics, it has a problem of short fatigue life. Therefore, in this study, focusing on strain-induced crystallization of natural rubber, the fatigue life of SF-ARM has been extended. First, strain-induced crystallization of natural rubber were confirmed by wide angle X-ray diffraction. Next, analysis of strain concentration in the vicinity of the crack was performed by the finite element method. Finally, a fatigue life test of SF-ARM was carried out to confirm the effect of prolonging the fatigue life by using strain-induced crystallization.</p>

DOI： 10.5739/jfps.50.46

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DOI： 10.1109/BIOROB.2018.8487219

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DOI： 10.1109/AIM.2018.8452682

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DOI： 10.1109/ROBOSOFT.2018.8404918

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DOI： 10.1109/ROBOSOFT.2018.8404893

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DOI： 10.1109/LRA.2018.2792145

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DOI： 10.1177/1045389X17705216

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DOI： 10.1109/ROBOSOFT.2018.8404893

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Language：Japanese   Publisher：一般社団法人 日本機械学会  

&lt;p&gt;The cylindrical rubber is axially reinforced by the fiber and closed by the rigid ends. When the inner pressure is applied to this fiber reinforced rubber cylinder, the diameter expands and the length shrinks. Such the cylinder can be used as the soft actuator, that is, the artificial muscle. In this paper, this problem is analyzed theoretically. Firstly, the differential equation, which is satisfied the cylinder&#039;s profile, is derived. Secondary, the solution is obtained as the closed form, when the rubber is soft enough compared to the fiber. Finally, it is found that the profile of the rubber cylinder is given by the incomplete elliptic integral, when the inner pressure is large enough. Moreover, the spring constant, the contraction ratio and the maximum stress are obtained with respect to the length of the cylinder. The spring constant is linearly increasing with the inclement of the initial length of the cylinder. The contraction ratio is increasing with the inclement of the initial length of the cylinder and converged to 54.3%. The maximum stress is related to the elastic modulus of the rubber and is not related to the inner pressure. When the length of the cylinder is through three to five times larger than the initial diameter of the cylinder, the rubber has the small maximum stress and the large contraction ratio.&lt;/p&gt;

DOI： 10.1299/transjsme.18-00351

DOI： 10.1299/transjsme.21-00290_references_DOI_9BBAHHSD7Dm6U1R0heJSGo5sD4X

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Language：Japanese   Publisher：The Robotics Society of Japan  

<p>Recently, assisting human motion with a wearable robot is studied widely. These assisting systems are proposed from various points of view. Our study has proposed an assisting system that the torque, angle, and the viscoelasticity of the joint are variable because the human muscle has the characteristic of variable viscoelasticity. This system consists of antagonized muscle that the stiffness is variable and magneto-rheological fluid brake that the viscosity is variable. Therefore, the system enables the wearable assistive device such as exoskeletons to be structurally soft and to provide the wearer with a high back-drivability. We have proposed the assisting method by changing the viscoelasticity of the device joint according to the viscoelasticity of wearer's muscle. But suitable viscoelasticity of the joint for the assistive motion is not well known. In this paper, an experiment is conducted to examine how the viscoelasticity of the joint affects to human motion when assisting. Also, based on the results from the experiments, we propose the control method for the joint viscoelasticity of the device that responds to the assistive motion and confirm the effects with the experiments. </p>

DOI： 10.7210/jrsj.36.567

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Language：Japanese   Publisher：The Robotics Society of Japan  

This paper proposes a novel hybrid pneumatic power source for a development of a portable pneumatic source. The hybrid source achieves light weight system by combination of multiple pneumatic sources. This paper is divided as follows. Firstly, the mobility of various pneumatic sources are evaluated by experiments. Evaluated methods are a small compressor driven by battery, tank, phase change of material, and chemical reaction. From the results, it was clarified that there is no best method since each method have advantages and disadvantages. Secondly, hybrid pneumatic source is proposed utilizing the result. Finally, a prototype is developed and the effectiveness of the proposed method is confirmed by experiments.

DOI： 10.7210/jrsj.36.233

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Language：Japanese   Publisher：The Society of Instrument and Control Engineers  

Recently, many devices driven by pneumatic actuators have been developed. In additions, many researches on pneumatic artificial muscles focusing on characteristics such as flexible operation, light weight and high output have been conducted. These artificial muscles were limited in their application range due to their durability and the necessity of an air pressure source. Therefore, in this research, as another approach apart from the improvement of the air pressure source device, we propose hollow artificial muscle with high efficiency and high durability.

DOI： 10.9746/sicetr.54.557

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

A pneumatic artificial muscle is a rubber actuator activated by air pressure. It is lightweight and has the high power density compared to other actuators such as motors and fluid powered cylinders. In addition, it can provide high compatibility with human since its flexibility. Authors have developed the Straight-fiber-type pneumatic artificial muscle which has high output and high contraction amount compared to the McKibben type artificial muscle that is widely used. However, the lifetime of the Straight-fiber-type pneumatic artificial muscle has not been considered so far. In this paper, effects of aspect ratio and materials on the lifetime of the artificial muscle are examined for prolonging the lifetime. Firstly, the desirable maximum stretch rate of the material is developed. Secondly, fatigue life is measured by reducing the elongation of the rubber material by changing the aspect ratio of length and inner diameter in the SF-ARM. Finally we measure the influence on the output characteristics by changing aspect ratio. The result shows relationship of the lifetime and the aspect ratio of the artificial muscle. We showed that the artificial muscle’s lifetime and contraction characteristics can be selected according to the application.

DOI： 10.1299/transjsme.17-00299

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DOI： 10.1109/BIOROB.2018.8487219

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DOI： 10.23919/ICCAS.2017.8204222

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DOI： 10.1109/IROS.2017.8202272

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DOI： 10.1109/IROS.2017.8206242

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：Institute of Electrical and Electronics Engineers Inc.  

DOI： 10.1109/ICRA.2017.7989711

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Language：Japanese   Publishing type：Research paper (international conference proceedings)   Publisher：The Japan Society of Mechanical Engineers  

Pneumatic driven systems are widely used in various fields. Recently, it is applied to wearable assist systems since it is lightweight, high-power and retains structural softness. To activate these pneumatic actuators, air compressor which is driven by large motors or engine is used generally. These heavy and large systems prevent pneumatic systems from being portable. If portable pneumatic power source were developed, pneumatic system could be used in wider fields. Thus, in this study, we aim to develop portable pneumatic power source that is enable to withstand practical use. As an initial step, various air compressing methods are evaluated in terms of portability in this paper. Methods to compare are small compressor activated by battery, phase change of material a chemical reaction.

DOI： 10.1299/jsmermd.2017.2p1-d02

DOI： 10.20965/jrm.2018.p0752_references_DOI_9NQpVoc1kai9cqGTk8y6cAuNg3d

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This paper is concerned with portable pneumatic power source using chemical reaction of sodium bicarbonate and citric acid. Carbon dioxide generated in the chemical reaction is used as the compressed air. Both sodium bicarbonate and citric acid are inexpensive, nontoxic, and readily available. This paper is organized as follows. Firstly, the characteristics of the chemical reaction is surveyed and the appropriate pneumatic power source system is discussed. Secondly, a pressure booster that can achieve a stable air generation system without external power is described. Thirdly, the experiment using the prototype system is conducted to confirm the effectiveness of the proposed method.

DOI： 10.5739/jfps.48.17

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DOI： 10.1109/ICARCV.2016.7838709

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DOI： 10.1109/ICARCV.2016.7838562

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Language：Japanese   Publisher：東京 : 日本フルードパワーシステム学会  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

In recent years, force feedback devices have been developed to improve the reality of VR experiences. However, most of the general force feedback devices target the upper limbs. By realizing force feedback to the lower limbs, it will be possible to realize an experience in VR space that cannot be achieved by force feedback to the upper limbs alone. Therefore, the authors aim to develop a lower limb force feedback device. In this study, we developed a lower limb force feedback device based on a physical model at soccer kicking. The output torque of the developed device was confirmed that met the target torque by the experiment.

DOI： 10.1299/jsmermd.2022.2p2-d04

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In recent years, force feedback devices have been developed to improve the reality of VR experiences. However, most of the general force feedback devices target the upper limbs. By realizing force feedback to the lower limbs, it will be possible to realize an experience in VR space that cannot be achieved by force feedback to the upper limbs alone. The authors have clarified the perceptual characteristics of the human dropping sensation in order to present force feedback to the lower limbs. In this study, we developed a wearable force feedback device that can present the sensation of dropping in VR space.

DOI： 10.1299/jsmermd.2022.2p2-d05

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Pneumatic drive systems are widely used in assistance devices and flexible drive robots owing to their characteristics of light weight, high output, and flexibility. However, those devices cannot perform instantaneous operation because those devices have low responsiveness. Then we focus on the physical properties of flammable dimethyl ether (DME), and we considered using combustion of DME to improve the responsiveness of pneumatic drive systems. We developed artificial muscle which is driven by burning DME inside the device. In this paper, we conducted the experiment to investigate the response time and displacement of artificial muscle when DME burned in the device.

DOI： 10.1299/jsmermd.2021.2p1-h01

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In transporting LP gas tanks, the load of workers is high due to handling heavy LP gas tanks. In previous studies, the physical load of workers when handling LP gas tanks was not evaluated quantitatively. This study aimed to evaluate the physical load in handling the LP gas by motion capture system and muscle potential. In this paper, a posture with carrying on the shoulder the LP gas tank was evaluated from the viewpoint of load torque of joints, muscle potential, and compression force of intervertebral discs.

DOI： 10.1299/jsmermd.2021.2p2-i10

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Bio-robotics is a research field that learns from the structural and control systems acquired by living organisms in the process of evolution and makes use of them in robotics. When imitating living organisms, it is still difficult to completely imitate their components such as muscles and skeletal structures, and trial and error is being carried out by applying various methods. Magnetic smart fluids are also attracting attention in bio-inspired robotics because not only they are liquids but also able to generate displacements and their properties by an external magnetic field. In this paper, we explain the earthworm-type robot and the variable viscoelastic joint system which is a bio-inspired robot using magnetic smart fluid.

DOI： 10.14243/jsaem.29.629

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In this paper, we proposed the application of a device using a variable viscoelastic joint for training and rehabilitation. By varying the antagonistic angle of the device with respect to the human motion, the training effects with different loads were verified. The proposed device can switch between training and rehabilitation by changing the antagonistic angle. However, the training effect using the variable viscoelastic joint has not been confirmed yet. Therefore, we measured the muscle potential during the movement when the antagonistic angle of the device was changed. As a result, the value of the EMG increased as the angle of the knee joint and the antagonistic angle of the device during the movement increased. It was confirmed that the variable viscoelastic joint can be applied to training.

DOI： 10.1299/jsmermd.2021.2p2-e05

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The authors have developed a variable viscoelastic joint module that mimics the principle of human joint drive. It is composed of antagonized pneumatic artificial muscles and a magnetorheological fluid brake. In the previous research, the joint module is developed and the variable stiffness performance is evaluated. In this paper, the variable viscous element of the joint module is evaluated by experiment. Result confirmed that the module has variable viscosity characteristics and it can be applied to robotic systems.

DOI： 10.1299/jsmermd.2021.2p2-g03

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Various haptic devices for application to virtual reality have been developed. Most of them have to be stationary on a desk, thus users cannot move around. To overcome this shortcoming, we propose a wearable force feedback device that uses air jet. In this paper, a prototype for hand position guidance which is able to provide force in any direction is developed, and its performance is evaluated by experiments.

DOI： 10.1299/jsmermd.2021.1a1-h02

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In a virtual reality (VR) space, wearing a head-mounted display can help with the visualization of objects, however, users cannot experience realistic tactile sensations. Recently, several force feedback devices have been developed, including wearable devices that use straight-fiber-type pneumatic muscles and magnetorheological fluids. This allows the devices to render elastic, frictional, and viscous forces during spatially unrestricted movement. Nevertheless, there are two problems. One is that there were items with low scores in the subjective evaluation regarding the discrimination of device weight and force magnitude. The other is the inability to handle many bilateral upper limb movement tasks. Therefore, this study aims to develop a device that can handle movements that interact with both arms.

DOI： 10.1299/jsmermd.2021.1a1-h04

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Pneumatic artificial muscles are advantageous owing to dynamic stiffness. However, the drawback of this is their poor controllability. In this paper, a reinforcement learning-based control system using a real robot is proposed to improve controllability. The proposed system is aimed to generate dynamic motion patterns that utilize the body structure and variable stiffness characteristics. We propose a reinforcement learning-based realistic drum-playing robot, and confirm its effectiveness through experiments.

DOI： 10.1299/jsmermd.2021.2p2-e07

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In the inspection of sewage pipes, it is necessary to prepare a pipeline map in order to efficiently identify the damaged areas, which are often lost so it is necessary to prepare a pipeline map at the same time as the inspection. The authors have previously developed a peristaltic robot for sewer pipe inspection and have estimated the pipe shape using IMU sensors. However, the accuracy of the estimated map was not enough to be put into practice. In this study, we try to improve the estimation accuracy by measuring the information of the position and orientation of the start and end points of the pipeline to constrain the estimated pipeline shape. The authors represent the pipe geometry with only three parameters, and the correction is performed by iterative calculation using the inverse Jacobian matrix.

DOI： 10.1299/jsmermd.2021.1a1-g08

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The purpose of this study is to investigate the effects on human fall sensation when a VR fall sensation presentation device is used to decelerate the device during descent. A questionnaire survey using VAS was conducted to evaluate the effects of acceleration and deceleration on the sensation of falling. A questionnaire using VAS was used to evaluate the sensation of falling and the sense of reality depending on the amount of acceleration and the amount of deceleration. The results suggest that, within the range of acceleration used in this experiment, the deceleration of the device does not significantly impair the sense of falling and the sense of reality.

DOI： 10.1299/jsmermd.2021.2a1-m07

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The mixing and transporting process of a solid–liquid mixture and a high-viscosity fluid is separate batch processes, leading to an increase in maintenance costs and disposal costs. To achieve continuous mixing and transporting process, the authors have developed a pneumatic peristaltic mixing conveyor based on the movement of transporting bolus in the intestinal tract. The proposed conveyer is possible to mix and transport with one device continuously, however, it has not been studied to mix and transport at the same time like the actual intestine does. In this paper, we proposed a congruence which is able to continuously switch between segmental and peristaltic movement in order to achieve a continuous mixing and transporting.

DOI： 10.1299/jsmermd.2021.2p1-e06

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We proposed herein a method for estimating the mixing state of the contents of a peristaltic continuous mixing conveyor simulating the intestine, developed for mixing and conveying powders and liquids. This study serves to improve a previously proposed method for estimating the mixing state using a logistic regression model with the pneumatic factor sensors installed in the device as inputs. To improve the estimation method, we changed the method of acquiring training data and labeling in the learning model. Moreover, comparison of the estimation accuracy and the result of the proposed method was better than that of the previous method.

DOI： 10.1299/jsmermd.2021.2p2-g01

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Currently, soft actuators are being actively researched. Genellary, soft actuators are more difficult to control than ordinary actuators because of their flexibility. Therefore, there is a need for a sensor that can be unified with the soft actuator and measure the change in shape of large deformations without interfering with the deformation of the soft actuator. In this study, we propose a strain sensor that can measure the displacement of a soft actuator based on a conductive paste with silver as a filler. This paper describes the investigation of the basic properties of conductive pastes using silver filler and the measurement equipment.

DOI： 10.1299/jsmermd.2021.2p1-e05

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Research on haptic devices aiming at application to virtual reality (VR) has been conducted. Most of them have to be fixed on a desk, and users can’t move around. To avoid this problem, exoskeleton type haptic device have been developed. However, there are problems such as discomfort caused by the reaction force of the presented haptic force at another part of the body. In addition, limitation of the rage of motion by exoskeleton structure is also problem. Therefore, in this research, we propose a wearable force feed back device using air jet without skeletal structure. In this report, an elastic ball presentation experiment using a prototype was conducted. Results confirmed the ability to render virtual ball with different sizes and stiffness.

DOI： 10.1299/jsmermd.2020.2a1-p05

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The authors have developed A variable viscoelastic joint that mimics the principle of human joint drive and uses a pneumatic artificial muscle with an antagonistic arrangement and a magnetic viscous fluid brake. In this paper, the versatility of this joint was improved by modularizing this joint. The variable viscoelastic joint module is the world's first pneumatic drive module with a variable viscoelastic characteristic that includes a power source inside the device. We believe that the development of this device will make it easier to manufacture robots that are lighter, safer and easier to maintain than robots that use motors and reduction gears, and will operate at lower cost.

DOI： 10.1299/jsmermd.2020.2a2-h04

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In the inspection of sewer pipes, it is necessary to identify the damaged part, and a pipe diagram is indispensable, but it is often dissipated and many pipe maps do not exist. Therefore, it is required to create pipeline diagrams. Therefore, the authors used an IMU sensor that measures three-axis acceleration and three-axis angular velocity, and corrected the cumulative error that occurred at that time by using the traveling characteristics of the earthworm's peristaltic motion, which is a periodic motion of progression and stopping. We tried to measure the pipe length and the pipe shape. In this report, we conducted a basic evaluation experiment to measure the pipe length with high accuracy, and investigated the effectiveness of this method.

DOI： 10.1299/jsmermd.2020.2a2-h06

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In order to excavate lunar underground, we have developed a lunar earthworm-type excavation robot “LEAVO”. The target missions of LEAVO are 1) excavate boreholes for environmental sensors and 2) collect some samples in particular layer. LEAVO has succeeded in 938 mm vertical excavation, and we confirmed its usefulness in the target mission 1). In addition, in order to expand the excavation range to achieve mission 2), a distributed driving system was developed as a new drive system for bending and horizontal excavation, and excavation performance was confirmed through excavation experiments. In this study, we design and develop a propulsion unit for an excavation robot in combination with a distributed driving system.

DOI： 10.1299/jsmermd.2020.2p1-b03

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In this paper, a prototype of a joint in which a pneumatic artificial muscle and a tension spring are antagonistically arranged (one-sided spring antagonized joint) was developed, and the basic characteristics of the prototype were evaluated. The relationship between the torque and the angle of the prototype showed that torque increases as the angle increases (or vice versa). It was also found that the joint stiffness and the antagonized angle changed with each applied pressure. From these results, it was confirmed that the prototype showed the same behavior as the theoretical one-sided spring antagonized joint.

DOI： 10.1299/jsmermd.2020.2p1-c02

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Seabed mineral resources such as rare earth elements are widely and shallowly distributed in the deep sea floor 2-3m. Seafloor sampling and analysis are needed to determine their distribution. Vertical drilling with a drilling vessel is effective for depth sampling. However, it requires enormous cost and limits the sampling range to the pipe diameter. Therefore, we are developing a seafloor exploration robot that can excavate horizontally and collect rare earth samples. In this paper, we report the result of field test in an actual sea floor using an excavating robot with water proof finish.

DOI： 10.1299/jsmermd.2020.1a1-b13

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In recent years, attention has been focused on soft actuators, especially dielectric elastomer actuators. DEA has a structure in which a dielectric is sandwiched between flexible electrodes. The performance of DEA depends on the dielectric. Generally, silicon rubber or acrylic rubber is used for the dielectric. When using these materials, the DEA typically requires significant stress during the initial stages of elongation and must be pre-stretched using a rigid frame. This rigid frame limits design and movement, and limits the range of DEA applications. Therefore, we focused on a dielectric material called a slide ring material. SRM can be stretched with low stress during the initial stages of elongation, therefore DEA which has SRM as dielectric can deform largely without pre-stretch. In this paper, a bending unit is developed using DEA with SRM, and its movement is confirmed by experiment.

DOI： 10.1299/jsmermd.2020.1a1-j02

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There are many force feedback devices that focus on upper limbs. However, in the real world, not only the upper limbs get force feedback. Therefore, the authors attempt to develop a wearable lower limb force feedback device that enables users to move around in wide area. However, there is a limit to the size of a device worn by human, and it is difficult to present an acceleration equivalent to gravitational acceleration with a wearable type device. Therefore, the authors proposed a method of giving a descent acceleration smaller than the real world and evaluated the sensation of falling of humans.

DOI： 10.1299/jsmermd.2020.1p1-n02

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Pneumatic drive systems are widely used in assistance devices and flexible drive robots owing to their characteristics of light weight, high output, and excellent flexibility. Compressed air generated by engine compressors and large motors is mainly used to drive these devices, but such large and heavy air pressure sources are barriers to the mobilization of pneumatic drive devices. Then ,we focus on the physical properties of flammable dimethyl ether (DME), and consider obtaining energy in two stages via a phase change and the combustion of DME to develop a new mobile air pressure source that can release enough pressure and flow. In this paper, we measured the pressure when the mixed gas is burned in a semi-hermetic state.

DOI： 10.1299/jsmermd.2020.1p2-h01

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Valuable seabed mineral resources such as rare earth elements are deposited 2–3 meters into the deep sea floor, and sampling and analyzing the seafloor is necessary to clarify how they are generated and distributed. We have developed a seafloor robotic explorer that can excavate horizontally and collect samples of rare earth elements, which may enable wide-area exploration as multiple robots could be simultaneously implemented to autonomously search beneath the seabed. The seafloor robotic explorer may excavate sediments such as clay and sand before reaching the rare earth layer. In previous studies, it has been discovered that the rotation speed, penetration force, and characteristics of the sediment affected the excavation resistance. Therefore, we assumed that controlling the rotation speed and penetration force would enable an efficient excavation according to the ground characteristics. Therefore, in this paper, we examined the effect of penetration force on drilling efficiency using both dry and underwater silica sand ground with different ground characteristics.

DOI： 10.1299/jsmermd.2020.1a1-b03

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This paper introduces a two-degree-of-freedom pipe selection mechanism using contraction and extension unit composed of single tube and a T branch experiment of an in-pipe mobile robot equipped with this mechanism. Household piping is used for gas transportation to each household. If the pipe is cracked or corroded due to long-term use, it becomes difficult to supply a stable gas. Therefore, inspection of household piping is necessary. The existing methods require a lot of time for the inspection or it is difficult to inspect the entire pipeline. Therefore, in this study we developed an inspection robot for home piping using a mobile robot. To date, the robots proposed have been able to bend in the direction along the pipeline, as the tip of the robot passively bends when passing through the curved pipe. However, at the branch pipe, there is no mechanism that actively bends the tip of the robot, and the pipe cannot be selected and moved in a specific direction. Therefore, this paper proposes the application of a small pipe selection mechanism combining a ball-point pen knock mechanism and a wire bending mechanism to an in-pipe mobile robot using the pressure difference of a single tube.

DOI： 10.1299/transjsme.20-00052

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This paper describes multi-segmentation of artificial muscles integrally molded by a 3D printer and simplification of post-processing. In recent years, with the improvement in performance of 3D printers, it has become possible to integrally mold flexible and hard materials. From this, attention has been focused on the integral molding of actuators that makes effective use of the complex structure of 3D printers. Most of the actuators using 3D printers use air pressure, and in consideration of the material properties, pistons using a bellows structure are common. However, the output of the piston is small because the pressure receiving area is small. Therefore, the pneumatic artificial muscle was integrally molded using the structural advantage. In this paper, we focused on the contraction length of the artificial muscle, and integrally molded the artificial muscle with the increased number of segments. In addition, the design was changed to reduce post-processing after molding. We also discussed the effect of increasing the number of segments on contraction by measuring the contraction of the artificial muscle.

DOI： 10.1299/jsmermd.2020.1p2-h14

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In order to excavate lunar underground, we have developed a lunar earthworm-type excavation robot “LEAVO”. The target missions of LEAVO are 1) excavate boreholes for environmental sensors and 2) collect some samples in particular layer. LEAVO has succeeded in 938 mm vertical excavation and we confirmed its usefulness in the target mission 1). Then, we now aim to study curving excavation to achieve target mission 2). This study aims to excavate regolith in a particular layer with LEAVO. For this reason, new driving system is developed. It enables to deploy drive motor on the circumference of the excavating axis so LEAVO can curve easily. Therefore, the authors conduct excavation experiment using excavating unit, and check the possibility of the proposed system.

DOI： 10.1299/jsmermd.2019.2p1-t06

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A four degrees of freedom wearable force feedback device with pneumatic artificial muscles and magnetorheological fluid clutches have been developed. The device has four degrees of freedom at shoulder and elbow. By arranging artificial muscles and magnetorheological fluid clutches at each joint, the device can render elasticity using characteristic of artificial muscle, friction, and viscosity by controlling torque of magnetorheological fluid clutch. We have already confirmed that the device render elasticity and friction. However, we have not confirmed whether the device can render viscosity yet. In this paper, we derived an equation for rendering viscosity, and conducted an experiment based on the equation.

DOI： 10.1299/jsmermd.2019.2a1-s07

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The pneumatic soft actuator converts the input energy by utilizing structural deformation or material deformation according to the applied pressure to obtain the output. Although various forms of operation are conceivable, in practice it was difficult to freely design under manufacturing constraints. In recent years, with the development of 3D printers, flexible materials such as rubber as well as hard materials such as conventional resin can be printed. It is now possible to manufacture an actuator having a complicated shape combining a resin material and a rubber material that have been difficult to produce. In this paper, Pleated Pneumatic Artificial Muscles using 3D printer which can design freely using resin and rubber material with fabricated and evaluated contraction characteristics.

DOI： 10.1299/jsmermd.2019.2a1-c07

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Recently, in Japan, a burden for labor is increasing due to the aging society. To solve these problem, assistive suits are proposed for one of the solutions. In the previous study, an assistive suit, Airsist I has been developed that is based on the variable viscoelasticity. However, the motion judgment interface for Airsist I has not been studied. In this study, joint angle and joint angular velocity are used to judge the motion of the wearer, because Airsist I has a high backdrivability. This paper reports the motion judgment algorithm that is based on the wearer’s joint angle, and joint angular velocity, and experiments are conducted to evaluate the utility of the algorithm.

DOI： 10.1299/jsmermd.2019.1a1-h10

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Force feedback devices are attracting attention as a means to apply virtual reality and augmented reality to sports, entertainment, and rehabilitation. We have developed a force feedback device Using pneumatic artificial muscle and magneto-rheological fluid clutch. However, there were problems such as increase in the weight of the device and complication of control system. In order to solve these problems, a new force feedback method using an elastic spring and a magneto-rheological fluid clutch was proposed. The force feedback characteristics of the force feedback method were modeled. A 1-degree-of-freedom force feedback device using a new force feedback method was developed. Modeled characteristics of force feedback were confirmed by conducting experiment for rendering elasticity using the device.

DOI： 10.1299/jsmermd.2019.1p1-t04

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The authors have developed a peristaltic motion type transport machine simulating the movement of the intestinal tract. As a drilling earth and sand transportation method, we have proposed sediment transport by a peristaltic motion type transport machine. Vertical transport experiments of samples with varying particle size and moisture content so far have been conducted to show that samples of each particle size can be transported. However, we don’t know how the conveying amount varies depending on the liquid limit and water content ratio of each sample. In this report, we discuss the boundary of lifting sample by discussing the transport amount from the ratio of moisture content and liquidity limit.

DOI： 10.1299/jsmermd.2019.1p2-d04

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Pneumatic artificial muscles have characteristics that are not found in motors such as lightweight and flexible. However, it is difficult to accurately sensing of state due to large deformation during operation and nonlinearity. To solve the problem, authors focus on a piezoelectric wire sensor which can sense change of shape. In this paper, we investigated the output characteristics of the piezoelectric wire sensor when changing collision speed, load and contact surface shape for sensing of artificial muscle. Results show that while the collision speed and the output are in a proportional trend, the load and the contact surface shape have less influence on the output.

DOI： 10.1299/jsmermd.2019.1p2-k02

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Movement of ankle and pneumatic compression to lower limb are able to increase the blood flow, and effective for DVT prevention. However, people with neuromotor disabilities can not move their ankle, and pneumatic compression can cause nerve palsy of fibula. Therefore, we proposed the device which can provide both passive movement of ankle and pneumatic compression to lower limb. In this paper, a prototype driven by pneumatic actuators is developed, and a change of blood flow with the prototype is evaluated.

DOI： 10.1299/jsmermd.2019.2p1-c09

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In order to process lunar underground excavation, we have developed a lunar earthworm-type excavation robot ("LEAVO"). As we achieved vertical excavation with it, we now aim to perform curving excavation to make LEAVO be able to collect samples more efficiently in a particular layer. To achieve this goal, it is necessary for the LEAVO's excavation sub-units to support the robot on different borehole diameters, because the diameter enlarges in curves. As the previously developed curving excavation system could not support correctly the robot in the curves, we propose in this paper a "grasping system using a scroll chuck" and test its output characteristics. By doing so, we will conclude if it can be applied in a curving excavation system.

DOI： 10.1299/jsmermd.2019.2p1-t07

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DOI： 10.1299/jsmermd.2019.2a1-t08

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Force feed back devices have been studied. Many of them are desktop type fixed to a heavy object such as desks, and they can not be used for applications with movement. Wearable devices have been developed, however, other problems such as discomfort caused by the reaction force of the device at another part of the body are occured. In this research, a force feed back method using compressed air jetting for wearable force feed back device is proposed. In this paper, concept of the method is introduced and the effectiveness is verified with prototype.

DOI： 10.1299/jsmermd.2019.1p2-t09

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Language：Japanese   Publisher：The Robotics Society of Japan  

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DOI： 10.7210/jrsj.37.34

DOI： 10.1299/transjsme.23-00208_references_DOI_OhaCHh18wG1gGvawcDd2xOO7GqV

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DOI： 10.7210/jrsj.37.57

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In this paper, an assistance method that controls the joint stiffness and antagonized angle using variable elastic elements is proposed. The proposed system changes the joint stiffness and antagonized angle so that they correspond to the phase of movement, and performs movement assistance in cooperation with the wearer. As a structurally variable configuration of stiffness and antagonized angle, a joint structure in which an artificial muscle and tension spring are antagonistically arranged is proposed. A mathematical model of one side spring antagonized joint is proposed and its characteristics is examined.

DOI： 10.1299/jsmermd.2019.1a1-i01

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

Valuable seabed mineral resources such as rare earth elements are deposited 2–3 meters into the deep sea floor, and sampling and analyzing the seafloor is necessary to clarify how they are generated and distributed. The current general sampling method based on vertical drilling effectively acquires the geological profile in the vertical direction. However, it is inefficient for investigating deposits widely distributed in the horizontal direction because the sampling range is limited to the diameter of the pipe. We are developing a seafloor robotic explorer that can excavate horizontally and collect samples of rare earth elements, which may enable wide-area exploration as multiple robots could be simultaneously implemented to autonomously search beneath the seabed. The excavation depth of our previously reported underwater drilling robot SEAVO II was limited to 430 mm; the discharging outlet became buried in the ground, making it difficult to discharge the drilled soil and ultimately limiting the excavation depth. In this work, we introduce a discharging mechanism that implements water jetting to improve the excavation depth.

DOI： 10.1299/jsmermd.2019.2a1-i02

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

Low back pain is a typical occupational illness, and wearable assistive devices have been studied for its prevention. These wearable assistive devices assist extension of the waist or hip joint, however, they can not assist other joints such as elbow. Also, wearer has to support the weight of the device itself during an action other than lifting-up motion such as walking. In this research, to solve the problem above, a ground contacting type assistive device which assists lifting-up motion is proposed. The proposed device aims at a lightweight construction and high assist efficiency by letting the weight of the heavy object transmit directly to the ground. In this paper, we describe the concept, and the effectiveness of the proposed method is verified by ex0periment with a prototype.

DOI： 10.1299/jsmermd.2018.1p1-c16

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In this paper, evaluation experiment of an antagonistic joint with two artificial muscles is conducted with feedforward controller which is based on the experimental identification model. The previous controller was based on a mechanical equilibrium model which we can understand the characteristics of the artificial muscle. However, the accuracy of the controller was poor, and the calculation is too complex that the sequential calculation cannot keep up with a real time control on a microcontroller. Thus, this paper proposes an experimental identification model whose calculation is simpler, and has a better accuracy than the previous one. Also, the parameters in the model are easily identified by the measurement experiment of the artificial muscle. And apply the feedforward controller which is based on an experimental identification model to the antagonist joint with two artificial muscles.

DOI： 10.1299/jsmermd.2018.2a2-g14

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

A pneumatic artificial muscle is an air pressure-activated rubber actuator. It is lightweight and high in power density compared to motorized actuators and fluidic cylinders. The authors have developed a straight-fiber-type pneumatic artificial muscle (SF-ARM) with high output and contraction amounts compared to those of the widely used McKibben type artificial muscle. Until now, the ratio between the inside diameter of the SF-ARM and the operating part length was examined. However, there is a limit in extending the fatigue life by decreasing the aspect ratio. Therefore, in this study, we have extended the life by changing stress amplitude. As a result, fatigue life could be improved by reducing stress amplitude.

DOI： 10.1299/jsmermd.2018.2a2-g15

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

Pneumatic driven assistive devices have advantages such as structurally flexible movement, however, they have a problem in its mobilization since they need heavy air compressor to be activated. Therefore, in this research, we developed a hybrid portable pneumatic source for pneumatic driven assistive device based on the principle of a hybrid pneumatic source in the previous research. The developed prototype can supply more than 600 NL total flow by one energy supply and 0.7 MPa of pressure with the portable weight. The assistive device was also driven using the prototype, and it was confirmed that the device could be driven properly.

DOI： 10.1299/jsmermd.2018.2p1-h16

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Language：Japanese   Publisher：日本工業出版  

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Publishing type：Lecture material (seminar, tutorial, course, lecture, etc.)  

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In this study, a variable viscoelastic joint system comprising antagonized artificial muscles and magneto-rheological fluid brakes is proposed. This system enables human assisting devices such as robotic exoskeletons to retain structural softness when compared with the existing devices driven by motors and reduction gears, which can only achieve superficial softness. The authors had proposed the system and showed its effectiveness via experiments using a prototype with one degree of freedom in their previous works. In this study, as the next step in designing the human assisting device, a lower body assistive prototype “Airsist I” is introduced. In addition, a control method that can cooperate with the wearer without the need for an additional operation is proposed.

DOI： 10.1299/jsmermd.2017.1p1-k08

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As an entertainment robot, musical instrument performance robots are being studied. However, it is difficult to play musical instruments with the same expression as human for existing robots. Especially, in regards to percussion, it is quite difficult because human changes not only torque of joint but stiffness and viscous during playing. Therefore, we focus on applying a variable viscoelastic joints authors have studied to performance robot that playing percussive instrument. In this paper, concept of the robot is proposed and 1 degree of freedom prototype is developed. Moreover, sound volume measuring experiment is conducted by the prototype. The result is compared to the result obtained by a motor driven prototype.

DOI： 10.1299/jsmermd.2017.2a2-f05

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Pneumatic driven systems are widely used in various fields. Recently, it is applied to wearable assist systems since it is lightweight, high-power and retains structural softness. To activate these pneumatic actuators, air compressor which is driven by large motors or engine is used generally. These heavy and large systems prevent pneumatic systems from being portable. If portable pneumatic power source were developed, pneumatic system could be used in wider fields. Thus, in this study, we aim to develop portable pneumatic power source that is enable to withstand practical use. As an initial step, various air compressing methods are evaluated in terms of portability in this paper. Methods to compare are small compressor activated by battery, phase change of material a chemical reaction.

DOI： 10.1299/jsmermd.2017.2p1-d02

DOI： 10.20965/jrm.2018.p0752_references_DOI_9NQpVoc1kai9cqGTk8y6cAuNg3d

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Working population decreases because of the aging society. Therefore the workload per person increases. To solve this problem, assist suit is studied activity. This study has proposed a new actuation system with variable viscoelastic joint for an exoskeleton assist suit. This variable viscoelastic joint system is composed of antagonized artificial muscles and magneto-rheological fluid brake (MR-brake). The system enables assist suit to have structural softness and high back-drivability. This paper evaluated back-drivability of the system. So, organoleptic evaluation experiment which compares variable viscoelastic joint system to actuation system with motor and reduction gear was conducted. As a result, high back-drivability of variable viscoelastic joint system was confirmed.

DOI： 10.1299/jsmermd.2017.1p2-j08

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In this study, a novel actuation system for an exoskeleton with a variable viscoelastic joint and clutch was proposed. The variable viscoelastic joint system comprised antagonized artificial muscles and magneto-rheological fluid brake (MR-brake). This system enabled the exoskeleton to retain structural softness when compared with the existing exoskeletons driven by motor and reduction gear, which could only achieve superficial softness. In addition, a clutch system that provided high back-drivability to the wearer by structurally separating the exoskeleton from the wearer was proposed. As an initial step in designing the exoskeleton, a knee exoskeleton with the proposed system and its control method were developed in this study. Furthermore, experiments were conducted to confirm the influence of the proposed viscoelastic system on the wearer and the effectiveness of the clutch system.

DOI： 10.1299/jsmermd.2016.2a2-13b1

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A variable viscoelastic joint system with a clutch for a human assistance is proposed in this research. The variable viscoelastic joint system comprised antagonized artificial muscles and magneto-rheological fluid brake (MR-brake). This system enabled the human assisting device such as exoskeletons to retain structural softness when compared with the existing devices driven by motor and reduction gear, which could only achieve superficial softness. In this paper, a space saving pulley for antagonized pneumatic muscle is proposed. Generally, required assisting torque of human joints at flexion and extension are different. Therefore, adopting a step pulley is preferable when joints are driven by antagonized pneumatic muscle. However, a step pulley makes a joint system thicker and generates unnecessary torque. The proposed pulley resolve these problem by placing two antagonized wires in the same plane which is vertical to rotation axis of the pulley.

DOI： 10.1299/jsmemecj.2016.s1510205

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Recently, many devices driven by pneumatic have been developed. Generally, they need large air compressor to obtain compressed air. However, such large and heavy pneumatic power source prevent such devices to be portable. Thus, in this paper, portable pneumatic power source using chemical reaction of sodium hydrogen carbonate and citric acid is proposed. Carbon dioxide generated in the chemical reaction is used for compressing air. Both sodium hydrogen carbonate and citric acid are generally used for cleaning, and it is cheap and non-poisonous. In addition, an experiment is conducted to verify effectiveness of proposed power source.

DOI： 10.1299/jsmermd.2016.2a1-03b6

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To achieve dynamic motion, such as jumping and running, generating large instantaneous force and decreasing impact force at the time of the landing are needed. However, when increasing the instantaneous force of actuators such as motors and hydraulic actuators, the weight of robot also tend to increase. Therefore, in this study, we focused on the variable viscoelastic element with the human muscle. In this paper, we developed a bipedal jumping robot with variable viscoelastic joints. In this robot, we adopted straight-fiber-type artificial muscle as a variable elastic element and the magnetorheological fluid (MR) brake as a variable viscous-friction element. Moreover, we conducted the bending and stretching operation experiment by this robot. In this experiment, we used the experimental parameters which were determined based on human bending and stretching operation. As a result, it was confirmed that this robot realized the bending and stretching operation.

DOI： 10.1299/jsmemecj.2016.s1510201

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Working population decreases because of the aging society. Therefore the workload per person increases. To solve this problem, wearable assist suit (WAS) is studied activity. So the authors propose novel WAS which has a clutch and a variable viscoelasticity joint. As first stage of the WAS development, relationship between resistance torque to knee and the discomfort the wearer experiences is investigated by a survey questionnaire experiment. Range of resistance torque to the knee which is acceptable in daily use for a wearer is declared. Moreover, the influence of resistant torque on a muscle of knee extension is considered and confirmed by measuring surface-electromyography.

DOI： 10.1299/jsmermd.2016.2a2-14a1

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This paper presents a fluid powered Motion Socks aimed to prevent deep vein thrombosis (DVT). As the basic design concept, "Safe Area" is introduced, which can assure both safe driving direction for the foot and efficient force transmission. To satisfy this concept, two types of fluid powered actuators with flexible structure are proposed to generate pulling motion and pushing one. The proposed Motion Socks can realize four different motions by using three pull-actuators and one push-actuator. Additionally, in order to measure the posture of the ankle, a sensing device composed of two bending sensors is proposed, which is attached on the inside of Motion Socks. The proposed whole system could successfully promote the blood circulation and its validity was experimentally verified.

DOI： 10.1299/jsmermd.2014._1a1-g02_1

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This paper describes the development of a fluid powered Motion Socks aimed to prevent deep vein thrombosis (DVT). In general, actuators have a characteristic that the more degree of freedom they have, the lager they are. Also, slippage between a body and wearable devices is an issue as well. In order to solve these problems, it is suggested the device called curved tube actuator for creating flexure motion of ankles using an actuator capable of generating force vertically to a body. The creating flexion motions of an ankle using this actuator were showed through experiment showing the effectiveness of the actuator regarding support of ankle motion.

DOI： 10.1299/jsmermd.2012._2p1-b01_1

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Language：Japanese   Publisher：東京 : 日本フルードパワーシステム学会  

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Publisher：The Ceramic Society of Japan  

Highly-oriented Si nanoparticles (SNP) were precipitated in amorphous SiO₂ using separation by implanted oxygen (SIMOX) method and showed visible luminescence at room temperature. In order to investigate the microstructure of the SNPs, we observed the Si/SiO₂ interface by cross-sectional high-resolution transmission electron microscopy (HRTEM). The three-dimensional shape of the SNPs observed from different directions is an {111}-surrounded octahedral structure, each apex of which has an {100} facet. The upper (surface-side) interface of SiO₂/Si(100) contains missing atomic rows, while the lower (substrate-side) interface of Si(100)/SiO₂ is atomically flat except for the steps at the intersection with (111) plane. Similar atomically sharp structures were observed at the Si{111}/SiO₂ interfaces. Image-simulation of the interfaces well reproduced the microstructures observed by HRTEM and proved that the interfaces are those of amorphous SiO₂ and single-crystal Si without any intermediate layer.

DOI： 10.2109/jcersj.106.1255

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Application no：特願2017-081673  Date applied：2017.4.17

Announcement no：特開2017-215036  Date announced：2017.12.7

Registration no：特許第6875730号  Date registered：2021.4.27 

Applicant (Organization)：学校法人中央大学

Application no：特願2017-051685  Date applied：2017.3.16

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Application no：特願2016-215450  Date applied：2016.11.2

Announcement no：特開2018-071740  Date announced：2018.5.10

Registration no：特許第6854504号  Date registered：2021.3.18 

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Application no：特願2016-200304  Date applied：2016.10.11

Announcement no：特開2018-061613  Date announced：2018.4.19

Registration no：特許第6781457号  Date registered：2020.10.20 

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Application no：特願2016-126474  Date applied：2016.6.27

Announcement no：特開2018-003855  Date announced：2018.1.11

Registration no：特許第6757027号  Date registered：2020.9.1 

Applicant (Organization)：学校法人中央大学